EXxx-OMN0037CN

8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4

K35-OMW0030

7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value 32 (7) IN-777-250TF-450F*-HL (8) IN-777-320TF-200F*-HL 150 150 average speed [mm/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value (9) IN-777-320TF-350F*

Step Motor Driver （ Pulse input type ）

Driver I/O type "NPN type" Driver version "V1.00" NPN V.00 (8) (9) ARX8300073 (10) Serial No.label of driver version A Side No.

Fieldbus system Analog unit

32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB -21No.EX-OMN0038-C (2)Signed binary data format and twos complement data format Input signal range: 0 to 10 V, 0 to 5 V, 0 to 20 mA Input signal range: 1 to 5 V

CEx-OMB0060

Data setting range Mode Setting items Setting range Default value Count None None None Preset (1) Preset No. 1 to 31 1 (2) Preset value 9 to + 9 + 0 (3) Upper limit 9 to + 9 + 0 (4) Lower limit 9 to + 9 0 (5) Preset output form 1SHOT/ HOLD/ 1SHOT COMPARE Function (1) Pre-scale Connecting model CEP1/ CE1/ MANUAL CEP1 Multiplication 124 4 Count value per pulse 0.01 to 9 0.01 Decimal point position

Mechanically Jointed Rodless Cylinder Series MY2

6 @9 #8 MY2H16 MY2HT16 @3 MY2H16 MY2HT16 !3 e $2 q $0 #9 !8 u i o y !0 @8 $6 !1 $1 #0 r $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

Electric Actuators

4 Nickel plated 8 Bearing stopper Motor plate Guide ring Bearing Bushing Soft wiper Anodized Size 10 only 9 10 11 12 13 !2 e w i !1 t !

2/3 Port Valve for Various

./31 + + + + 4; .1 + / .31 + 9$ :# 9$ :# 9$ 9$ :# :# + + //4; .1 9$ :# 9$ :# 9$ :# 9$ 9$ :# :# + + //4 .;1 9$ :# 9$ :# 9$ 9$ :# :# + + .31 // / / $ $ * # $ *# ? ?# * $ $ *# # $& : /78 & Air Operated Valves List # $ # $ $ )=/4 # $ $ )=/4 % ($ && && &'& &'& &'& ($ &'& )* + + !

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

CJP

9 @0 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 6 10 15 CJPB6D-PS Set of nos. above !8, !9, @0 CJPB10D-PS CJPB15D-PS No. !8, !9 and @0 are one seal kit.

CJP

9 @0 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 6 10 15 CJPB6D-PS Set of nos. above !8, !9, @0 CJPB10D-PS CJPB15D-PS No. !8, !9 and @0 are one seal kit.

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

A-HEC-OM-J004

Content 5 2 1 HEBC002-WA10 HEBC002-WB10 1 RS-485 T/R(A) Unused 2 RS-485 T/R(B) RS-232C RX 3 Unused RS-232C TX 9 6 4 Unused Unused 8 7 5 Unused RS-232C SG 6-9 Unused Unused Communication connector D-sub 9 pin (female) 7.3 Specifications of Connectors 7-7 A_HEC-OM-J004-4 Chapter 7 Appendix 7.4 Communication 7.4.1 Specifications Table 7-2 Communication Communication type HEBC002-WA10 HEBC002

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

(9) IN1 (3) INP output turns off. PLC (6) (4) BUSY output turns on. OUT0 (14) (5) Turn off DRIVE input.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 9.

MQQ

38 5 8 20 10 3.5 6.5 39.5 7 5 4 10 to 60 M4 x 0.7 M6 x 1.0 80.5 70.5 8 8 36 11.5 47 7 10 25.5 16 5.4 9 48.5 10 5 7 10 to 60 M5 x 0.8 M6 x 1.0 89 79 10 10 40 12 52 8 10 28 20 5.4 9 55 10 6 7 10 to 50, 75, 100 M6 x 1.0 M6 x 1.0 96.5 84.5 12 12 45 13.5 60 4.5 10 12 34 25 5.5 9 58 10 49.5 7 7 10 to 50, 75, 100 M8 x 1.25 M6 x 1.0 116 104 13 16 52 17.5 69 5 14 12 40 28 5.5 9 71 10 57 10 7

MXW

9, @0, @1 Seal kit includes !9, @0, @1.

Table of Contents

(Specify a model with 9 to 16 stations by using the manifold specification sheet.)

4/5 Port Air Operated Valve Series SYJA3000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-4.5

ITV

Consult with SMC for 9 stations or more. Note 2) Products without symbols are also compatible. Consult with SMC separately.