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Slide Unit/Double Rod Type Series CX2 Slide Bearing: 10, 15, 25 How to Order Port thread type Symbol Bore size 10, 15 Type M thread Rc 1/8 NPT 1/8 G 1/8 Nil TN TF 25 CX2 N 15 100 B C X2 N 15 B 100 J79W DB With auto switch Made to Order Cylinder with auto switch Refer to page 465 for Made to Order specifications.

Cassette 10 Cassette 11 Seal NBR 11 Seal NBR 12 Plug Electroless Brass nickel Plated 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Power supply voltage Current consumption Switch output Note 1) 12 to 24VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) 45mA or less (70mA or less for current output) NPN or PNP open collector output: 1 output 80mA 30V (with NPN output) 1V or less (with load current of 80mA) Max. load current Max. applied voltage Residual voltage Response time 2.5ms or less (Response

Base Mounted Wiring: 01T1 (Plug-in w/Terminal Block, One-piece Junction Cover), Stations: 3 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4), Thread: Rc, Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Voltage Air Release Valve: 5 (24VDC)

Base Mounted Wiring: 01FD1 (Plug-in w/D-sub Connector, D Side Mtg), Stations: 8 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4), Thread: Rc, Control Unit: MP (Air Release Valve,Filter Reg w/Manual Drain,Pressure Switch), Voltage Air Release Valve: 5 (24VDC)

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 3 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Voltage Air Release Valve: 24VDC

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status.

URL http://www.smcworld.com -10 V to 10 V -20 mA to 20 mA for 2 hours each in direction X, Y and Z respectively (De-energized) 24 VDC Class2, 2 A 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 0 V to 10 V 0 mA to 20 mA Content Content Content 0 V to 10 V 0 mA to 20 mA 0 V to 10 V 0 mA to 20 mA

If it is 10 L/min, there is a flow of 10 L passing through the device in 1 minute. The voltage drop across the product (and therefore not applied to the load), when the switch output is ON. The voltage drop will vary with load current, and ideally should be 0 V.

Fig. 9 Normal output OFFt0 Fig. 10 Sequence OFF0 Fig. 11 Sequence 6. Cascade connection There are only outputs up to 10 points (6 points in the case of VXFC06A) on a single board. However, it is possible to increase the output points by cascading (multiple board connection).

Pressurizing the air blow discharge port may result in the breakage of the product. 10 Revision history A: Specification and Notes added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding

Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/

Specifications Table 4 Model Note 1 XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures ,

ON 23 4. 10. 24 5. 1 CG5SR CG5SV 2 15 3 16 NBR FKM 4 17 5 18 6 19 7 20 PET 8 21 9 22 10 11 12 13 14 1CG1 2 11. 25 Revision history 1: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

OFF (OFF) 1. 2. 60 21 - 10. 22 - 23 - B 24 - A RS2H-OM0044PRS2H-OM0045P 12 B 17,24 9 C C +86-10-67885566 : 08:0017:00() SMC() URL http://www.smc.com.cn 2 100176 +86-20-28396516 : 08:4517:30() SMC() URL http://www.smcgz.com.cn 3 2 510660 +81-3-5207-8249 Fax: 81-3-5298-5362 : 09:0017:00() SMC URL http://www.smcworld.com /101-0021 4-14-1 2017 SMC Corporation All Rights Reserved

20800 10400 Speed[mm/s] Pushing speed[mm/s] 20~30 10~30 5~30 2030 1030 2030 1030 actuator specification Max.acceleration/ 10 Horizontal Vertical 2] 5000 deceleration[mm/s Position repeatability [mm] 0.01 note4) 0.1 or less Lost motion [mm] Screw Lead [mm] 10 5 2.5 12 6 16 8 Impact / Vibration note5) 50/20 2] resistance [m/s Actuation type Ball screw (In-Line) Ball screw + Belt (Parallel)

Refer to page 8 to 10. Please note that the graph should only be used as a guide as there is a tolerance of about 10% in the clamp cylinder body.