Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

(Nil) Cylinder stroke (mm) Model Lubrication Action Effective cushioning stroke (mm) Bore size (mm) 20 25 32 40 20 25 32 40 Standard stroke (mm) Auto switch mounting Cushion Port size Model 10-REC20 10-REC25 10-REC32 10-REC40 11-REC20 11-REC25 11-REC32 11-REC40 Relief type Vacuum suction type 150 to 700 45 1/8 200 to 1000 150 to 1000 60 50 Air cushion 1/4 Double acting Non-lube (Both sides

AS-FG

Series AS-FG How to Order AS 1 0 3 2 F G 01 06 Body size M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard 1 2 3 4 Option Type Nil S None With seal 2 3 Elbow Universal M5 and U10/32 are not available with seal. Control type Applicable tubing O.D.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Rack & Pinion Type Rotary Table Size: 1, 2, 3, 7, 10, 20, 30, 50 Series MSQ 1122How to Order Size: 1, 2, 3, 7 11 Vacuum suction type Clean series A High precision type B Basic type 1 Size Nil E Side ported Front ported 2 3 7 11 MSQ B 1 A M9B Number of auto switches A With adjustment bolt 2 pcs. 1 pc. n pcs.

Compact End Lock Cylinder Series CBQ2

Note 2) When ordering foot brackets, order 2 pcs. for each cylinder. Specifications Lock Unit Specifications Lock position Head side, Rod side Air Fluid 32 40 50 63 1.5MPa Proof pressure Holding force (Max.)

Compact Cylinder Series NCQ8

3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 1/4-20UNC -2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-1/2 3-3/4 4 4-1/4 4-3/4 5-1/4 5-3/4 6-1/4 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8

HEC_W-E

TABLE 2-1 DIVISION OF DANGER, WARNING, CAUTION, AND NOTE -2-2 TABLE 2-2 MEANING OF A SYMBOLS -2-2 TABLE 2-3 SAFETY INTERLOCK LIST(PART 1) -2-6 TABLE 2-4 SAFETY INTERLOCK LIST(PART 2) -2-6 TABLE 3-1 QUALITY STANDARD FOR WATER(TAP WATER) -3-4 TABLE 5-1 FUNCTION OF COMPONENTS -5-3 TABLE 6-1 SPECIFICATIONS OF HEC006 -6-1 TABLE 6-2 SPECIFICATIONS OF HEC012 -6-2 TABLE 8-1 AVAILABLE MODE IN LEVEL

rep-modular-e

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

A_HEC-OM-I009

Table 2-1 Division of DANGER, WARNING, CAUTION, and NOTE -2-2 Table 2-2 Meaning of a symbol -2-2 Table 2-3 Safety interlock list(Part 1) -2-5 Table 2-4 Safety interlock list(Part 2) -2-5 Table 6-1 Specifications -6-1 Table 8-1 Available mode in Level 1 -8-2 Table 8-2 Available mode in Level 2 -8-4 Table 8-3 Available mode in Level 3 -8-5 Table 9-1 Alarm information -9-1 Table 9-2 Reset of

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

2 !3 !4 6-14-10 11 Series NCM Construction: Single Acting, Spring Return t y q !1 !2 e r !0 w o CJ1 CJP CJ2 CM2 CG1 !

Fieldbus system PROFINET compatible SI Unit

No.2.

pa

Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.

Series CM2X-Z 10- ø20, ø25, ø32, ø40 Low Speed Cylinder 11- Double Acting, Single Rod

Nil S n G Rubber bumper only Cylinder stroke (mm) Rod end thread Nil F Male rod end Female rod end Model Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber 10-CM2X20 10-CM2X25 10-CM2X32 10-CM2X40 11-CM2X20 11-CM2X25 11-CM2X32 11-CM2X40 Relief type Vacuum suction type 1/8 25, 50, 75, 100, 125, 1/4 Non-lube Double

Series PF2W Digital Flow Switch For Water

(In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.)

EXxx-OMQ0016

) 0 1 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input unit EX600-AXA 4 (2 byte/1 channel) 0 (2 channels) (2 channels) 0 4 Analogue output unit EX600-AYA (2 byte/1 channel) Analogue I/O unit EX600-AMB 4 4 (2/2 channels) (2 byte/1 channel) (2 byte/1 channel) -65No.EX-OMQ0016 Diagnostic Diagnostics assignment to input map 4 bytes of diagnostic

Air Catch Sensor Series ISA

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.

Industrial Filters

2) 2 Note 2) 2 Note 2) Number of elements 1 1 1 1 FGE 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) Element size 65 x L250 65 x L250 65 x L250 65 x L250 Cover SCS14 Aluminum FGG Case Stainless steel 316 SPCE Main materials Gasket/O-ring Fluororesin NBR FGA Seal Nylon/Fluororesin Nylon Fluororesin FGC Weight (kg) 1.3 2.2 2.3 3.8 2.3 3.8 1.3 2.2 1.7 3.4

Magnetically Coupled

Specifications Specifications Bore size 10 to 63 (3/8" to 2-1/2") Bore size 6 to 63 (1/4" to 2-1/2") Construction Construction Dust seal (felt) Special bearing NCY3B NCY3B Special bearing Symbol 11 Interchangeable specification with NCY2B6 X1468 NCY3B 6 X1468 Stroke Symbol 9 Outside of cylinder tube with hard chrome plating Interchangeable specification with the NCY2B6 X322 Bore size Bore

IIIIIII

) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8

Mechanical Valves Series NVM, NVFM, NVZNI

) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8