Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Series CDU 10-/1121-/226, 10, 16, 20, 25 Free Mount Cylinder Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Power supply ON/Servo OFF: Green flashes. q q PWR Power supply LED y w With alarm : Red turns on. Parameter setting : Red flashes. w ALM Alarm LED Change and protection of the mode switch (Close the cover after changing switch.) u i e Cover o !0 Frame ground (Tighten the bolt with the nut when mounting the controller. Connect the ground wire.) r FG !1 !2 t y u i o !0 !1 !2 !3 !4 !5 !

Ionizer Nozzle type IZN10 Series IZS

Static Neutralization Characteristics (Discharge Time from 1000 V to 100 V) q Energy saving static neutralization nozzle with right angles: IZN10-01-X367 wHigh flow rate nozzle with right angles: IZN10-02-X367 5 5 0.1 MPa 0.05 MPa 0.3 MPa 0.1 MPa 0.05 MPa Discharge time (Static neutralization time) [s] Discharge time (Static neutralization time) [s] 4 4 3 3 0.3 MPa 0.7 MPa 2 2 0.5 MPa 0.5

AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Nil A F J K M Rear flange surface Indicator Without indicator Pilot port direction Indicator Without indicator Pilot port direction Symbol Nil A F G J K L M Right flange surface Left flange surface Right flange surface Left flange surface Rear flange side Rear flange side Left flange surface Right flange surface Left flange

IDX-OM-W014

E D A B P G [AC200V] C F J M K L N H 4x13 [AC100V] [AC200V] 10 (:1.9m) (17) :0.8m mm A B C D E F G H J K L M N P Q IDU3E Rc3/8 440 498 285 2751 15 455 IDU4E Rc1/2 13 483 31 568 470 270 3001 80 2402 15 32 230 802 355 422 IDU6E Rc3/4 15 485 IDU Series 6-3 6 3 IDX-OM-W014 6 6-4 IDU3E4E AC100/100,110 (50/60Hz) CM 1 2 ILS FM PTC OLR PC 1 PTC PTC ILS CM AC200/200 (50/60Hz) AC230V

IDX-OM-W023

Guige Guige G C Guige Guige [AC200V] [AC200V] Guige Guige F 10 (10) (820) J H K P L N M 4x13 [AC200V] 17) [AC200V] [AC100V] [AC100V] Guige 17 Guige mm A B C D E F G H J K L M N P Q 859 IDU8E Rc3/4 270 485 31 902 365 1302 230 42 3002 80 3001 328 15 IDU11E Rc3/4 909 14 IDU15E1 Rc1 300 620 960 79 54 425 93 258 43 330 66 470 358 16 IDU Series 6-3 6 4 IDX-OM-W023 6 6-4 IDU8E-10

VNH

Electrical entry/With light/surge voltage suppressor Nil F N T Rc G NPT NPTF Valve type T TS TZ Conduit terminal Conduit terminal with surge voltage suppressor Conduit terminal with light/surge voltage suppressor 1 3 N.C./3.5 MPa N.C./7.0 MPa TL Conduit terminal with indicator light Rated voltage: Except 6, 7, 9.

ZCUK

20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 TN TF R Rod piping/ Pad direct mounting 32 32 mm Note) In the case of rod piping (Q, R), TF (G1/8) is not available.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

5 Port Solenoid Valve Series SV

Specification SV2000 SV1000 SV4000 SV3000 Applicable series Manifold type Tie-rod base manifold 1(P: SUP)/3, 5(E: EXH) type Common SUP, EXH Valve stations (maximum) 20 stations Max. number of solenoids 32 points Port size 1(P)/3, 5(E) port C10, N11 C8, N9 C12, N11, 03 C12, N11 C4, C6, C8 N3, N7, N9 C3, C4, C6 N1, N3, N7 C8, C10, C12 N9, N11, 02, 03 C6, C8, C10 N7, N9, N11 4(A)/2(B) port Flow

ITVH

Therefore, supply pressure regulated by a built-in regulator e passes through the air supply solenoid valve q and is applied to the pilot chamber r. The pressure in the pilot chamber r increases and operates on the upper surface of the diaphragm t. As a result, the air supply valve y linked to the diaphragm t opens, and a portion of the supply pressure becomes output pressure.

Nozzle Type Ionizer

Description of LEDs q w e No. Description LED Color Contents q Power supply display PWR Green Lights up when the power supply is turned on. w Discharge/Irregular high voltage display ION/HV Green/Red Lights up when static electricity is discharged. (Green)/Lights up if an abnormal high voltage discharge occurs.

High Speed Pilot Operated

Description Material 1 Body Aluminum die-casted 2 (B) 4 (A) 2 Spool assembly Aluminum/FKM e 3 Plug (For the -X1) Steel 1 High Speed Pilot Operated Solenoid Valve DXT1215 Series How to Order Valves DXT1215 T 5 Wm U 01 N X1 w y e r t u q q Coil type w Rated voltage e Electrical entry M8 connector1 T With power-saving circuit 5 24 VDC Wm WO With straight connector cable Without connector cable

Peltier-type Chiller Thermo-con/ Compact Type

Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

CY1F

+ Stroke CY1F 1/2 (Q + Stroke) (LL) LA 6-YB through hole 6-YA recessed area 4-MM thread depth ML Adjustment bolt Note2) PA MAX. approx.

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Description Note Material Description AS2000 AS3000 Aluminum alloy Body Chromated q Zinc alloy Aluminum alloy SPC Cap Nickel plated Body q w Brass Brass Zinc alloy Handle Chromated(Red painted) Needle w e Brass Brass Spring steel Ring Zinc chromated Lock nut e r Zinc alloy Lock nut Chromated Valve core r t Aluminum alloy Needle Chromated Aluminum alloy (Red painted) Aluminum alloy (Red

ASD

9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !