Wedge Cam Operation Provides

235 MHL2 MHK2-25D 25 14 19 33 440 MHK2-12S 120 76 13 9 4 12 9 MHR L1 Normally open Normally closed MHK2-16S 114 20.6 14.6 6 16 23 L2 MHK MHK2-20S 237 26 16 10 20 34 MHK2-25S 443 33 19 14 25 58 Single acting MHS MHK2-12C 76 13 9 4 12 12 MHK2-16C 115 20.6 14.6 6 16 25 MHK2-20C 237 26 16 10 20 44 MHK2-25C 443 33 19 14 25 73 MHC2 Series MHKL2/Long stroke models MHT2 Max. operating frequency

Low Friction Cylinders Series MQ

B C D H NTJ-010A NTJ-015A NT-02 NT-03 SNKJ-016B SNLJ-016B SN-020B SN-032B 19.6 M12 x 1 4 8.1 M4 x 0.7 3.2 6, 10 6, 10 17 7 21.9 M14 x 1 5 9.2 M5 x 0.8 4 16 16 19 8 30 M20 x 1.5 8 15 M8 x 1.25 5 20 20 26 13 37 M26 x 1.5 8 19.6 M10 x 1.25 6 25 25 32 17 T-bracket 4 x TC TH 7 +0.2 0 TU -0.1 -0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.

Electric Actuators

(Refer to page 26.) 5 When Without controller is selected for controller types, I/O cable length cannot be selected.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) PB PA A B (mm) Dimensions U S T U Model LVD2-S LVD3-S LVD4-S LVD5-S 11.5 28 9.6 26 34 17.5 26 35 20 29.5 57 25 17-5-49 8 Tube Extensions Series LVD How to Order Body class LVD 2 0 06 T Option Symbol 2 3 4 5 None With flow rate adjustment Nil 1 Orifice dia. 4 8 10 16 Body class 2 3 4 5 Note) Refer to Variations in the table below for option combinations.

V

D ZH D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) N O Z Z L E D I A M E T E R E X H A U S T P O R T 15 1.5mm 18 1.8mm 20 2 mm 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF Nozzle Diameter mm Specifications Max Vacuum Pressure 1.5 1.8 2.0 mmHg (Torr) Body Ported T Y P E 55 65 85 Max Suction Flow S Type 26

1.1

(Refer to pages 26 and 27 for options.) Easy maintenance (Standard specifications) Optional accessories Dustproof filters for the by-pass piping set and aircooled refrigeration are available. These improve durability and ease of use. Components can be accessed from the front.

Stainless Steel 316

Model T (M) Weight (g) H T 2 x Applicable tubing (inch) KQGE03-00 KQGE07-00 KQGE09-00 KQGE11-00 KQGE13-00 14 38 13.5 18 22 5.6 5/32 1/2-20UNF 17 40.6 15 18.8 31 10.4 1/4 9/16-18UNF 22 45.8 20 20.9 46 26.1 5/16 3/4-16UNF M M 26 50 23 23 76 41.5 3/8 7/8-14UNF L 29 54.6 26 24.8 101 58.3 1/2 1-12UNF Note) Figures shown when using FEP tubing 7 Series KQG Applicable Fluid List Compatibility Checklist

Step Motor Controller (Servo / 24 VDC)

CN1: Power supply plug . 22 5.1 Power supply plug specifications . 22 5.2 Electric wire specifications . 22 5.3 Wiring of power supply plug . 23 (1) Wiring of the power supply . 23 (2) Wiring of the stop switch . 23 (3) Wiring of the lock release . 24 5.4 Stop circuits . 25 (1) Example circuit 1 Single controller with teaching Box . 25 (2) Example circuit 2 multiple controllers . 26 (3) Example

Series VS

34 26 37 64.5 31.5 58.5 67.5 97.5 58.5 20.5 3 41 52 41 52 92 36 69 82.5 121 74 28 4 234.5 142.5 13 77.5 79.5 92 108 123.5 CC 188.5 199 244 SIZE 3 SIZE 2 57.5 1.5 U V 14 25 43 W X 2 42 Y Z 133 AA BB SIZE 1 1 73 56 35 53 2 20 150.5 4 68.5 71 30 45 2 20 175.5 n= NUMBER OF STATIONS (MIN. 2,MAX.10) LENGTH FORMULA L1= 43n + 72 L2= 43n + 84 LENGTH FORMULA L1= 56n + 90 L2= 71n + 90 L1= 71n + 66

Low Profile Slide Table Series MXF

H G 21 4 3H9 depth 3 +0.025 0 (mm) F N G H J M Z ZZ Model DMXF8-10 20 4 13.5 22 21 49 49.5 58 MXF8-20 26 4 14.5 26 26 54 54.5 63 -X MXF8-30 26 6 14.5 40 41 69 69.5 78 Individual -X 141 Series MXF Dimensions: MXF12 Stroke adjuster at extension end Stroke adjuster at retraction end Width across hexagon socket hole 2.5 Width across flats 7 N 2 ( 1) x 25 Blanking plug (M-5P 2 points) 20.5 Possible

