Port size Body size Port size Symbol 2 3 4 02 03 04 06 1/4 3/8 1/2 3/4 *Specifications and dimensions for the 90-series are the same as standard products.
-www.stevenengineering.com 4-T counterbore W + Stroke S + Stroke Z + 2 x Stroke 16 to 32 2-M5 x 0.8 (32: Rc 1/8) Rod end nut 2-P through Auto switch Width across flats L 2-P through Width across flats L A' 4-T counterbore S + Stroke W + Stroke Z + 2 x Stroke Rod End Nut/Accessory Material: Carbon steel Part no.
Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 44 G 15 15 15 15 15 19 37 41 19 N 4 4 4 4 6 6 6 8 8 NA 2 2 2 2 2 2 4 4 4 HA 35 35 35 35 35 70 70 76 88 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA 169 223 275 13-/22-MXS20L-10
Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.
2 q o !0 !0 !2 !3 o r !3 w !4 r w !5 !4 !1 !1 y u i D-M9m !6 Component Parts No. Description Material No.
screw 103.3 (131.5) A 4 SMC 37.6 53.6 B 2 18.5 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 48.8 30 7.5 One-touch fitting [4(A), 2(B) port] Applicable
Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of Circulating Fluid Supply to Users Equipment . 4-3 4.4 Operation Start and Stop . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check Items during Startup . 4-8 4.6 Adjustment of Circulating
SOL.A SOL.A { { { { { { { { 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( + ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( + ) 1 station 5 stations SOL.B SOL.B SOL.A SOL.A 2 stations 6 stations SOL.B SOL.B SOL.A SOL.A 3 stations 7 stations SOL.B SOL.B SOL.A SOL.B SOL.A SOL.B 4 stations 8 stations VV5Q14 COM. COM.
0.76 (A)4 2(B) 1 (P) (EA)5 3(EB) 2 position double VFA1000 VFA3000 (B)2 4(A) 5(EA) 1 (P) (EB)3 Body ported Base mounted VFA3000 VFA5000 1/8 1/4 4.0 P.1498 2(B) (A)4 (EA)5 1 (P) 3(EB) Upward 3 position closed center 2(B) (A)4 VFA5000 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 1/4 3/8 8.8 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 Lateral (EA)5 1 (P) 3(EB) VFA3000 2
5 42 Body mounting reference plane (B dimension range)1 4 x M6 x 1.0 thread depth 12.2 21 44 5.5 60 5 H9 (+0.030 0 ) depth 5 L + Stroke (16) (66)[64]4 10 (62) A + Stroke (Table traveling distance)2 62 (174.9) 64[(66)]4 Stroke Parallel I/O connector (M12) (70) Origin end3 [Opposite end]4 Opposite end [Origin end]4 Setup communication connector (M12) 48 (4)[2]4 2[(4)]4 22 (84.8) 6.5 30 Power
Metal parts material Applicable tubing material Metric size Inch size Seal method Body size Port size 2 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Note) Gasket seal 1 M5 x 0.8 Note) 10-32UNF Note) 1/8 2 Note) Note) 1/4 Sealant R 3 1/4 NPT Brass/ Steel wire 3/8 Nylon (Series T,TIA) Note) Stainless steel 4 1/2 Note) Soft nylon (Series TS,TISA) 1/8 2 Note) 1/4 Polyurethane (Series
4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.
Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.
57.2 45.2 9 18.1 Q2 Q2 Round type P D 4 to 12 2 x N Q1 2 x O 3 x Applicable tubing *1: D is maximum diameter.
D-H7NF D-C73C 0.6 + 2(n 2 2 ) (n = 2, 4, 6) C-C80C 0.6 3.1 3.1 + 2(n 2) 0.4 D-H7C 0.8 + 2(n 2 2 ) (n = 2, 4, 6) D-H7LF 0.8 2.8 2.8 + 2(n 2) 0.4 0.6 + 2(n 2 2 ) (n = 2, 4, 6) D-B5 0.6 2.7 2.7 + 2.2(n 2) 0.4 D-B6 0.8 + 2(n 2 2 ) (n = 2, 4, 6) D-B59W 0.8 2.9 2.9 + 2.2(n 2) 0.6 0.6 + 2(n 2 2 ) (n = 2, 4, 6) D-G59 0.6 2.8 2.8 + 2(n 2) 0.4 D-K59 6-14-6 7 Series NCM Construction: Double
Gasket Body Low tightening torque Tight seal Stainless steel 316 Specifications Polyurethane 4, 2.5 6, 4 3.18, 2.18 4, 2.5 6, 4 3.18, 2, 4 2.5, 6, 4 1.5 MPa 0.8 MPa Applicable tubing material Nylon Soft nylon Applicable tubing diameter Maximum operating pressure Connection size M5 (JIS B 0209 Class 2 metric coarse thread) 1.0 MPa Stainless steel 316 PVC, Nylon 66, GF30% Material Body Gasket
4 3 8 , 1 2 Port size 1 8 1 4 , 1 4 3 8 , Normally Open (N.O.)
Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed
Step 1 Item Selection item Symbol Page VX2 Air Page 2 2 Water VXN 3 2 q C A Select the fluid. q Medium vacuum Page 4 3 Page 6 Oil 4 Select Body material, Port size and Orifice diameter from Flow rate Pressure of each fluid.