Supply(P),Vacuum(V), One-touch Fitting: N (Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2"), Exhaust Type: PN (1/2-14NPT Port Exhaust), Supply/Release Valve Combination: K2 (Supply Valve, N.C.), Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Horizontal Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push
Supply(P),Vacuum(V), One-touch Fitting: N (Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2"), Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: MN (M Plug Horizontal Connector w/o Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking
EX260-SPN-A_eng Caution: PWR(V) Load voltage for the valve is not supplied or is outside the tolerance range. (19 V or less) Mounting hole Mounting hole for connection to the valve manifold 7 OFF SV0 V 0 V for solenoid valve 2 4 5 2 Accessories 3 SI24 V +24 V for SI unit operation Warning: WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury
Indicator Unit (LED) Descriptions and Functions SI unit (DeviceNet) SI unit (PROFIBUS-DP) Input block 1 3 5 7 PWR 0 2 4 6 TM TM PWR(V) RUN PWR(V) MOD/NET PWR ADDRESS 1 H L 0 SETTINGS DIA BF FB FB PS PS Description Description Function Function Description Function PWR(V) ON when solenoid valve power supply is turned ON. ON when sensor power is turned ON.
Note 2) Suffix S to the part number, if w/ seal is desired.
OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.
Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across
/N.C.), 1st Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 1st Selection Quantity: 2, /: /, 2nd Nominal Nozzle Size: 2 (ø1.0), 2nd Selection Supply Valve and Release Valve: K (N.C./N.C.), 2nd Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 2nd Selection Quantity: 2
(SHUT-OPEN: Counterclockwise) SHUT 90 OPEN Component Parts PBT Standard style Body Classification of knob by color difference facilitates distinction between 2 port valves and 3 port valves Flame resistant PBT (UL Standard V-0) Flame resistant style PBT Standard style Knob Flame resistant PBT (UL Standard V-0) Flame resistant style Flame resistant (UL Standard V-0)CR Cover For flame resistant
/N.C.), 1st Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 1st Selection Quantity: 2, /: /, 2nd Nominal Nozzle Size: 3 (ø1.2), 2nd Selection Supply Valve and Release Valve: K (N.C./N.C.), 2nd Selection Vacuum V Port: 8 (Vacuum, V Port: Ø8), 2nd Selection Quantity: 2
Designation Description Fieldbus interface connector (BUS IN) EtherNet/IPTM connection PORT 1 (M12 4-pin socket, D-coded) 4 2 SI24 V +24 V for SI unit operation 2 1 SV24 V +24 V for solenoid valve 2 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 4-pin plug, A-coded) 3 1 3 SI0 V 0 V for SI unit operation MS NS L/A1 L/A2 PWR(V) 4 Ground
Designation Description 1 FG Function earth 2 0 V 0 V for solenoid valve 3 24 V +24 V for solenoid valve 4 SI0 V for SI unit operation 5 SI+ +24 V for SI unit operation The power supply connector included as an accessory can be used to supply the power. Applicable wire for the power supply connector is AWG24 to AWG16 (0.2 to 1.5 mm2).
Designation Description 2 Fieldbus interface connector (BUS IN) EtherCAT connection (M12 4-pole socket, D-coded) 4 5 2 *1: Blinking pattern SV24 V +24 V for solenoid valve 1 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 5-pole plug, A-coded) 3 2 SV0 V 0 V for solenoid valve 200 ms 200 ms 1 SI24 V +24 V for SI unit operation 3 4 Ground
Mounting hole Mounting hole for connection to the valve manifold 7 4 5 2 SV0 V 0 V for solenoid valve 2 OFF SI unit operating voltage is not supplied. Accessories 3 SI24 V +24 V for SI unit operation Green ON Operating normally. ST Warning: WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.
V +24 V for SI unit operation LED Description 8 Mounting hole Mounting hole for connection to the valve manifold SI0 V 0 V for SI unit operation 4 SF System fault 5 Unused Accessories BF BUS fault Hexagon socket head cap screw 2 pcs.
Evaporation thermometer V Dustproof filter provided as a standard accessory V All electrical components are located in the front of the product.
For example, when analogue output is 1 to 5 V, F.S.=5[V] 1[V]=4[V]. (Reference: 1%F.S. = 4[V] 1% = 0.04[V]) F F.S. (full span / full scale) Fluid contact part A part that comes into physical contact with the fluid. I Instantaneous flow The flow passing per unit of time. If it is 10 L/min, there is a flow of 10 L passing through the device in 1 minute.
14 V V IDU3E/4E/6E-23 14-1 1.1 2 2. 3.
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N7 (1/4), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)