MK

Refer to p.0-39 to 0-46 for Safety Instructions and actuator and auto switch precautions.

Table of Contents

100 0 VQ014C4 0 1 VQ11 -C6 0 1 3 4 7 VQ214C8 0 1 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ 800 700 600 500 400 300 200 100 0 VQD VQ2149-C8 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected

Clamp Cylinder with Lock Series CLK1

Shaft: 12d9 Hole: 12H8 F +0.3 0 +0.4 0 Z + Stroke S + Stroke 1.5 27 2 CLK1GB: 19.5 40 57 97 ZZ + Stroke Approx.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

/CH2H JIS Standard Hydraulic Cylinder Double Acting: Single Rod Accessories (Optional) Single knuckle joint Material: Cast iron Rod series Bore size (mm) Part no. d H A B C D E F J K + 0.07 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 32 40 50 63 80 100 40 50 63 80 100 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B

Digital Flow Switches Series PF2A

to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption Power supply voltage for sensor 24 VDC (ripple 10% or less) (With power supply polarity protection) 55 mA or less (Not including the current consumption of the sensor) Same as [Power supply voltage] Power supply current for sensor Note 3) Max. 110 mA (However, the

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

5-0.03 0 5-0.03 0 24.5 12-0.05 0 Open: 37, Closed: 19 2 x M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 10 10 7 7 937

CRQ2

0 !3 !0 !4 !7 !1 !9 !2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

ARM10/11

0 !1 u q SMC o A Component Parts Replacement Parts Part no. No. Material No. Material Description Description q w e r t y u i o !0 !

HRX-OM-O021

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30

Air Fittings & Tubing

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to the main text for more detailed precautions of every series.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Core wire color Brown: 24 VDC +10%/5% (For output) White: 0 V (For output) Blue: 24 VDC10% (For control and input) Black: 0 V (For control and input) Gray: Not connected Terminal no.

ARM10/11

0 !1 u q SMC o A Component Parts Replacement Parts Part no. No. Material No. Material Description Description q w e r t y u i o !0 !

CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

High Vacuum Angle Valve

0 !

CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !

REC

F S + Stroke H L Z + Stroke RR ZZ + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) A AL B1 CD CX D E F G H H1 I K L MM N NA Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 30 Up to 700

Magnetically Coupled Rodless Cylinder

to 250st: +1.0 , 251 to 1000st: +1.4, 1001st to: +1.8 JIS symbol Stroke length tolerance 0 0 0 Mounting orientation Unrestricted Mounting nut (2 pcs.)

SZ3000

V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

21.5 28 34 41 6 6 6 8 16 21 25 30 6.3 12 10.3 18 7 10 11.5 14 3/16 3/16 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 #8-32UNC 3/16 3/16 #10-32UNF 5/16 5/16 1/4-28UNF 3/8 3/8 Knuckle pin and snap ring are contained.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

to 250st: +1.0 , 251 to 1000st: +1.4, 1001st to: +1.8 JIS symbol Stroke length tolerance 0 0 0 Mounting orientation Unrestricted Mounting nut (2 pcs.)