VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Compact

Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls .

PSxx-OMH0002CN

(Full span Full-scale) O PLC DC1224[V] ON-OFF 1 NPN OFF PLC PLC 2 NPN ON PLC PLC ON-OFF ON-OFF NPN PNP 1 NPN OFF ON-OFF PLC DC1224[V] 2 NPN ON R R.D. 1.0005R.D. 1.0005 = 0.05 0.8005R.D. 0.8005 = 0.04 S SUS ON-OFF ON OFF ON-OFF 25[]0 50[]-550[] )3.0[F.S.]25[] 100[kPa] F.S.=100-0=100[kPa] 3.0F.S.=1000.03=3[kPa] 050[] 3[kPa] -10No.PS-OMH0002CN-D () () 25[]ON-OFF )100

LX Series Compact Electric Actuators

Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls . $lid8 $crul{ Tyfr LXFHSSfI EE r4iil & *l t30omm) Thread I Deep [ ] shows lhe location at which origin poinl switch operales.

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

PF-OMN0011_C

No.PF-OMN0011CN-C / / PF3W3## SMC 2 9 12 13 15 15 16 21 23 23 F0 25 F1 OUT1 26 F2 OUT2 34 F3 40 F10 41 F20 45 F22 46 F30 48 F80 49 F81 50 F82 51 F90 52 F96 53 F97 54 F98 57 F99 58 59 62 63 66 66 69 71 -1No.PF-OMN0011CN-C (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Check Valve Series AK 1

Model AKH03-U10/32 AKH03-N01S AKH07-U10/32 AKH07-N01S AKH07-N02S AKH09-N01S AKH09-N02S AKH09-N03S AKH11-N02S AKH11-N03S AKH11-N04S AKH13-N03S AKH13-N04S 8 11.11 10-32 UNF 1/8 10-32 UNF 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 31 31.7 21.2 20.6 22.7 22.9 25 27.7 36 35.5 48.3 40.7 41.2 54 46.5 5 10 10 11 18 16 24 43 47 40 79 87 85 Applicable tubing 5/32 2.8 12.7 2.8 6.5 6.5

AWG

AWG30 Model Port size Fluid Proof pressure Maximum operating pressure Regulating pressure range Relief pressure Ambient and fluid temperature Nominal filtration rating Drain capacity (cm3) Bowl material Bowl guard Construction Weight (kg) Air 1.5 MPa 1.0 MPa 0.05 to 0.85 MPa Set pressure + 0.05 MPa (at relief flow rate of 0.1 l/min (ANR)) 5 to 60C (With no freezing) 5 m 8 Polycarbonate 25

Toggle Type Air Gripper

39.5 10.5 4 x M10 x 1.5 bottom hole dia. 8.6 through Thread for mounting attachment MHT2-63DZ 2 x M12 x 1.75 thread depth 10 Mounting thread 25 60 104 90 4 x M10 x 1.5 thread depth 18 Mounting thread 24 45 60 11 4 x M12 x 1.75 thread depth 17 Mounting thread (Both sides) 10 10 Open 23 Closed 2 132 116 77 60 0.2 36 7 80 60 0.2 40 3.2 10 17 (169.2) 66 53.2 35 Rc (G , NPT ) 1 4 1 4 1 4 2

VXF

32.5 38 49 20 20 23 30 30 35 23 23 25 113 127 162 103 118 152 33 37 28 1 1 1 2 17-3-76 7 The VX series will be revised shortly.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Series MHZ2 112210, 16, 20, 25 Air Gripper How to Order 11 Vacuum suction type Clean series 11 MHZ2 16 D M9N 22 MHZ2 16 D M9N Copper, fluorine and silicone-free + Low particle generation Bore size 10 16 10 mm 16 mm 22 Vacuum suction type 20 mm 20 25 mm 25 Action Number of auto switches Double acting D Nil 2 pcs. S 1 pc.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

PFM7

Integrated display 7 Rated flow range (Flow rate range) Option 2 (Refer to page 907.) 0.2 to 10 (5) l/min 0.5 to 25 (12.5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min 10 25 50 11 Option 1 (Refer to page 907.) ( ): Fluid: CO2 Calibration certificate Flow adjustment valve None With calibration certificate Nil A Nil S None Yes The certificate is written in English and Japanese.

Digital Gap Checker

oC) 0.010 mm or less 0.015 mm or less 0.030 mm or less Hysteresis 0 to variable (Default: 3) 0 to variable (Default: 20) Rated pressure range 0 to 200 kPa Setting pressure range -20 to 220 kPa Minimum display/ setting resolution 1 kPa OUT2 6 Repeatability 0.5%F.S. 1 digit Temperature characteristics (Reference: 25 oC) 2%F.S.

Air Slide Table Series MXP ø 6, ø 8, ø 10, ø 12, ø 16

40 57 101 0.4 11 20 32 45 80 0.3 8 15 24 34 60 28 50 79 113 201 With Shock Absorber Mass Standard Stroke (g) (mm) Body mass 80 105 100 160 130 210 210 320 640 830 Standard stroke 5, 10 10, 20 10, 20 15, 25 20, 30 Model MXP6 MXP8 MXP10 MXP12 MXP16 Model MXP6-5 MXP6-10 MXP8-10 MXP8-20 MXP10-10 MXP10-20 MXP12-15 MXP12-25 MXP16-20 MXP16-30 Additional mass of magnet and rail 10 10 8 12 13 20

Rodless Cylinder for Vacuum Series CYV ø15, ø32

100 PA 25 50 P 5/16-24UNF 7/16-20UNF N 4.5 7.5 M 6 8 MM M4 x 0.7 M6 x 1 LW 69 115 Model CYV15 CYV32 Note) Refer to "Cushion Effect (Sine Cushion) and Stroke Adjustment" under Specific Product Precautions on page 11. 3 Series CYV Model Selection 1 Design Parameters 1 The allowable load mass moment differs depending on the work piece mounting method, cylinder mounting orientation and piston

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/

Multistage Ejector Series ZL

Suction cover PVF 1 9 Sound absorbing material B ZL112-SP01 Front cover Without valve PVF 2 10 Sound absorbing material A (set no. for 9, 10 &11) End cover PE 3 11 Suction filter Body 4 When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 3.

New

50 75 100 0 25 50 75 100 Input signal (%F.S.)