S9PV2 Grommet D-S791/S792 D-T791/T792 Direct D-S7P1/S7P2 Connector D-T791C/T792C D-F8N/F8P/F8B 12-13-15 D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 12-13-16 Grommet 12-13-17 D-F79W/F7PW/J79W Grommet Rail 12-13-18 D-Y7NW/Y7PW/Y7BW D-Y7NWV/Y7PWV/Y7BWV 12-13-19 Direct Grommet D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV 12-13-20 D-F59W/F5PW/J59W Tie-rod Grommet D-F79F 12-13-21
Temperature stability: 0.1C (CH1) When a load is stable When a load is stable 0.1C By controlling the inverter compressor, inverter fan, and electronic expansion valve simultaneously, it maintains the good temperature stability when the heat load fluctuates. 22 Circulating fluid temperature [C] Circulating fluid temperature [C] CH1 21 20 19 26 kW load 18 0 kW load 17 0 10 20 30 40 When a
AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS40 Encoder cable (7) 4 x M8 x 1.25 thread depth 13 (170) Motor cable (6) 106 60 Body mounting reference plane Note 1) 74 58 6H9 ( ) depth 7 7 +0.030 0 +0.030 0 6H9 ( ) depth 7 13 L (3.1) A (Table traveling distance) Note 2) 86 86 (223.5) Stroke (88) (90) 61 90 Encoder Z-phase detecting position Note 3) 48.5 (4) 21
Clean series t Copper, Fluorine and Silicone-free + Low Particle Generation For details, refer to the Clean Series/Low Particle Generation section of the Web Catalog. 21 Standard model no. Copper, fluorine and silicone-free + Low particle generation 80
Monitor upper limit value 0 to 65535 (Low byte first) 10..11 0..7 (Ch0 in) Monitor lower limit value 0 to 65535 (Low byte first) 12..13 0..7 (Ch0 out) Upper limit value 0 to 65535 (Low byte first) 14..15 0..7 (Ch0 out) Lower limit value 0 to 65535 (Low byte first) 16..17 0..7 (Ch0 out) Fault value 0 to 65535 (Low byte first) 18..19 0..7 (Ch0 out) Idle value 0 to 65535 (Low byte first) 20..21
EX245-DX1 7.3 EX245-DY1 8.3 EX245-LA1/LB1 9.3 21 No.EX-OMW0014CN-A 4. 4.1. SI SI PROFINET PROFINET IO 4.1.1. GSD PROFINET IO SI GSD (XML GSDML(General Station Description Markup Language))GSD EX245 IO EX245 GSD GSD GSDML-V2.3*-SMC-EX245-SPN-*.xml GSDML-0083-0011-EX245.bmp 4.1.2.
Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 01() 1 Valve 18, 19 diagnostics 01() 2 Valve 20, 21 diagnostics 01() 3 Valve 22, 23 diagnostics 01() 4 Valve 24, 25 diagnostics 01() 5 Valve 26, 27 diagnostics 01() 6 Valve 28, 29 diagnostics 01() 7 Valve 30, 31 diagnostics 01() 36 No.EX-OMU0020CN 5.1.2.
No.PF-OMO0007CN / / PF2A7## 2 10 12 13 15 15 16 17 19 20 21 22 25 F_1 26 F_2 () 27 F_3 28 30 31 32 32 34 35 35 37 38 40 -1No.PF-OMO0007CN (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (
[%F.S.] 2 1 0 OUT OUT OUT OUT 0 D 2D 3D 4D 5D IN IN IN IN 0 1 2 3 4 5 5 (5D) [] [] LFE13/8 inch 0.2 MPa LFE23/4 inch LFE31 inch (mm) D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 68 No.LFE*-OMY0008 4.0 3.5 3.0 2.5 [%F.S.]
3.11.3 Function code: 16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register map . 3-18 HRS400-A-46 DOC1003626 Contents 3.13.1 Circulating fluid discharge temperature . 3-19 3.13.2 Circulating fluid flow rate . 3-19 3.13.3 Circulating fluid discharge pressure . 3-19 3.13.4 Circulating fluid electrical conductivity . 3-19 3.13.5 Status flag . 3-20 3.13.6 Alarm flag. 3-21
3.11.3 Function code16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register Map . 3-18 HRL Series HRX-OM-W069 Contents 3.13.1 Circulating fluid discharge temperature . 3-19 3.13.2 Circulating fluid electrical conductivity . 3-19 3.13.3 Circulating fluid discharge pressur . 3-19 3.13.4 Circulating fluid flow rate . 3-19 3.13.5 Status flag . 3-20 3.13.6 Alarm flag. 3-21
20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch alarm
20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch alarm
12 18 2 A 16 U 17 21 23 2B 9 10B 11 9 27 15 12 14 B 11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4.
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60
P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60
No.MH*-OMZ0004 / / JMHZ2-16D-X7400B-ASSISTA(-P) . 2 1. 4 2. . 5 3. . 6 3-1. . 6 3-2. . 7 3-3. . 8 3-4. () . 9 3-5. . 10 3-6. . 10 4. . 11 4-1. . 11 4-2. 3 . 12 4-3. . 13 5. . 14 5-1 . 14 5-2. . 14 5-3. . 20 5-4. . 20 5-5. . 20 5-6. . 21 6. . 21 1 - (ISO/IEC)(JIS)*1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power
Raising dust characteristic 21 Recommended tube diameter The figure below shows the amount of the vacuum aspiration and the raising dust degree. (reference value) (1) Step motor (servo 24VDC) / Servo motor (24VDC) The table below shows the amount of the vacuum aspiration and the raising particle. .
/LEHS .20 4.1 . 20 4.2 . 21 4.3 . 22 5.23 5.1 . 23 5.2 . 24 5.3 . 27 . 27 . 29 (1). 31 (2). 32 (3). 33 . 34 5.4 . 36 . 36 . 38 1 - 6.39 7.40 7.1 . 40 7.2 . 41 7.3 . 41 7.4 . 42 7.5 . 44 7.6 . 44 8.45 8.1 . 45 8.2 . 46 8.3 . 50 8.4 . 53 .54 2 - LEH Series / (ISO/IEC)(JIS)1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General
[SW] 1 1 1 0. [] 02 1. a [a ] 2. b [b ] SW 21 21 1 33 - 8 81 ( 82 0 / 34 - 83 1 1 INP ON / 2 ( INP OFF 3 INP OFF INP ON 35 - INP ON ( ) 84 PLC 15ms30ms 85 2 EMG EMG OFF () RESET RESET () HOLD HOLD EMG RESET OUT OFF 36 - 9 91 )100mm/s 50mm (No.1 ) 50mm 50mm/s 10mm 5 100mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 50.00 1000 1000 0 0 0 100