3 Port Air Operated Valve

VZA Common EXH VFA 2(A) port 1/4 1(P) port 1/4 3(R) port 1/4 VFRA 2 to 20 stations VPA300 VV3PA3-42 VPA4 SYJA Individual EXH VZA 1(P) port 1/4 2(A) port 1/4 3(R) port 1/4 VTA VGA VV3PA5-41 VPA VPA VPA3 Common EXH Air operated valve Base mounted 1(P) port 3/8 3(R) port 3/8 2(A) port 3/8 2 to 20 stations VPA500 P. 1569 VV3PA5-42 Individual EXH 1(P) port 3/8 3(R) port 3/8 2(A) port 3/8 VV3PA7

Series IDG

8, 1/4 1/2 3/8, 1/2 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (0.87) 0.77 (0.90) 1.50 (1.65) 1.50 (1.65) 1.55 (1.70) Note 1) With no freezing.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

EXxx-OMU0020EN

Example of a configuration Slot 1 Diagnostics type 1 Slot 3 Slot 4 Slot 5 Slot 6 Slot 7 Slot 2 Slot number Actual module Configuration module Input bytes Output bytes Slot 1 Diagnostics type 1 4 Slot 2 5 x Double solenoid Valves Valves (16 coils) 2 Slot 3 EX245-DX1 EX245-DX1-X36 2 Slot 4 EX245-DX1 EX245-DX1-X36 2 Slot 5 EX245-DX1 EX245-DX1-X36 2 Slot 6 EX245-DY1 EX245-DY1-X37 1 Slot 7 EX245

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(value under the prescribed conditions) 2 1/4 ( 8A) 1/4 ( 8A) VCW (for water) 2 port solenoid valve NBR (FKM) (EPDM) (PTFE) 3 3/8 (10A) Brass (Stainless steel) 1/2 (15A) 1/4 ( 8A) 3/8 (10A) 4 1/2 (15A) 3/4 (20A) Note 1) 10 is N.C. (normally closed) only. OUT OUT IN IN N.C. N.O. 100 Electrical Terminology 1.

CNG

Water resistant (2 color indicator) H7BA Grommet 3 wire (NPN) G5NT With timer IC circuit 5V, 12V With diagnostic output (2 color indicator) H7NF 4 wire (NPN) Latch type with diagnostic output (2 color indicator) H7LF Lead wire length symbols 0.5m .

Industrial Filters

Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4). 108 108 AIR VENT M6 x P1 G1/2 AIR VENT M6 x P1 2 x RcD 2 x RcD C B A B OUT IN OUT IN C A DRAIN G1/4 DRAIN G1/4 (mm) (mm) A B D C A B D C Model Element length Model Element length A (L250) A (L250) 314 70 374 314 70 407 FGDC FGDE FGDC FGDE B (L500) B (L500)

S Couplers

R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 Without check valve 1 1 1 1/4 1 1/4 Female thread type Female thread type Body size Port size Part no.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

1 2 3 4 5 Nil 1 2 3 Orifice dia. 2 4 8 10 16 Body class 1 2 3 4 5 None With flow rate adjustment With bypass With flow rate adjustment & bypass Valve type LVQ 0 1 2 N.C.

S Couplers Series KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

Multi-channel Digital Sensor Monitor ( compatible)

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

Digital Flow Switch ( compatible)

Nominal thread size Required torque Piping port size Width across flats of attachment Rc1/2, NPT1/2Rc3/4, NPT3/4 28 to 30 Nm 1/2 30 mm 3/4 35 mm Piping for the One-touch fitting For the one-touch fitting, use tubing with a tube inside diameter of 9 mm or more.

Rotary Table/

4 @2 !3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

PFA/PFW

) 4 3 42 2 1 4 Connector pin numbers 43 2-3.4 Pin name Pin No.

VP300/500/700

M4 x 0.7 x 41 VP500-24-3 M5 x 0.8 x 50 VP700-24-1 Sub-plate gasket VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) Mounting Screw Tightening Torques M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm VP300-17-1 VP344 SF4--50 VP500-17-1 VP544 VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544

Clean Gas Filter

IDU 24 40 50 IN IDF FS 2 x 4.5 66 IDFA IDFB Model Connection Rc 1/4 NPT 1/4 M5 SFB100-02, 200-02 SFB101-02, 201-02 SFB104-M5 IDH ID IDG SFB102-02, SFB202-02: TSJ 1/4 (Tube Swage Joint) IDK 2 x 4.5 Bracket AMG 2 x TSJ 1/4 Width across flats AFF 24 40 50 AM IN AMD 87 AMH AME SFB103-02, SFB203-02: UOJ 1/4 (Union O-ring Joint) AMF 2 x 4.5 Bracket ZFC 2 x UOJ 1/4 Width across flats 7 6.5 SF SF

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Super PFA (1) FEP (2) Modified PTFE (3) Applicable tubing material Nylon Polyurethane Soft nylon 4/2.5 3.18/2 4/2.5 M3 Applicable tubing O.D. / I.D. 3.18/2.18 4/2.5 6/4 3.18/2 4/2.5 6/4 4/2.5 6/4 4/2.5 6/4 4/2.5 6/4 M5, R 1 8 6/4 Line up various types For air connection in confined areas.

Cylinder with lock

Doc. no.C96N-OM0198Q PRODUCT NAME Cylinder with lock MODEL / Series / Product Number C96N*32&100-*C Contents Safety Instructions P.2 1. Product Specifications P.4 1-1. Cylinder specifications P.4 1-2. Lock unit specifications P.4 1-3. Stop accuracy P.4 1-4. Precautions on model selection P.5 2. Installation and Handing P.9 2-1. Air supply P.9 2-2. Design P.10 2-3. Mounting P.11 2-4.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

fitting for 4 Elbow bottom ported With One-touch fitting for 6 M5 threads Elbow with mixed port sizes Nil None Back pressure check valve on all stations Note 2) C3 C4 C6 M5 CM B D D G1 G2 G3 J K N R S With DIN rail (Rail length: Standard) With DIN rail (Rail length: Special) Note 3) Regulator unit with 1 unit Note 4) U side n Regulator unit with 2 units Note 4) L3 8 7 6 5 4 3 2 1 Regulator

energy saving effect

Circulating fluid outlet, Circulating fluid return port, Overflow port Rc1 NPT1 or G1 Drain port Rc3/4 NPT3/4 or G3/4 Automatic fluid fill port Rc1/2 NPT1/2 or G1/2 Facility water inlet, Facility water outlet Rc1 NPT1 or G1 (for HRS-EP015 or HRS-EP016) (It is not necessary to purchase this when pipe thread type F or N is selected in How to Order since it is included in the product.