IC

VE 4 point preset output pressure Applicable in the programming function with up to 20 steps. 10 bit parallel input signal (maximum) Pressure can be set with 2 10 = 1024 steps. VY1 G Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

VCW

Note) Note) 10 is N.C.

IC

Time Zero span correction function Deviation of the zero span point of the sensor can be corrected. 10 bit parallel input Keylock function Up to 10 bits of parallel input is possible from PLC. Pressure can be set with 2 10 = 1024 steps. To prevent erroneous operation, operation on the key can be disabled.

PFxx-OMO0004CN

L/min 10 L ON OFF ON OFF 0 -14No.PF-OMO0004CN-E , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 ripple -15No.PF-OMO0004CN-E AB.

LFE-OMZ0011

Remarks Weight Lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

Return Filter FH100 Series

: 1 MPa Viscosity: 45 mm2/s Filter material: Paper Nominal filtration: 10 m Differential pressure indication switch Operating pressure0.13 MPa When a value has been displayed, it will be automatically reset when the pump is stopped.

VCW

) 10 is available only for N.C.

Series VCL

Allowable voltage fluctuation Class B Class H Coil insulation type VCL20: 6W, VCL30: 8W, VCL40: 11.5W DC Power consumption Note 2) Inrush VCL20: 22/19VA, VCL30: 36/30VA, VCL40: 45/37VA AC 50/60Hz VCL20: 8.5VA, VCL30: 10VA, VCL40: 13VA Apparent power Holding VCL20: 10/8VA, VCL30: 15/13VA, VCL40: 19/16VA Note 1) When the ambient temperature or fluid temperature is 60C or more, use high temperature

PSxx-OML0002CN

DC1224 V10 DC12 24 V10 9 DC(+) DC(-) / / 10 ( ) 11 / 5 m / 12 1015 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -53No.PS-OML0002CN-G No. 14 15 16 FUNC 17 4 m 4 m FUNC 18 10 10 () 19 () ( ) () / -54No.PS-OML0002CN-G 80 mA 7 F.S.(3.5F.S.)1 1 F.S. -55No.PS-OML0002CN-G ZSE30A() ZSE30AF() ISE30A() 0.0-101.0 kPa -100.0100.0 kPa -0.1001.000 MPa 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

) 10 is N.C.

Clean Air Module

Clean regulator ID Digital flow switch With flow adjuster Air operated valve 36.5 PA pilot port M5 IDG With differential pressure indicator Pressure outlet port Rc 1/8 Restrictor Clean air filter IDK One-touch fitting 10 Note) One-touch fitting 10 PB AMG PA 76 37.5 AFF 25 13.2 (47.5) 60 49 (77.5) 25 45 45 AM 349 Note) This port is unavailable.

Coolant Valve

SGC SGH Large valve capacity VNC VNC Av factor 30 x 10-6 to 1600 x 10-6 (VNC1 to VNC7) Cv factor 49 to 100 (VNC8 to VNC9) VNH VND VCC TQ 617 Coolant Valve: Air Operated/External Pilot Solenoid VNC Series [Option] Note) CE-compliant: For D or DZ only How to Order Thread type Seal material Bracket (Valve size: 1/2/3/4) A B Rc G NPT NPTF Nil F N T NBR seals FKM seals None With bracket (VN-16

VCL

Please consult with SMC regarding other voltages. 3/4 (20A) Orifice size Electrical entry Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 G Grommet C Conduit Refer to the below table for orifice and port size combinations.

PSxx-OMM0006CN

-0.1051.050 MPa 500 kPa 500 kPa 1.5 MPa 0.1 kPa 0.1 kPa 0.001 MPa DC1224 V 10 (p-p)10() 45 mA NPN PNP 2 80 mA 28 V(NPN ) 1 V (80 mA ) 2.5 ms(20,100,500,1000,2000 ms ) 0.2F.S. 1 digit 0 1 () 15 V2.5F.S. 0.65 V2.5F.S. 1F.S. 2 1 k () 420 mA2.5F.S. 2.420 mA2.5F.S. 1F.S. 3 12 V 300 24 V 600 50 ()Low 0.4 V 5 ms 3 1/2 7 LCD 2 (/) 2 F.S.1 digit(253 ) ON OUT1OUT2 IP65

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

) Female thread JIS class 2 0 +1.0 Through-hole Operating piston speed range Allowable leakage rate 5 to 500 mm/s 0.5 l/min (ANR) or less Minimum Operating Pressure Unit: MPa 32 40 50 63 80 100 Bore size (mm) JIS symbol 0.01 0.02 Minimum operating pressure Standard Stroke Table Bore size (mm) 32, 40 50, 63, 80, 100 Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15

Digital Flow Switch (Integrated display type)

If it is 10 L/min, there is a flow of 10 L passing through the device in 1 minute. The voltage drop across the product (and therefore not applied to the load), when the switch output is ON. The voltage drop will vary with load current, and ideally should be 0 V.

ZQ-OM01601

.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 44 - No.7 Yes No No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 No.15 45 - No.

IDX-OM-Z004

, 2m) ) 4 (10 4x ( 20 4x 25 2m) (10, 0.7m) (10,0.7m) 107 267 460 R2 735 64 75 7001 1120 R2 (17) 17) 40 127 479 51 1276 1418) (14~18) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y 1/2 () () R1/2 R1/2 (50) 20 (143) 335 7122 752 670 1,3 (-W5) -W5 -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 3 IDX-OM-Z004 6 IDF125F-30-W () K16K (10, 2m) (10 ) ( 4 4x JIS 65A 10K (K16K) 2m) 20 JIS 65A 10K

MGZ Series

: 201 to 300mm 80 40 50 50 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.