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Depending on the piping volume (piping length and diameter), if the pressure just before the supply (P) port falls below 0.5MPa, the performance such as vacuum pressure may reduce. Raise the upstream pressure,and the pressure just The pressure just before the supply (P) port is low. before the supply (P) port becomes 0.5MPa.

Power supply is AC200V single phase (Note 4) Malfunction RA1 OFF ON MC MC SK EMG stop switch Driver Servo amplifier Servo motor MC (Note 7) MCCB CNP1 1-phase 200 V AC to 240 V AC (Note 11) L1 CNP3 (Note 6) U U L2 Motor V V L3 M [1] W NW P3 (Note 1) (Note 10) P4 CNP2 P+ [2] (Note 2) C [3] D (Note 11) (Note 3) Encoder CN2 Encoder L11 cable L21 (Note 8) Main circuit power supply CN3 EM2 24 V

12 V IC circuit 12 V Diagnostic indication (2-color display) 5 V,12 V IC circuit Relay, PLC Grommet 24 V Yes 12 V 5 V,12 V IC circuit Water-resistant (2-color display) M9PAV1 M9BAV1 12 V 2-wire (Non-polar) Magnetic field resistant (2-color display) 3-wire (NPN equivalent) A96 A96V 5 V IC circuit Yes 24 V Grommet A93V2 A90V A93 A90 12 V 5 V,12 V IC circuit 100 V Relay, PLC 2-wire

2-wire A93 A93V 12 V 24 V A73C A79W Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) M9N M9NV F79 F7NV IC circuit 5 V, 12 V Grommet M9P M9PV F7PV F7P M9B M9BV F7BV J79C J79 12 V 2-wire Connector Solid state switch 3-wire (NPN) 3-wire (PNP) F9NW F9NWV F7NWV F79W 24 V IC circuit Relay, PLC Diagnostic indication (2-color indication) 5 V, 12 V F9PW F9PWV

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 4 VSA440 3 4 , 1 2 3 4 1 2 standard 1 2 3 4 , Piping specifications/Side ported, bottom ported Type V Port size Rc EXH port Valve size Applicable valve Manifold base size Rc P EA, EB A, B , 1 4 3 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 1 2 1 2 VSA420 Common EXH , 3 8 1 2 , 1 4 3 8 , 3 8 1 2 , 3 8 1 2 3 8 standard

Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.

-J 1000 2000 3000 * P ease v sil our SMC homepage illpj,\i/rvw.smcwo d.com lor lhe atesl dela ls on our CE compl anl products.

C Position for V band bolt for tightening Fig. D Final condition of the tightening of V Warning Mount V band securely in the correct position.

D-M9PV D-M9NV Perpendicular D-M9B In-line D-M9BV Model number Perpendicular Electrical entry Two-wire Wiring NPN PNP Output Integrated circuit, relay and PLC 24 V DC relay and PLC Applicable load 5, 12, or 24 V DC (4.5 to 28 V DC) Power voltage 10 mA or less Current consumption Load voltage 24 V DC (10 to 28 V DC) 28 V DC or less 40 mA or less Load current 2.5 to 40 mA 0.8 V or less Internal

P. 34 P. 34 KQ2L T KQ2T P. 34 KQ2H Use to branch line from female thread in both 90 directions. VMG Branch Y Male run tee Gasket Use to branch line in the same direction from female thread and in 90 direction. KQ2U KQG P. 35 P. 35 KQ2Y P. 36 Use to branch line in the same direction from female thread.

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

P. 44 KQ2K P. 50 KQ2W Bulkhead union Bulkhead connector P. 56 KQ2E P. 56 KQ2E Use to connect male thead and tube through a panel. Use to connect tubes through a panel. Nipple Reducer nipple P. 57 KQ2N P. 57 KQ2N Use to connect Onetouch fittings that are different tubing O.D.s. Use to connect Onetouch fittings.

Fittings & Tubing Air Cylinders Rotary Actuators One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8, 5/16" [With External Pilot Specifications] 13.3 25 (Pitch) P = 10.5 25 13.3 16.2 16.2 17 36.7 34 34 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4"

(R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 VQZ e q w e q w VQD 4 (B) 2 4 (B) 2 (A) (A) VQ4250 VQ4251 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 e q w r e q w r 4 (B) 2 4 (B) 2 (A) (A) VQ4351 VQ4350 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B) 2 (A) VQ4451 VQ4450 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B) 2 VQ4551 (A) VQ4550 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 Component

of P port and exhaust air from both sides of R port. 40R-2 Applicable solenoid valve VZ314RVZ324RApplicable blanking plate assembly DXT200-8-3A How to Order VV3Z3 40R 05 2 01 X port R port Stations P/R port Thread type P port A port side 2 stations 02 P port Nil Rc G NPT NPTF M5 01 M5 x 0.8 1/8 A port F N T 20 stations 20 R port Note) For more than 9 stations, supply air to both sides

Vacuum (V) and exhaust (E) port should not be sealed simultaneously.

Refer to p.1.7-12 and 1.713.1.