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Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

piston rod L S R X D Note: Tie rod length varies by mounting style.

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

MC NFB Servomotor HC-PQ Power supply Single phase 200VAC (Type A) or Single phase 100VAC (Type A1) C P U L1 U V V W Servo amp SM L2 W MR-CA E or MR-CA1 The length of the cable between the controller and servo amp is 2m or less.

HRX-OM-W004-H Operation Manual Communication function Thermo-chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRR010-A-10HRR012-A-10HRR018-A-10HRR010-A-20HRR012-A-20HRR018-A-20HRR024-A-20HRR030-A-20HRR050-A-20HRR050-A-40HRR010-W-10HRR012-W-10HRR018-W-10HRR010-W-20HRR012-W-20HRR018-W-20HRR024-W-20HRR030-W-20HRR050-W-20HRR050-W-40Keep this manual available whenever necessary

Line No. 90 L Adapters Male to Female X2 S/S . P3, L10 X3 S/S . P3, L10 X4 S/S . P3, L10 RX3-2-3-2 S/S. P4, L12 RX3-1-1-1 S/S. P4, L12 M8-6x6-8 S/S . P20, L78 Y8 S/S . P4, L14 3/8BK-6 S/S . P18, L69 C1 S/S. P1, L1 C2 S/S. P1, L1 C3 S/S. P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S .

8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

60 30 2] 1000 [mm/s [mm/s] 48 10 5 20 12 6 2] 1000 [mm/s [mm] 5 1 LEFS 32H 32A 32B 40H 40A 40B [mm/s] 30 2] 1000 [mm/s [mm/s] 24 16 8 30 20 10 2] 1000 [mm/s [mm] 1 LEF 7 LED f 50 No.JXC-OMU0004-A LEFB LEFB16 LEFB25 LEFB32 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 48 200 48 200 48 200 1 60 300 60 300 60 300 2 70 400 70 400 70 400 3 80 500 80 500 80 500 4 100 600 100 600 100

1 3 Port Solenoid Valve Series V100 V100 Power Consumption 0.1 W (With power saving circuit) Power Consumption 0.1 W (With power saving circuit) Power Consumption 0.1 W (With power saving circuit) SY SYJ VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP

(A contact) Brake Without brake With brake Nil B Home position switch None Yes (cable length 0.3m) Nil S Specifications 2 phase stepper motor (with/without brake) 5 phase stepper motor (with/without brake) Motor Lead screw Positioning repeatability Lead Speed Note1) Slide screw 8mm 0.05mm 6mm 3 to 100mm/s 9 (4)kg 4 (4)kg 12mm 6 to 200mm/s 4.5 (4)kg 2 (2)kg 12mm 6 to 200mm/s 3 (3)kg 1 (1)kg

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 90.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 90 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 111 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. PRESSURE SWITCH, ISE1-6. 3 SCREEN HI PRECISION DIG PRESS SWITCH. 104.00000 lb. N59.

ZZ Z Z S S Z S S ZZ ZZ ZZ ZZ Z 20 6 21.5 25 20 158 112 143 183 133 137 87 168 193 6 24.5 32 25 162 112 147 187 137 137 87 172 197 6 27 40 32 164 114 149 189 139 139 89 174 199 164 214 224 8 32.5 40 138 179 168.5 163 113 204 229 188 243.5 254 193.5 218.5 213 268.5 279 6-4-49 50 Series CM2 Clevis Integrated Style (E) CM2E Bore size Stroke S T Spring return S + Stroke Z + Stroke ZZ + Stroke

Nil Cylinder unit/ Auto switch S 1 pc. M Slide bearing S 1 pc. 2 2 pcs. L Ball bushing bearing 3 3 pcs. Nil Without auto switch (Built-in magnet) Bore size 4 4 pcs. 63 63 mm For the applicable auto switch model, refer to the table below.

Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.

Holder Assy Model Number LQ-GCLQ-GPC w w w . s m c u s a . c o m SMC PNEUMATICS INC. U.S. HEADQUARTERS 3011 N. FRANKLIN ROAD INDIANAPOLIS INDIANA 46226 PHONE: 317-899-4440 FAX: 317-899-3102 TOLL FREE: 1-800-SMC-SMC1 1978-2000 SMC Pneumatics, Inc. All Rights Reserved. JB