17

1145 2011 1859 3142 2929 34 25 60 45 94 71 147 124 241 195 377 331 589 513 935 859 1508 1394 2356 2197 23 17 40 30 63 47 98 82 161 130 251 221 393 342 623 573 1005 929 1571 1465 113 85 201 151 314 236 491 412 804 650 1257 1103 1963 1709 3117 2863 5027 4646 7854 7323 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 6 12 8 16 10 20 10 25 14 32 14 40 18 50 18 63 22 80 26

PSxx-OMU0008CN

[Err] [P_1] [P1L][P1H] [P_1] [n_1] Pn (63 ) -33No.PS-OMU0008CN-D 26 [H_1] [WH1] (63 ) 28 ON ON ON ON OFF OFF OFF OFF OUT1 OUT1 OUT2 OUT2 [F 1] OUT1 1 2 2 -34No.PS-OMU0008CN-D (H_1) (WH1) (WH1) 1 (H_1) (WH1) (WH1) 1 1Er689o.rEr12() : OUT1OUT212 ()P_1P_2 -35No.PS-OMU0008CN-D [F 2] OUT2 OUT2 ONON 35 <> [F 2] [OFF] 26 [Err] [P_2] [P2L][P2H] [P_2] [n_2] Pn (63 ) -36No.PS-OMU0008CN-D

PSxx-OMM0002CN

.=514[V] 1F.S.40.010.04[V] F.S. ( NPN()() NPN PNP()() PNP TSJ Tube Swage Joint Swagelok swagelok URJ Union Ring Joint Swagelok VCR ON OFF () (26 ) ON OFF Hysteresis ON-OFF / () () 25[]ON-OFF -11No.PS-OMM0002CN-F NPN () () ()()( ) () ON ON 0 (1k 1M A/D 5V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) 26 ON-OFF ON () (P1L~P1H P2L~P2H) ON (26 ) () "digit" () 0 () SI ONOFF

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

235 MHZ MHK2-25D 25 14 19 33 440 MHK2-12S 120 12 9 4 9 13 76 Normally open Normally closed L1 MHF MHK2-16S 16 23 6 14.6 20.6 114 L2 L1 MHK2-20S 20 34 10 16 26 237 MHL L2 Series MHK2 MHK2-25S 25 58 14 19 33 443 Series MHKL2 MHK2-12C 12 12 4 9 13 76 MHR MHK2-16C 16 25 6 14.6 20.6 115 MHK MHK2-20C 20 44 10 16 26 237 MHK2-25C 25 73 14 19 33 443 MHS Series MHKL2/Long Stroke Type Made to Order

Precision Cylinder Series MTS

Collar gasket 1 1 Stainless steel 8 to 16 Black zinc chromated Alloyed steel 7 Cushion bolt 1 1 Carbon steel 20 to 40: Zinc chromated NBR 8 9 10 11 12 13 14 End lock bolt Collar Spline nut Cushion needle Cap Lock piston Lock spring 1 1 Carbon steel Quenched/Zinc chromated Rod seal for 8 NBR 1 1 Aluminum alloy Chromated NBR 1 1 8 24 Tube gasket NBR 2 2 Carbon steel Nickel plated 12 to 40 25 26

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

M2 M3 m1 m2 m3 16 25 40 16 25 40 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 100 120 100 38 35 35 MY2HT 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

Compact Rotary Actuator Series CRQ2

Description Qty. 4 4 4 4 1 1 1 1 Seal Seal Seal Seal 11 11 11 11 1 1 1 1 Gasket Gasket Gasket Gasket Parts included in seal kit 12 12 12 12 1 1 1 1 Gasket Gasket Gasket Gasket 16 16 16 16 Wear ring Wear ring Wear ring Wear ring 4 4 4 4 17 17 17 17 Piston seal Piston seal Piston seal Piston seal 4 4 4 4 26 26 26 26 Seal washer Seal washer Seal washer Seal washer 2 2 2 2 A set includes all

Digital Pressure Switch

(Refer to page 26.) (Refer to page 28.) : The outputs will continue to operate during setting. : If a button operation is not performed for 3 seconds during the setting, the display will flash.

Digital Pressure Switch ( compatible)

(Refer to page 26.) (Refer to page 28.) : The outputs will continue to operate during setting. : If a button operation is not performed for 3 seconds during the setting, the display will flash.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

S) PB PA (mm) Dimensions A B S Model LVD1m-Sm LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm 14 12.5 26 26 29.5 With bypass (Max. T) (mm) Dimensions PB T U Model LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm PA 28 9.6 34 17.5 A B 35 20 U 57 25 With flow rate adjustment & bypass (Max. T) (Max.