Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: NPT1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: None, Operation Manual: w/o Operation Manual, w/o Calibration Certificate

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: w/o Operation Manual, Calibration Certificate

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: NPT1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: Operation Manual, Calibration Certificate

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: NPT1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual: w/o Operation Manual, w/o Calibration Certificate

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: w/o Operation Manual, Calibration Certificate

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: NPT1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: B [Panel Mount Adapter, (ZS-46-B)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: B [Panel Mount Adapter, (ZS-46-B)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: NPT1/8, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: w/o Operation Manual, Calibration Certificate

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: NPT1/8, Lead Wire: w/o Lead Wire, Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: -

AS

AS2002F-04 When connecting 4 pcs. and mounting L-brackets on both sides Speedcontroller AS2002F-04 4 pcs. L-bracket AS-20L 2 pcs. Threadedstudkitformanifold AS-32B 1 pc. 616

VER2000/4000

AL Dimensions DXT334-X72-04R-04U L side U side D side Exhaust port R side Rc 1/2 supply port (L side) 2-Rc 1/2, Output port 14-9-23

lPSMt

HOW TO ORDER x . x x Supply & Output Pressure Gauge f 00 no gauge 01 2k$/cnf 02 3 kgrf/cm'?

lPSMt

HOW TO ORDER x . x x Supply & Output Pressure Gauge f 00 no gauge 01 2k$/cnf 02 3 kgrf/cm'?

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

Electrical entry 2(B) 4(A) Symbol Electrical entry L-type plug connector B Note 2) 5(EA) 3(EB) 1(P) L 4-position dual 3 port valves (N.C./N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Lead wire length 300 mm Symbol 3 6 10 15 20 30 100 Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

Vacuum Regulator Series IRV

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

seals Type of actuation Cylinder port size 2 position 3 position One-touch fitting Pressure center Effective area mm (Cv factor) Exhaust center Closed center Series C3 C4 C6 (6) M5 (3.2) (4) Double Single VQ130 Metal seal VQ131 Rubber seal 4.5 (0.25) 6.3 (0.35) 54 Series VQ1000 How to Order Manifolds VV5Q13 (-00T) J Series VQ1000 P, R port inch bore size Stations Options Symbol Stations 01

฀AS

L-bracket AS-20L 2pcs. Threadedstudkitformanifold AS-32B 1pc. 1

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS23 1FE-01 AS22 1FE-02 AS23 1FE-02 AS32 1FE AS33 1FE AS42 1FE AS43 1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B