IR10-OM00007

SU P. PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 0050. 2 M Pa M AD E I N J APAN So G No.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Rated voltage Manual override Symbol Nil: Non-locking push type A: Non-locking push type (Manual) E: Push-turn locking type (Manual) DC AC (50/60 Hz) 2(A) 1 100 VAC 2 200 VAC 3 110 VAC [115 VAC] 4 220 VAC [230 VAC] 5 24 VDC 6 12 VDC (P)1 3(R) Electrical entry Light/surge voltage suppressor DC AC Nil Without light/surge voltage suppressor S With surge voltage suppressor *1 DIN terminal

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

Rated Pressure Range: -0.1 to 2 MPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: NPN Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: -, Option 2: -, Option 3: -, X Options: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: NPN Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: -, Option 2: -, Option 3: -, X Options: -

Rated Pressure Range: -100 to 100 kPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: NPN Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: -, Option 2: -, Option 3: -, X Options: -

Rated Pressure Range: 1 to -101 kPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: NPN Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: -, Option 2: -, Option 3: -, X Options: -

How to Order

port P, E port Pilot valve exhaust is centralized to main valve. + + H: Lead wire length 600 mm D: Push-turn locking slotted type LN: Without lead wire LO: Without connector MO: Without connector W: With connector cable Note 1) + -+ LN, MN type: With 2 sockets.

10-SYJ3000

(Example) 10-SYJ3120-5M-M3 VJ3000-13-1 DC AC (50/60 Hz) CE-compliant CE-compliant 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, only DC voltage is available. Note) CE-compliant: For DC only.

VFA3000

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

Booster Regulator Series VBA1110 to 4200 1

Tank capacity (l) Tc [s] = L W Obtain the tank capacity V. Select tank from table below.

HEC-OM-S008

P V < 2 3 . 0 o C # 1 S V 3 0 . 0 o C M O D E R e m : 0 5.10.4 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid target temperature during Serial Remote mode.

Compact End Lock Cylinder Series CBQ2

L1 (mm) With rear lock With front lock Bore size (mm) I J K C D E H Standard stroke A B Q A B F Q 32 72.5 65.5 12.5 65 58 7.5 10.5 13 16 45 M8 x 1.25 60 4.5 14 40 82 75 14 71.5 64.5 8 11 13 16 52 M8 x 1.25 69 5 14 10, 15, 20, 25 50, 75, 100 50 83.5 75.5 14 73.5 65.5 10.5 10.5 15 20 64 M10 x 1.5 86 7 17 63 85 77 15.5 79 71 10.5 15 15 20 77 M10 x 1.5 103 7 17 (mm) Bore size (mm) R W Z L M

Series LQ3 High Purity Fluororesin Fitting

Thread Size RNPT A E H L M W LQ3H1A-M LQ3H2A-M LQ3H2B-M LQ3H3A-M LQ3H3B-M LQ3H3C-M LQ3H4A-M LQ3H4B-M LQ3H4C-M LQ3H5A-M LQ3H5B-M LQ3H5C-M LQ3H6A-M LQ3H6B-M LQ3H6C-M 29.5 10 11 33.5 14 10 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 1/8" L 37.5 17 16 43.5 20 14 1/4" H (A) W 48.5 21 55 25 18 22.5 3/8" M 1/2" 56 24 64 29 22 24.5 1/4 (E) Thread Size R(NPT) 66.5 32 76

AP10PA

r e Pressure gauge unit 2) Code Unit psig/bar MPa w q w q w q 1) Refer to gauge guide (P.1058) for gauge specifications.

Brake mechanism added

Handling Technical Material Be sure to read before handling brake positioning system (CE2 + CEU2). 682 CE2 Series Prior to Use Example of Recommended Pneumatic Circuit Horizontal mounting Vertical flat mounting Vertical overhead mounting W W CEP1 CE1 CE2 CE2 ML2B W Note) In the case of light load, regulate head side supply pressure.