: °F), Bracket: R (w/Bracket), Calibration Certificate: None

Size: 2 (Series 20), Valve Operation Type: 1 (Normally Closed), Valve Type: Nil (Standard), Body Material: S (Stainless Steel), Seal Material: F (FKM), Orifice Diameter/Port Size: 301 (Orifice Diameter: ø3.2mm; Port Size: 1/8), Thread Type: F (G), Rated Voltage: 5 (24 VDC), Electrical Entry: DS (DIN Terminal, w/Surge Voltage Suppressor)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Elbow type How to Order AS 2 2 1 1 F 01 06 S T Tamper proof Speed Controller requires a special tool for flow adjustment. Order separately with part number, AS-T-1. With seal Note) In case that connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard.

SMC Pneumatic Clean Series

Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment M3 x 0.5 11 3.5 10: Relief port 11: Vacuum suction port 2-M3 x 0.5 (Port size) G 3.5 H screw effective depth I Width across flats M Width across flats L E D kh9 J F C N 2.5 2-3.3 through 2-

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 * Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08

Speed Controller: Standard Type In-line Push Locking Type AS Series

Number of needle rotations 656 AS Series Speed Controller: Standard Type In-line Push Locking Type Construction Dimensions AS-F 61.5 (Max. 68.5) TMH ASD AS AS AS-FE 2 x 5.5 Component Parts No. Description Material KE Reference dimensions AS-FG 1 2 3 4 Body Valve Cap Needle Aluminum alloy NBR Rolled steel Brass POM Zinc alloy AS-FP AS-FM 5 Handle Replacement Parts AS-D No. Part no.

Speed Controller: Standard Type Large Flow In-line Type AS Series

AS420 Thread type AS500 AS600 AS800 Nil Rc NPT G N F 1 4 1 2 AS900 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Air-hydro Unit

backward 160 L Actuator 1168 A Air-hydro Unit CC Series Dimensions Hydro Unit Air port size Rc CC CC Lube-plug 4 x T Mounting hole Rc 1/8 Pilot air connection port (Stop valve side) Rc 1/8 Pilot air connection port (Stip valve side) Manual push button Oil port size Rc Oil draining hole Rc 1/4 Throttle valve locking screw (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL EA EB EL F

CG5-S

R V Front flange type (F)/CG5FNS X165US inch rod option dimensional changes GA GB FT 2-Rc P H1 Width across flats B1 Dim.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Series CDU 10-/1121-/226, 10, 16, 20, 25 Free Mount Cylinder Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Size 1 2 3 7 10 20 30 50 Fluid Air (Non-lube) Size Suction flow rate L/min (ANR) 1/2/3/7 10/20/30/50 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r e c t k n w u o i s C e CRB2 CRBU2 CRB1 MSU B port A port C e l o s c i w k CRJ Basic type For 90 and 100 For 180 and 190 CRA1 Single flat Single flat CRQ2 MSQ MRQ D+10 0 B port A port B port A port +8 0 00 20t 1 0 t 9 fla la gle e f gl sin sin of

CXS

depth 3.5 (Piping port) OUT MG CX IN DSteel balls -X 20Data 12 + Stroke 16 CXSJ10P 0.3 14.4 0.3 41.4 Stroke (64.5 + Stroke) 56 + Stroke 8.5 44.5 + Stroke 7.5 8 + Stroke 16 4-M1.6 x 0.35 x 8 L 20 2-M5 x 0.8 thread depth 4 (Piping port) OUT IN Steel balls 8-28-25 25 Series CXSJ Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Possible to use in vacuum or under low pressures Vacuum: Up to 101.2 kPa Low pressure: 0 to 0.2 MPa Free mounting orientation How to Order 04 4 5 1 VP3 A G 1 VP series 3 port solenoid valve CE-compliant Q CE-compliant Note) Nil Number of solenoids Single Note) Electrical entry: D/DL/DS/DZ only 1 Body size Thread type 1 4 6 8 1 2 1 2 Rc Nil G F 1 NPT N NPTF T Body ported 5 Body type Pilot

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

XM, XY

G J K L M Indicator Without indicator Pilot port direction Left flange surface Rear flange side Rear flange side Left flange surface Right flange surface Left flange surface Right flange surface Flange side Flange side Left flange surface Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Nil Right flange surface Left flange surface A F J