VFR2000-OMM0001

(N.O.)3 3 B 1.VFR200 2.VFR210 P8 0.9Nm -10No.VFR2000-OMM0001 ) ARBF2000 P 1.0MPa 1) 0.05to0.83MPa 2) -5to60oC ()3) M5X0.8 (kg) 0.16 PA 5.5 (mm2) P1=0.7MPa,P2=0.5MPa S PB 5.1 DIN DIN DIN DIN / / / / AEA 12 (mm2) DIN 180 P2=0.5MPa S BEB 11 )0.9MPa ) )50oC )2 ) P A B -11 No.VFR2000-OMM0001 01C 01T COM A (A B B AB ) COM AB+ BVFR2100 A COM VFR2200 A COM B 3 400 5 A COM

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

Stations: 01, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option

Stations: 01, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: w/o Option, Manifold Individual Supply: w/o Option

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: Units Selection Function, Calibration Certificate: None, Certificate in both English and Japanese, Flow Direction: R (Right to Left)

Stations: 01, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option

Stations: 01, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: w/o Option, Manifold Individual Supply: w/o Option

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: Q (Lead Wire and M12-M12 Connector, 3m), Unit Specification: M (SI Unit Only)

Manifold with Stainless Steel Plate: S, Wiring, Connection: F (Connector Entry Direction Adjustable, D-sub Connector, 25 Pins), Lead Wire Length: None, Wiring Type: All Double Wiring, Valve Stations: 12 (12 Stations, All Double Wiring), Port Size: 01 [4(A)/2(B) Port: 1/8; 1(P)/3(EB), 5(EA) Port: 1/4], Thread Type: F (G), Option: P (Trim Plate)

Manifold with Stainless Steel Plate: S, Model: 51S (EX260), SI Unit: 0 (without SI Unit), Wiring Type: All Double Wiring, Valve Stations: 08 (8 Stations, All Double Wiring), Port Size: 01 [4(A)/2(B) Port: 1/8; 1(P)/3(EB), 5(EA) Port: 1/4], Thread Type: F (G), Option: P (Trim Plate)