High Speed Pilot Operated Flow Rate Characteristics Operating Frequency Port size Valve flow rate characteristics 70 Ambient and fluid temperatures (Upper limit) [C] 1, 5, 3 (P , EA, EB) 4, 2 (A, B) 1 R 4/2 (P R A/B) 4/2 R 5/3 (A/B R E) Model 60 C [dm3/(sbar)] b C [dm3/(sbar)] b DXT1215 1/8 1/8 1.3 0.37 1.3 0.23 50 Calculation of effective area S and sonic conductance C: S = 5.0 x C 40 30 20 10 0 0 200 Operating
Forced output mode OFF Wireless master unit is not registered. 16 EX600-W Series Accessories (Optional Parts) y Communication cable with connector u Power supply cable with connector r Seal cap (M8) t Marker w Valve plate r Seal cap (M12) i Power supply cable (7/8 inch connector) e Reinforcing brace (for direct mounting) e Reinforcing brace (for DIN rail mounting) q End plate bracket i Power
L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x 16 188 176 M14 x 1.5 x
Rated voltage CE-compliant For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type CE-compliant For AC (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (Lead wire length 300 mm) M: With lead wire (Lead wire
(Example) 23-R Semi-standard Combinations Available Not available Accessory, Semi-standard Option Symbol 1 1S-1 1S-2 2 3 6 8 R -1 -1S-1 -1S-2 -2 -3 -6 -8 -R 1000 cm3 tank 1000 cm3 (With switch) Bottom limit ON 1000 cm3 (With switch) Bottom limit OFF Metal bowl Lubricator with drain cock Nylon bowl Metal bowl with level gauge Flow direction: Right to left Note) -1, -1S-1 and -1S-2 are with
q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
40 AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can
R/W undetected: NFC reader/writer driver is installed. NFC reader/ writer is not identified or USB is not connected. 5 R/W connection status R/W detected: NFC communication with the wireless unit is available. When the Advanced Card Systems Ltd. ACR1251U/ACR1252U is used. No driver: NFC reader/writer is not identified or USB is not connected.
R/W detected: NFC communication with the wireless unit is available. R/W undetected: NFC reader/writer is not identified or USB is not connected. Installation not performed: NFC reader/writer driver is not installed. R/W detection/ R/W no-detection button 5 Refer to Preparation befor use (2. Preparation befor use (page 7)).
Content One of two symbols, R or W. R: Read data from the product W: Write or store data to the product Identification The classification symbol (identification code) of read or written data with 3 digit alphabetical ASCII codes. Refer to page 3-9 3.9 Identification Code List. Numeric data Read or written data with 5 digits regardless of its type.
Content One of two symbols, R or W. R: Read data from the product W: Write or store data to the product Identification The classification symbol (identification code) of read or written data with 3 digit alphabetical ASCII codes. Refer to page 3-9 3.9 Identification Code List. Numeric data Read or written data with 5 digits regardless of its type.
XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.
R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.
A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV
Grease application (Seal band part) Motor option Nil With Nil Without option B With lock N Without (Roller specification) Driver type Cable type Size Compatible Power supply Nil Without cable drivers voltage [V] 25 32 40 S Standard cable Nil Without driver R Robotic cable A1 LECSA1-S 100 to 120 (Flexible cable) A2 LECSA2-S 200 to 230 Cable length[m] B2 LECSB2-T 200 to 240 Nil Without cable
D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !
2 e CEP1 Hard anodized Aluminium alloy Cover r Plug !3 (MIW12 to 25 ... M-5P) White anodized Aluminium alloy Cap (S) t CE1 (MIW32 ... Rc1/8) Hexagon socket taper plug Urethane rubber Bumper y !4 Urethane rubber Head bumper u CE2 (MIS8) Carbon steel Clip i (MIS12 to 32) Carbon steel R shape snap ring o ML2B No. Description Material Note Option: Adjuster No.
1 r #5 @3 @8 #6 y u t !5 #7 #8 @6 w !6 e &0 q &0 #4 #3 $8 $0 %9 ^0 #9 $6 $7 %9 !2 #1 !3 $9 %0 %1 !0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !
CL1 MLGC Taper ring Steel ball CNG P MNB f CNA R R CNS CLS CLQ MLGP RLQ MLU ML1C Manual override for unlocking Even if the air supply is blocked or exhausted, lock release is possible. The fail safe mechanism locks again when the manual override is released.
6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !