Electric Rotary Table

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

Speed Controller: Standard Type Series AS In-line Type

3 O-ring NBR u 15-9-105 Dimensions L4 D3 H (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions AS120-U10/32-T 10-32 UNF 10-32 UNF AS120-M5-T M5 x 0.8 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 A 8 9 9 4.5 10 31 10.3 0.7 27.4 AS220-N01-ST NPT 1/8 NPT 1/8 AS220-F01-ST G 1/8 AS220-01-ST Rc 1/8 R 1/8 12 14.3 14.6 7 18 35.6

2/3 Port Valve for Various

./31 + + + + 4; .1 + / .31 + 9$ :# 9$ :# 9$ 9$ :# :# + + //4; .1 9$ :# 9$ :# 9$ :# 9$ 9$ :# :# + + //4 .;1 9$ :# 9$ :# 9$ 9$ :# :# + + .31 // / / $ $ * # $ *# ? ?# * $ $ *# # $& : /78 & Air Operated Valves List # $ # $ $ )=/4 # $ $ )=/4 % ($ && && &'& &'& &'& ($ &'& )* + + !

IDX-OM-W034

Specification for Option R 9 1 Safety instructions . 9 1 9 2 Specifications of the GFCI . 9 1 9 3 Cautions for handling the GFCI . 9 1 9 4 Electric circuit . 9 2 Chapter 10 Specification for Option S 10 1 Safety instructions . 10 1 10 2 Specifications . 10 1 Chapter 11 Specification for Option T 11 1 Safety instructions . 11 -1 11 2 Specifications . 11 -1 11 3 Remote operation . 11 -2 11

Compact Cylinder with Lock Series CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

2 Phase Stepper Motor/Without Motor Brake Series LXS

kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 9 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 9 0 Transfer load m (kg) Refer to page 304 for deflection data. 270 5 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH5SA Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 D-5.1 through 10 7.5 E-M5 thread depth 10 Refer to Cross section C-C, bottom view. 6 5H9

mlu

9 i o !5 @0 Extension locking w q Section A-A !

HRX-OM-Q033

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Environment

9 @1 @2 !3 !7 q r e i u @0 !6 !5 !4 !1 !2 y w t In-line motor type: LEY63D @7 @8 @5 @6 When rod end male thread selected @9 @9 #0 @4 Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

HRL

Standards RS-232C One thermo-chiller for one master RD 2 RD 2 SD 3 SD 3 Circuit diagram SG 5 SG 5 This product Master Do not connect with other pins. 1 6 9 5 D-sub 9-pin female (socket) type 9 Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series Optional Accessories Consumables List Part no. Description Qty.

Thermo-chiller

(For communication cable) Weight*9,*12 kg 134 *1 Use fluid that fulfills the conditions below as the circulating fluid.

CXT

D-A80C D-A79W D-F7V D-F7BAVL D-F7WV D-J79C Auto switch model A B Hs A B Hs A B Hs A B Hs A B Hs Symbol Standard Stroke Bore size (mm) 32 40 38.5 42 38 41.5 6.5 9 6.5 9 6 (6.5) 9.5 13.5 3.5 6 34 37.5 9.5 13.5 6.5 9 35 38.5 9 (9.5) 31.5 35 6.5 10.5 9.5 13.5 8.5 (9) 13 (13.5) Long Stroke Bore size (mm) 32 40 38.5 42 38 41.5 18 24 18 24 10 13.5 10 13.5 9.5 (10) 17.5 (18) 31.5 35 7 10.5 15 21

HRX-OM-R039

8.5.1 HRSE012/018-A-10 . 8-9 8.5.2 HRSE012/018/024-A-20/23 . 8-9 8.5.3 OPTION-T (HRSE012/018-A-10-T). 8-10 8.5.4 OPTION-T (HRSE012/018/024-A-20/23-T) . 8-10 8.6 Sample DoC.

AIR COMBINATION

APPLICATION 9 3. SPECIFICATIONS. . . 9 4. SERIESMAP AND COMBINATION OF EQUIPMENT. . . 10 5. HOW TO ORDER 1115 6. ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 16 7. TROUBLE SHOOTING 16 8. SPARE PARTS LIST 16 9. HOW TO REPLACE 17 10. DISASSEMBLY DRAWING . 1819 11.

10

151 170 270 308 261 1675 MHL2-25DZ-X85 9 106 128 178 224 174 1815 MHL2-25D1Z-X85 9 160 182 282 328 270 2500 MHL2-25D2Z-X85 9 178 200 320 366 308 2730 Closed C B A A Open D Open E Mounting side Provide clearance between the mounting side and adapter.

MK

89 67 6.6 0.1 50 0.15 76 M8 X 1.25 9 108 80 9 60 92 M10 X 1.5 REC Arm for width across flats RHC Rod end width across flats With arm MTS CC Model MKl32-llN MKl40-llN MKl50-llN MKl63-llN Model MKl32-llM MKl40-llM MKl50-llM MKl63-llM H A A D G B B E C C F D F G M8 X 1.25 18 6 36 6.2 67 14 18 20 9 45 35.5 25 53.5 M8 X 1.25 61 18 6 36 6.2 67 14 18 20 9 45 43 25 M10 X 1.5 77 22 8 46 8.2 88 18

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Metal stopper screw L Shock absorber 8-9-16

2/3 Port Valve

Applicable fluids TL D DIN connector DIN connector with indicator light DL 6, 7, 9.

Refrigerated Thermo-chiller

Note 9) Required flow when a load is applied as shown in the cooling capacity when the facility water teperature is at 25C.

Membrane Air Dryer

IDG-DP01 IDG-DP01 (Option: S) 9 With O-ring (1 pc.)