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9e c:o c+o coo c+z cse l-cos 'lncludes Rod Packing. Piston Packing, and Tube Gasket (2) Comoact Guide Cytinder: Series MGQ 0120zs,/MGQM'MGQL A Perspective drawing 4-NN Thrcugh NOTE !

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

Normal output Reversed output P_1 = A (A B)/4 n_1 = B + (A B)/4 A = Maximum pressure H_1 = (A B)/2 H_1 = (A B)/2 B = Minimum pressure In the OUT2 setting, the above P_1, n_1 and H_1 will be P_2, n_2 and H_2 respectively.

U1 2 [With external pilot] (Pitch) P = 10.5 2n1-M5 x 0.8 [4(A), 2(B) port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 2-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n2-One-touch fitting [4(A), 2(B) port] Applicable tube

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Flow rate 0 5 10 Number of needle rotations Refer to the Web Catalog for details.

C, prevent water droplets from entering the inlet port. (No freezing of the fluid) * Note 2. ANR indicates the flow rate converted to the value at 20 deg. C, under the atmospheric pressure and the state of relative humidity 65%. * Note 3. Option : S -6- Revision history A: Changes to Maintenance and Checks.

C, prevent water droplets from entering the inlet port. (No freezing of the fluid) * Note 2. ANR indicates the flow rate converted to the value at 20 deg. C, under the atmospheric pressure and the state of relative humidity 65%. * Note 3.

(IN OUT) 2 3 (OUT EXH) Flow rate characteristics Port size Valve model Grommet C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(IN), 2(OUT) 3(EXH) 3 8 1 2 3 4 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 21 0.39 5.8 28 0.36 7.6 26 0.35 7.0 VP3145 3 4 1.5 Weight (kg) Port size Effective area (mm2) Valve model Grommet 1 (IN), 2 (OUT) 3(EXH) 1 2 (IN OUT) 230 280 310 570 650 650 2 3 (OUT EXH) 280 310

3/4 1 1 1/4 1 1/2 2 1/2 3/4 1 1 1/4 1 1/2 2 78 78 83 106 106 111 3.6 3.6 3.6 6.4 6.4 6.5 71 71 71 104 104 104 53 53 53 74 74 74 3.7 3.7 3.7 7.4 7.4 7.5 Weight values are for the minimum T dimension (symbol 1) in each standard T dimension.

) . 4-1 4.2 Reading setting temperature . 4-1 4.3 Reading internal sensor . 4-2 4.4 Reading external sensor . 4-3 4.5 Reading alarm status . 4-3 4.6 Offset setting (without writing FRAM) . 4-5 4.7 Reading offset . 4-5 4.8 Temperature setting (with writing FRAM) . 4-6 4.9 Offset setting (with writing FRAM) . 4-7 4.10 Communication Format and Examples of Answers from Thermo-con . 4-8 5 MODBUS

Normal output Reversed output P_1 = A (A B)/4 n_1 = B + (A B)/4 A = Maximum pressure H_1 = (A B)/2 H_1 = (A B)/2 B = Minimum pressure In the OUT2 setting, the above P_1, n_1 and H_1 will be P_2, n_2 and H_2 respectively.

EVS1-01/1-02 Dimensions EVS1-01-FG-S-M0 117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1

EVS1-01/1-02 Dimensions EVS1-01-FG-S-M0 117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1

* 1015 10 1% 2162 LCD * -8No.PS-OMV0008CN-E ISE70G 02 L2 M 3 Y K T ISE70G 0~1 MPa ISE75G 0~2 MPa ISE76G 0~5 MPa ISE77G 0~10 MPa ISE78G 0~16 MPa 2 A A B B 02 Rc1/4 N02 NPT1/4 F02 G1/4 :ISO1179-1 1 M12 5m M12 5m T S : L IO-Link/1+2 NPNorPNP L2 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-48-A ZS-31-B 5 m M12 ZS-31-C 5 m -9No.PS-OMV0008CN-E M12 4 24 OUT1 IO-Link

EVS1-01/1-02 Dimensions EVS1-01-FG-S-M0 117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port

Indication accuracy 2%F.S. 1 digit (253 C reference) Indicator light OUT: LIT When ON (Green) Enclosure IP40 Environment Ambient temperature -5 to 50 C (No freezing) Oil resistance vinyl cabtyre cable Lead wire with connector (for option "L") 3 cores 3.4, 2 m Sectional area of conductor: 0.2 mm2 (AWG25) Outside diameter of insulator: 1.12 mm Standard CE marked (EMC directive/RoHS directive

Safety Instructions 2 2. Product Outline 4 3. Operation explanation 5 3.1 Positioning operation 5 3.2 Pushing operation 7 4. Easy mode 9 4.1 Summary of Easy mode 9 4.2 Menu 12 4.3 Teaching method 13 4.3.1 Preparation 13 4.3.2 Jog teaching 13 4.3.3 Direct teaching 13 4.4 Test drive method 14 4.5 Pitch transfer method 14 4.6 Jog transfer method 15 4.7 Alarm 15 5.

Doc. no.CG1-OM0001G PRODUCT NAME STAINLESS STEEL CYLINDER MODEL / Series / Product Number C*G5*N**SR / V-* C*G5*A**SR / V-* Contents Safety Instructions P2 1. Specifications P6 1-1. Specifications 2. Installation and Handling P7 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Cushion 2-7. Control of direction 2-8. Auto switches 3.

2.3 Bracket (Option) 76 148 Bleed 43 Pressure gauge (Option) EXH(3) OUT(2) SUP(1) 22 15.5 M5 depth 7 Rc 1/2 Exhaust port 66 9 68 66 IN 2 x Rc 1/4 to 1/2 Port size 2 x Rc 1/8 Pressure gauge port Bleed 22 76 144 43 EXH(3) OUT(2) SUP(1) 68 66 Rc 1/2 Exhaust port 66 2 x Rc 1/4 to 1/2 Port size 2 x Rc 1/8 Pressure gauge port 556 Precision Regulator Series IR1000/2000/3000 Series IR1000 Flow Characteristics