Made to Order

) 29.5 (39.5) 30.5 (40.5) 36 (46) 43.5 (53.5) 53 (63) 33 (33) 39.5 (39.5) 40.5 (40.5) 46 (46) 53.5 (53.5) 63 (63) 54.5 (54.5) 64 (64) 66.5 (66.5) 68 (68) 81 (81) 94.5 (94.5) 25.2 (32.4) 26 (36) 26 (38) 29 (39) 30.5 (40.5) 40 (50) 40.5 (50.5) 42 (52) 51 (61) 60.5 (70.5) 40.5 (40.5) 50 (50) 50.5 (50.5) 52 (52) 61 (61) 70.5 (70.5) 32.2 (39.4) 33 (43) 35 (47) 39 (49) 44.5 (54.5) 54 (64) 56.5

Air Slide Table

MXQ 12C-mm5 With buffer, axial piping (12) Pilot port M5 x 0.8 (OUT) 12 33 2 Pilot port M5 x 0.8 (IN) 17 8.4 Pilot port M5 x 0.8 (IN) Symmetric type 33 12 41.4 27 Dimensions [mm] Model Standard type Shorter total length type ZZ M M MXQ12C-10Zl5 103.5 93 96 MXQ12C-20Zl5 113.5 103 98 MXQ12C-30Zl5 123.5 113 108 MXQ12C-40Zl5 141.5 131 126 MXQ12C-50Zl5 151.5 141 136 MXQ12C-75Zl5 195.5 185 180

Table of Contents

SB, counterbore depth SC P.C.D.R (Mounting hole) Auto switch mounting groove dimentions (2 locations) MHS3-16D MHS3-20D MHS3-25D 5 6 4 54 54 5 4 6.5 54 4 5 3 3 3 5 5 33 33 33 (mm) I G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 5 6 7 EO 7 8 10 NB 0 0.030 0 0.030 0 0.030 DC 15 18 21 NA 8 10 12 DO 17 20 24 K 4 5 6 B 30 36 42 R 25 29 34 J 10 12 14 AA 35 38 40 AB 32 35 37 O

1

Bore size (mm) A B Stroke Both of S1, S2 L 50 st or less 75, 100 st 50 st or less 75, 100 st 12 3.5 41 (63) 17 (28) 5 to 30 16 3.5 44 (68) 18.5 (30.5) 20 4.5 48 (72) 19.5 (31.5) 5 to 50 25 5 55 (75) 22.5 (32.5) 32 7 60 (80) 23 (33) 80 (80) 33 (33) 5 to 100 40 7 73 (93) 29.5 (39.5) 93 (93) 39.5 (39.5) 50 8 77 (97) 30.5 (40.5) 97 (97) 40.5 (40.5) 63 8 88 (108) 36 (46) 108 (108) 46 (

CJ2

(SNJ-016B for 10, SNKJ-016B for 16) LB KA MM H LZ GB LY GA LX Z F LT S BA CB LH NN Y A BB CA LC NA NB X Bore size (mm) 10 16 4.2 28 42 5 25 8 33 74 8 2.3 46 14 14 9 15 17 5.5 9.5 6 15 12 21.5 12.5 M4 x 0.7 M10 x 1.0 5.2 28 42 5 25 8 33 75 8 2.3 47 20 14 9 15 20 5.5 9.5 6 18.3 18.3 23 12.5 M5 x 0.8 M12 x 1.0 6-3-36 37 37 Series CJ2K Air Cylinder: Non-rotating Rod Type Double Acting, Single

ISO Standard Hydraulic Cylinder

33.5 33 38.5 39.5 34.5 33 33 4.5 0 8.5 3.5 47.5 38.5 14.5 9.5 11 6 16 11 8 3 38.5 38 38.5 43.5 45 38.5 28 37 8.5 3.5 12.5 7.5 54 48 18.5 13.5 15 10 20 15 12 7 48 47 48 52 51 48 46.5 46 8.5 6 12.5 10 66.5 58 18.5 15.5 15 12.5 20 17.5 12 9.5 57.5 59 57.5 62.5 63.5 58 59 57 D-A5/A6/A59W cannot be mounted to 40, 50.

