Sine Rodless Cylinder Series REBR Direct Mount Type

20.5 18 9 Rc 1/8 65 75 27 103 9.5 79 Series REBH Dimensions/25, 32 Dual axis type/REBHT LL 138 4-M thread depth MM PA XB PB 2-Rc 1/8 LW S + Stroke EB EA HC HP NL HG HT HA H HB NT PP PS N A Z + Stroke W Square nut for body mounting J TW (mm) Model A EA EB H HA HB HC HG HP HT J LL LW M MM N REBHT25 REBHT32 125 28.5 79 63 46 46 61.5 19.5 58.5 35 M6 x 1.0 56 119 M6 x 1.0 10 20.5 30 90 75 52.5

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

OFF n-1 n-2 Real-time flow rate Error correction Window comparator mode H : Hysteresis Note1) "n" LED display Contents Solution H H ON A current of more than 80mA is flowing to OUT1 Check the load and wiring for OUT1 NO OFF n-2 n-1 Real-time flow rate Note1) Output mode is set to inverted output at the factory before shipment. The setting data has changed for whatever reasons.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

NKE Corporation: Simple wiring standard system compatible EX140-SUW1 F NKE Corporation: Simple wiring H system compatible EX140-SUH1 H Sanks Corporation: S-LINK system (16 point output) compatible EX140-SSL1 J1 Sanks Corporation: S-LINK system (8 point output) compatible EX140-SSL2 J2 Type SF NKE Corporation Type SH NKE Corporation Simple wiring H system compatible Type SJ1/SJ2 Sanks Corporation

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

blocking plates are built into valves, add the above option symbols when required. 1 2 3 Seal type Symbol 0 1 Seal type Metal seal Rubber seal Cylinder port size Symbol C3 C4 C6 M5 Port size One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 threads Function Specifications Standard type (1W) High pressure type (1.5W) Low power consumption type (0.5W) Symbol Nil H

IZx-OMP0064

Every time the NDL key is pressed, the maintenance detecting level is changed from L (low), M (middle), and to H (high) in turn.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Reduced maintenance (No need for control or replacement) Positioning repeatability: 0.01 mm*3 *1 Compared with the LEFS *2 Size 40, Mep, Overhang: 300 mm *3 Excludes the lead H Step Motor Controller JXC Series p. 3 Battery-less Absolute Type (Step Motor 24 VDC) MDirect input type MStep data input type LEKFS Series P-E21-6 Electric Actuator High Rigidity and High Precision

LG1H

P S2 A 2 R A1 F Photo micro switch Guide type Nil None H High rigidity direct acting guide 1 2 3 4 NPN 1pc.

Soft Start-up Valve

H U Dimensions [mm] Standard specifications Port size A B C D E F G H J 1(P) 2(A) 3(R) Model AV2000-m02-1 to 6D/Y(Z)m-A 1/4 1/4 1/4 66 97 47 24.5 40 96 33 Width across flats 22 58 AV3000-m03-1 to 6D/Y(Z)m-A 3/8 3/8 3/8 76 97 50 29.5 40 96 38 Width across flats 24 63 AV4000-m04-1 to 6D/Y(Z)m-A 1/2 1/2 1/2 98 107 56 39.5 52 106 49 Width across flats 30 61 AV5000-m06, 10-1 to 6D/Y(Z)m-A 3/4,

Fluoropolymer Tubing Variations

KM P.502 P.503 KF M H/DL L/LL KC KK KK130 FEP Tubing (Fluoropolymer) TH/TIH Series Soft Fluoropolymer Tubing TD/TID Series DM Modified PTFE Material FEP Material KDM KB Flexibility improved by approx. 20% (Compared with SMC TL/TIL Series) Suitable for applications which require flexibility. This has better resistance in chemical environments.

ChemicalThermo-con

HED series W H Temperature Controller Unit: inch (mm) W D H Model Weight HED003 13.2 lbs (6 kg) 3.9 (100) 12.6 (320) 8.5 (215) HED005 17.6 lbs (8 kg) 5.5 (140) 13.8 (350) 8.5 (215) D HED007 28.7 lbs (13 kg) 6.5 (165) 17.6 (447) 8.5 (215) The outline dimensions do not include protruding parts such as the foot flange, screw and connector.

With Factory Installed

~---l---+-+-H 8 0perating pressure is 0.lSMPa{1.Skgf/cm2} or more. 0.15 i;c ,.,:+-t--t..o-t---t--t---"-l--+-H O Orain piping should be .010 tube (inside 0.1 r===t=l===t---H diameter 4mm) and less than Sm in length. 8 Rotate drain cock left direction in manual exhaust for emergency. , ".' " ... ~" O~ 0.2 0.3 OA OS 0.6 0 7 08 0 9 2000 4000 Flow rate /min (ANR) Inlet pressure MPa (Differential

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

D1 D2 L1 L2 L3 L4 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Max.

BP1000

2 4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

CL

1.25 M14 x 1.5 Up to 200 Up to 300 Up to 300 Up to 300 15.5 19.5 19.5 27 M4 x 0.7 depth 7 4 5 5.5 6 6 8 8 10 12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40

VXA31/32

Insulation oil A H Polyacetal Note 1) Note 1) Non-leak (10 6 Pam 3/s) Brake oil Water (up to 60C) B P A H Stainless steel Note 1) If using for other fluids, please contact SMC.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

G H G H G H 149.5 (3 position: 157) VK VZ 2-4.5 mounting hole Manual override (Non-locking) VF 300 (Lead wire length) VFR Pilot EXH port VP4 (External pilot port) VZS Not machined VFS VS4 3-Rc 1/8, 1/4 VQ7 ( ): Rc 1/8 EVS L plug connector 2 position double: VZS3250-L(Z)-01 02 3 position closed center: VZS3350-L(Z)-01 02 3 position exhaust center: VZS3450-L(Z)-01 02 3 position pressure center

Non-contact Gripper

C 16.5 L H L H 4 x M depth ML 4 x M depth ML L L 16.5 (mm) Part no.

100

Air unit 1.5 JPY/m3 (ANR), Annual operating cycles: 30 (Operating hours: 10 hours/day, Operating days: 250 days/year, 120 cycles/h, when 1 unit is used) Cost conditions *1 Air consumption 100 Peak vacuum pressure 10% reduction -84 Air consumption [L/min (ANR)] Existing model ZL112 ZL1 63 L/min (ANR) Vacuum pressure [kPa] 57 63 Approx.10% reduction Air consumption Existing model (ZL112) ZL1

C95

L3 d1 H9 MB1 Part no. d3 h KJ27D KJ36D KJ42D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 40 Refer to Page 6-16-1 for details on auto switches.