3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

AC Servo Motor Driver (Pulse input type/Positioning type)

When the motor mounting position is right side parallel (LEY*R / LEYG*R) or left side parallel (LEY*L / LEYG*L), the rotation direction selection is 0(+: Counter motors side). 29 - LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio) ratio 4/7) Parameter *1,*2 Para.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Please change the parameter in the initial setting. *3 The travel distance of the actuator per 1 pulse should be 10 [m/pulse]. 10 - LECSC LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter Para. No.

Soft Start-up Valve AV2000/3000/4000/5000 1

M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

Fieldbus system Ethernet POWERLINK compatible SI unit

Parameter Definition Item Content Default setting 0: -10..10 V 1: -5..5 V 2: -20..20 mA 3: 0..10 V 5 Analog Range Set the analog input range per channel. Selects the analog input range. 0..10 V 4: 0..5 V 5: 1..5 V 6: 0..20 mA 7: 4..20 mA 0: None None 6 Analog Filter Sets analog input filtering time per channel.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

06 FH440-08 FH440-10 FH440-12 FH640-03 FH640-04 FH640-06 FH640-08 FH640-10 FH640-12 3/8 3/8 10 10 FH441-04 FH441-06 FH441-08 FH441-10 FH441-12 FH441-16 FH441-20 FH441-24 FH641-04 FH641-06 FH641-08 FH641-10 FH641-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4 1 1/4 120 120 40

The SYJ Valve is an innovative combination of space efficiency and performance superiority which provides real value to the design solution. Whether designed in a manifold or used as a single valve, this small profile increases design flexibility and minimizes space requirements. The SYJ valve utilizes a low power (0.5 watts standard) pilot solenoid design, which dramatically reduces thermal

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

VXA31/32

A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

to 50C (1) 10 to 50C (1) 10 to 50C (1) Maximum operating frequency 20 Hz 20 Hz 5 Hz Individual EXH Common exhaust Pilot valve EXH Not required Lubrication Non-locking push type/Slotted locking type (tool required) as an option Pilot valve manual override 150/30 m/s2 Shock/Vibration resistance (2) Dustproof Enclosure 12, 24 VDC and 100, 110, 200, 220 VAC Coil rated voltage 10% of rated voltage

JXCx-OMT0001CN

1100 1200 1000 1100 1200 mm/s 500 500 410 340 250 200 170 [mm/s] () 30 20 10 [mm/s] () 49 33 17 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 mm/s 400 200 400 200 400 200 [mm/s] () 20 10 20 10 20 10 [mm/s] () 25 13 27 14 30 15 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 mm/s 300 250 150 350 250 200 [mm/s] () 20 10 20 10 [mm/s] () 25 13 27 14 -109No.JXC-OMT0001CN-C

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

dia 1.5 Cross section 0.23mm2 66(71) R 3 1 P : AC Dimensins n: Station (Max.20) Equation L1=16n+10 L2=16n+20 L n 2 42 52 75 85.5 16 266 276 300 310.5 17 282 292 312.5 323 18 298 308 337.5 348 19 314 324 350 360.5 20 330 340 362.5 373 13 218 228 250 260.5 14 234 244 275 285.5 15 250 260 287.5 298 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 11 186 196 225 235.5 12 202 212

AC Servo Motor Driver (SSCNET Type)

10 5 2.86 20 10 5 Parameter *1,*2 Para.

Stainless Steel One-touch Fittings Series KG

A M Weight (g) D L Nylon Urethane 2.1 2.3 3.6 7 3 3.5 5.2 KGR04-08 KGR04-06 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 10.4 16 5.6 5.6 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 37 37 39.5 42 41 42 42 50.5 50.5 12.8 17 6 18.5 13.1 13.1 15.2 20 4.5 5.1 33 8 15.2 18.5 20 26.1 18.0 32.8 (29.5) 20 25.5 25.5 17 20.9

IDX-OM-W093

ADH-E400 1.6MPa 0.051.6MPa 3/h 0.024m 0.7MPa IDF60/70/80/90 Series 10-1 IDX-OM-W093 L 10.3 Rc1/225 30 5 IDF60 2722IDF70IDF80IDF90 22 IDF60 (IDF70/80/90) 1) 2830Nm 2) 10.4 1 1 IDF60/70/80/90 Series 10-2 IDX-OM-W093 R 11 R R (GFCI) 11.1 11.2 IDF60-20-R IDF70-20-R IDF80-20-R IDF90-20-R (A) 10 15 20 30 (mA) 30 IDF60-30-R IDF70-30-R IDF80-30 IDF90-30 (A) 10 15 20 (mA) 30

5 Port Air Operated Valve Series SYA3000/5000/7000 1

SYA5000 VH 3 SYA3000 5 SYA5000 SYA7000 VHS 7 SYA7000 SYA 5 1 C6 Body ported 20 40 SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Nil Rc G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Nil Rc 2 position single G F Port size 1 N NPT Symbol Applicable series Nil Port size Without sub-plate NPTF T 2 position double 1 8 01 SYA3000 Port size

1

It takes 10 [ms] to switch the channel. CH.B Channel 10 [ms] 10 [ms] CH.A Time GND CH.SELECT terminal 10 [ms] 10 [ms] Disconnected Time 16-13-11 19 Technical Information 2-wire pressure switch connections 14 Voltage and current output pressure sensors 15 A 3-wire type switch is a switch that has an output line other than the positive and negative lines that supply the electricity.

Electric Slide Table / High Precision Type 《 AC servo motor 》

(For with lock) (10)I/O cable length * [m] Without cable Nil Without cable (Connector only) H 1 1.5 -7- 1.2.2 Specification LESYH*(D,R,L)*V Motor type V6/V7 Model LESYH16*V6 LESYH25R/LV7 LESYH25DV7 Parallel In-line Stroke[mm] 50,100 50,100,150 50,100,150 Horizontal 8 12 12 Max. work load [kg] Vertical 6 12 10 20 10 20 Force [N](Set value: 45 to 90%) *1 65 to 131 127 to 255 79 to 157 154