5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. Connection and Electrical Circuit Warning Manual Override Without an electric signal for the solenoid valve the manual override is used for switching the main valve. The VQZ series features non-polar solenoids.

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to 1 00 Double rcd o12, a16/5 b 30 o2O, a25/5 b 50 o32,a4ol51o IOC) o50 to 61 00/1 0 to 1 0O Singleacting Spring return/extend s 1 2 1 0 6 4 U 5 , 1 0 o50h0.20 Ion.rotating rod Double acting Singl rod o12, @16/5 lD 30 o20, @295to 50 o32, o4ol510 1OO o50, 0631 0 to 1 00 Double rod s12, s1615 lo 30 o20 lo o40l5 to 50 o50, a6310lo 50 @Actuation Doude acting Srngle acting spnng refurn Single

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

O

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

O

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

Nozzle Type Ionizer

Make sure to ground. +24 V +24 V Brown + 24 VDC Brown + 24 VDC +24 V Power supply 24 VDC +24 V Power supply 24 VDC Blue 0 V Blue 0 V 0 V 0 V F.G. F.G. Make sure to ground. Make sure to ground.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

EX250-SCA1A_eng

Verify the specifications before use. 0 1 2 0 1 0 0 0 1 0 0 0 0 0 0 0 0 0 0 0 0 Specifications : : : : : : : Power for CANopen communication: 18 to 30 VDC, 0.1 A or less Power for input: 24 VDC 20%, 1 A or less (Depending on number of connecting sensors and specifications) Power for valve: 24 VDC +10%/-5%, 2 A or less (Depending on number of solenoid valve station and specifications) Connection

LFE-OMY0008

[F 1] OUT1 33 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 49 34 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 35 No.LFE*-OMY0008 [F 2] OUT2

MXH Series Compact Slide

0 0 0.11 0.22 0.34 0.47 0 0.20 0.29 0.39 Yaw moment My(Nm) Pitch moment Mp(Nm) 1 N m = 0.7375 ft lb 1 N m = 0.7375 ft lb MXH10 MXH10 0.3 0.3 60 60 50 0.25 0.25 Displacement (mm) Displacement (mm) Displacement (mm) Displacement (mm) 40 50 0.2 0.2 25, 30 40 Stroke Stroke Stroke 15, 20 0.15 0.15 25, 30 5, 10 0.1 0.1 15, 20 5, 10 0.05 0.05 0 0 0 0.17 0.33 0.50 0.67 0.82 0.20 0 0.37 0.57 0.76

Process Pump Series PA3000/5000/PAX1000 Series PB1000

0 0 0 0.2 0.4 0.6 0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 Discharge rate l/min Discharge rate l/min Discharge rate l/min PB1000 Air consumption Selection from flow rate characteristic graphs Required specification example: Find the pilot air pressure and pilot air consumption for a discharge rate of 600ml/min and a total lifting range of 15m.

Compact Electro-pneumatic Regulator Series ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

ITV-E

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

Clean Regulator

pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 10 0 5 15 20 25 0 0 1000 500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 1000 500 10 5 0 15 20 25 500 1000 1500 0 0 Flow rate L/min

PA3000/5000/PAX1000

0 0 0 0.2 0.4 0.6 0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 Discharge rate l/min Discharge rate l/min Discharge rate l/min PB1000 Air consumption Selection from flow rate characteristic graphs Required specification example: Find the pilot air pressure and pilot air consumption for a discharge rate of 600ml/min and a total lifting range of 15m.

Vacuum System Peripherals:

Power supply voltage S L Straight type 3 m Right angle type 3 m Without cable connector Flow Characteristics 0 1 24 VDC 12 to 15 VDC N 0 Option Input signal 10 Bracket 0 1 2 3 4 Current type 4 to 20 mA DC Current type 0 to 20 mA DC Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Preset input 20 Output pressure (kPa) Nil B Without bracket Flat bracket L-bracket 30 40 C Option 50 Monitor

C95Series

HI , 32 7 0 43 78 t 40 '8 0 43 82.5 SO 8 0 43 87.5 63 23 0 43 94 80 13 0 43 103 100 23 0 43 11 3.5 0syC 19 Series C95 MounUng AccesSOt'ies Part number rri~~ Pescriptlot) , . _,C9S1132 C95ia40 /, C95850 C951163 / C9511180 C951l1100 Tmnniol'lIncuitilgbl'acllet Nae'l MB-S03 MB-S04 MB-S06 MB-S10 fMoo.m; pI!

Cylinder

Load voltage 5V, 12V, 24V AC, DC I 24V DC 0' less M ax Io -ad ",a --"' -urr-e-n50mA -T--S 40mA -.-c" urrent -;:--nge O I-road c t + ---_ In _t _ e_ rn _a _l _v _ o _ lt _ a ,, 9 ,, e_d _'_ 0 cP _ _ + _ ~ 0 I 2AVOf~ __ -Leak current 0 Response time 1.2 ms COJPB6-1OD _ In _d _ ic c.a :.. t_ o_ , _ Ia _ m ..: p _ _ + __ .---!'

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

0 !1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

REC

across flats B1 I Relieving port Eh8 D MM AL CX -0.1 -0.2 K A U CZ N N F S+Stroke H L lNA Z+Stroke RR ZZ+Stroke (mm) A AL B1 CD CX CZ D E F G H H1 I K L MM N Bore size Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 19 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 19 150 to 700 M10 X 1.25 32 22 19.5 17