HRX-OM-X071

9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types of Hazard Labels . 9-16 9.8.1 Locations of Hazard Labels . 9-16 9.9 Daily Check . 9-17 Chapter 10 Product Warranty . 10-1 HRR Series HRX-OM-X071

SYJ300/500/700

Station n L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 4-4-13 14 Series SYJ300 Type 41 Manifold: Side Ported/SS3YJ3-41Stations -M3 [ ] for AC Grommet (G) Type 41 Manifold: Side Ported (Pilot valve is on

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Operating pressure (MPa) Flow Characteristics/Weight Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (kg) Port size Pilot port size (Nominal size) Function Valve model C [dm3/(sbar)] 14 14 14 14 13 13 14 (13) 14 (13) 13 13 C [dm3/(sbar)] b Cv b 0.28 0.30 0.26 0.30 0.25 0.29 0.32 (0.3) 0.32 (0.3) 0.28 0.28 Cv 3.4 3.8 3.4 3.7 3.0 3.4 3.6 (3.2) 3.6 (3.2) 3.1 3.3 VFRA4111-03

SYJ3000/5000/7000

SYJ7000-16-2 A Round head combination screw M3 x 47 Matt nickel plated (with spring washer) Gasket DXT199-21-13 ARBYJ7000-00-P Thread type SYJ7000-21-3A Round head combination screw M3 x 55 Matt nickel plated (with spring washer) Nil F N T Rc G NPT NPTF Round head combination screw M3 x 8 Matt nickel plated (with spring washer) A B Blanking plate SYJ7000-21-1 Gasket DXT199-21-13 Base mounted

Round Type Low Pressure Hydraulic Cylinder Series CH
M

40 55 M8 x 1.25 13 26 19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

Prevents Micro-Bubbles

VX2 VX How to Order Manifold Base Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 LLC 2 A 02 11 S VXA Tubing size for P port and R side connection Body class Tubing size for P port and L side connection VN Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19

Basic Type/Direct Mount Type

400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 Distance from cylinder shaft center Lo (cm) 1464 Model Selection CY3B/CY3R Series

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2

RSQ

QA Tubing O.D. 6 J QB Q F Built-in One-touch Fittings Stroke 13 20 Stroke 8 Applicable tubing O.D.

Integrated Controller

Dimensions [mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S S2 T T2 U CV V X2 Y Without lock With lock 25 15 to 100 136.2 121.7 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 58.1 115 113.6 1 66.3 57.8 144 184 32.2 101 to 400 161.2 146.7 32 20 to 100 153.6 135.1 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 70.8 142 140.3 2 83.5 69.8 144 189 39.1 101 to 500 183.6 165.1

CXS

Kit components CXSWM6-PS CXSWL6-PS CXSWM10-PS CXSWL10APS CXSWM15-PS CXSWL15APS CXSWM20-PS CXSWL20APS CXSWM25-PS CXSWL25APS CXSWM32-PS CXSWL32APS 6 10 15 Items 20 through 22 from the chart above. 20 25 32 35 Series CXSW Dimensions: 6, 10 ZZ CXSW6 SS 8 S 5.5 8 5.5 2-3.4 through 2-6.5 counterbore with depth 3.3 16 14 1 (13) 2-R 3.5 2.75 13 3 3 2-M3 x 0.5 x 5 (Hexagon socket head set screw) 12

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

38 16 14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6

IDX-OM-W014

T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W014 13 T 13-4 PE 1 2 3 LN PE PE: LN: M3 6.5mm 1.25mm 2 () () IDU Series 13-4 13 2 IDX-OM-W014 13 T 13-5 IDU3E/4E-10-T IDU3E/4E/6E-20/23-T AC200 / 200,220V (50,60Hz) AC100/100,110V (50/60Hz) PE N L 1 2 or AC230V (50Hz) TB 3 PE N L 1 2 TB 3 TDR MC TDR MC TDR ILS TDR

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 4-4-13 Series SYJ300 Type 41 Manifold: Side Ported/SS3YJ3-41Stations -M3 [ ] for AC Grommet (G) Type 41 Manifold: Side Ported (Pilot valve is on the

CG5-S

40 44 to 800 M14 x 1.5 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 50 55 to 1200 M18 x 1.5 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 63 69 to 1200 M18 x 1.5 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 80 80 to 1400 M22 x 1.5 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Compact and Lightweight

13 One-touch One-touch One-touch 11 N03 13 One-touch Screw-in One-touch N03 N03 N03 Screw-in Screw-in Screw-in ZH20DA10 12 12 One-touch One-touch One-touch 10 04 12 One-touch Screw-in One-touch 03 04 04 Screw-in Screw-in Screw-in ZH20DA11 13 13 One-touch One-touch One-touch 11 N04 13 One-touch Screw-in One-touch N03 N04 N04 Screw-in Screw-in Screw-in 4 Screw-in: NPT female

RHC

10 100 75 115 12 308 65 100 391 13 47 3/4 236 41 34 47.3 M26 x 1.5 10 118 90 139 14 330 80 10-6-13 13 Series RHC Dimensions: Rod Side Flange Style 20 to 40 Rc P Rc P GA GB 4-FD H2 NN MM I H1 ND FY FW NC NB NE D Effective thread FT NF E E 10 10 A F K JD N N JC NA S + Stroke F H WH B FX ZZ + Stroke FZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

EXxx-OMN0037CN

12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10

VZ100/300/500

Material Aluminum die-casted Note Platinum silver Black Black Description Sub-plate Material Aluminum die-casted Epoxy/Stainless steel NBR Description No. q w e r t y DXT200-13-1P Piston plate Body DXT170-C13 x 11 x 1 Solenoid assembly O-ring Resin Aluminum die-casted Common with VZ100 End cover Piston Spool valve assembly Spool spring Thread type Resin Sub-plate part no.: DXT200-13-1P Nil