ISO Cylinder

Y: Head cover axial port L(M): Single (Double) foot U: Head trunnion Series Variations Bore size [mm] ISO Standards Series 12 16 8 10 20 25 32 40 Page Type Action Double acting, Single rod 2 Double acting, Double rod 13 ISO 6432 C85 Single acting, Single rod 19 Standard Double acting, Single rod 56 Double acting, Double rod 64 C75 Single acting, Single rod 70 Double acting, Single rod 33

CJ2

(SNJ-016B for 10, SNKJ-016B for 16) (mm) Bore 10 16 MM LZ LY LX LT LH LC LB KA H GB GA F CB CA Z BB S BA NN Y A NA NB X 42 25 33 2.3 14 5.5 4.2 28 5 8 8 14 21.5 M4 X 0.7 12.5 M10 X 1.0 17 74 12 46 15 9 15 9.5 6 42 25 33 2.3 14 5.5 23 5.2 28 5 8 8 20 M5 X 0.8 12.5 M12 X 1.0 20 75 18 47 18 9 15 9.5 6 1.3-33 Series CJ2K Front Flange (F) CJ2KF Bore size Stroke Port location on head cover Refer

MY1

Refer to pages 32 and 33 for details regarding dimensions, etc.

Series KV2 Fittings

Tube Size Packaging Table 01 03 05 07 09 11 13 15 19 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 Tube Size Type A (Monowall) Type B (Reinforced) TIV01 TIV03 TIV05 TIV07 TIV09 TIV11 TIV13 TIV15 TIV19 3/4 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 Length (Meters) S S S S S S S S

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 160 25 45 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 190 40 60 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 25 45 160 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 40 60 190 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64

LJ1H

Stroke + 334 (364) 33 2-T-slot 2 33 90 62 Stroke + 32 3-8H10 depth 20 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 5.8 67 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-M6 x 1 thread depth 20 92 58 (88) 10 10 11.5 Stroke + 216 45 9.4 4.5 10 18 The body mounting reference plane should be used as a standard when mounting onto equipment.

MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

C85

0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) (40) 50 34 23 30 0.7 63

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion With air cushion type is not available for 21-/22-CJ2.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion Air cushion type is not available for 21-/22-CJ2.

CY1

CY1HT25-PS CY1HT32-PS Above Nos. 28, 29, 30, 31, 32, 33 Seal kits are sets consisting of items 28 through 33, and can be ordered using the order number for each bore size. 52 Series CY1H Magnetic Rodless Cylinder High Precision Guide Type Dimensions Single axis type/10 CY1H10 4-M4 x 0.7 thread depth 6 46 39.5 23 1 CY1H10-B Guide central axis 15 1.3 46 Piping port surface 95 + Stroke 54 2-

Stability of suction position,

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Fluoropolymer Piping Equipment

5.8 LQ1T4A-R8 1/4" 1/4" 1/2" 7 20 20 29 14 28 17 17 26 44 44 54 23 23 39 3.6 LQ1T4A-R10 1/4" 1/2" 1/4" 6 15 24 15 9 18 14 21 14 33 43 33 16.5 28 16.5 3.6 LQ1T4A-R17 1/4" 3/8" 1/2" 7 20 20 29 14 28 17 17 26 44 44 54 23 23 39 3.6 LQ1T4A-R20 3/8" 1/4" 1/2" 6 24 24 9 18 21 21 43 38.5 43 28 28 3.6 LQ1T4A-R33 1/8" 1/2" 1/8" 15 24 15 14 21 14 33 43 33 16.5 28 16.5 1.8 LQ1T5A-R2 3/4" 3/8" 3/4" 7