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360 around the stud axis For reducing R 1/8 female to M5. 1 8 For nylon tubing 1 8 R x M5 female M-5B 6/4 x R 6/4 x M5 M-01AN-6 P. 56 M-5HL-6 P. 58 P. 59 1 8 Plug Use to plug unused M5 port.

AC Servo Motor Driver (Network card type ）

No. 1 No. 3 No. 1 Servo motor speed 100.00 r/min 100.00 r/min 150.00 r/min 4 4 4 5 3 3 3 5 5 2 2 6 Positioning 2 6 6 7 7 7 1 1 1 0 0 0 5. A delay time can be set with [Pr. PT39]. 6.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

specifications 1 4 1 4 M5 x 0.8, 1 8 P, EA, EB port Port size 1 8 1 8 1 4 1 4 A, B port C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C6 (One-touch fitting for 6) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Manifold base mass W (g) n: Stations W =

AC Servo Motor Driver (Pulse input type/Positioning type ）

NC 1 2 3 4 5 6 7 8 LG P5D RDP SDN SDP RDN LG NC 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 RDP (Note 8) (Note 2) 150 RDN (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

smcmaintenancepartslist

NBR 6: Not available Note 1) Seal kit includes @7 to #0 for 6. @7 to #1 are for 10. @0 to #1 are for 15 to 40.

Fluoropolymer Piping Equipment

Port size 1 2 1 2 1 2 3 4 5 6 8 1 2 3 4 1 2 3 1 2 3 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7 A A B A B C D A B C D A B C A B C A 1/8" 1/8" 1/8" 1/4" x 5/32" 1/8" 1/4" 1/4" 6 x 4 1/8" 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 1/4" 3/8" x 1/4" 1/8" 3/8" 1/2" 1/4" 1/4" 3/8" 1/2" x 3/8" 3/8" 1/2" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 3/8"

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9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

A

5/16-24 2 1/2 0.3 1.26 1.06 1 3/8 2.09 2.40 6 9/16 1 3/8 2 11/16 1 3 5/8 6 6 1 3/4 3/8 1/8 3/4-16 9/16 1/2 7/8 3/8 1 1/8 1 5/8 1 1/8 5/16-24 3 1 3/8 6 11/16 250 (2.5) 3.1 1.5 0 1.3 1.06 2.13 2.48 1 3 1/8 3 3/4 3/8 1 6 1/8 6 1/8 2 1/4 3/8 1/8 3/4-16 9/16 1/2 7/8 3/8 1 5/8 115/16 1 1/2 1 1/4 3/8-24 3 3/4 1 5/8 7 7/8 325 (3.25) 3.9 2 0 1.57 1.18 2.59 2.72 1 3/8 3 13/16 4 1/4 1/2 1 1/4 7 3/8

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6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body

ZP

M3 x 0.5 M5 x 0.8 Vacuum entry 6 Nylon tube 6 Urethane tube 4 tube 6 tube 10 to 32 M5 x 0.8 6 Nylon tube 6 Urethane tube 6 tube 8 tube M5 x 0.8 Rc 40, 50 1 8 2 to 8 10 to 32 40, 50 M8 x 1 Male thread M10 x 1 Male thread M14 x 1 Male thread Connection Buffer type Rotating (J)/Non-rotating (K) For 2 to 8 6, 10, 15, 25 mm For 10 to 32 10, 20, 30, 40, 50 mm For 40, 50 10, 20, 30, 50 mm Buffer

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6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

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6!7!8!9 MHW-A2001 MHW-A2501 MHW-A3201 MHW-A4001 MHW-A5001 wit yu!1!2!

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<* 1 LVA Orifice size 1 2 3 4 5 6 77 6 6 0 6 LVH Rated voltage 1 2 3 4 7 8 ,, 9= 5,'., ?

Electric Actuators

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

ZP

ZM 4, 6, 8 tube M6 x 1 M8 x 1 ZH 6, 8 tube M6 x 1 M8 x 1 M6 x 1 M8 x 1.25 ZU How to Order ZL Vacuum entry port Mounting thread ZY Pad type Pad dia.

5-Port Solenoid Valve

1 !0 o i !6 !7 w e r !8 Lead wire color for circular connector cable assembly by terminal number @1 @6 @5 Approx. 10 !9 y t @0 u Lead wire color Terminal no.

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Local Area: (800) 258-9200-www.stevenengineering.com VZS VFS G 1/2 VS4 VQ7 EVS VFN 5-3/8, 1/2 (3/4, 1) ( ): Rc 3/4, 1 Conduit terminal: VP4150-TDIN terminal: VP4150-DG 1/2 Applicable cable O.D. 6 to 12 G 1/2 ( ): Rc 3/4, 1 ( ): Rc 3/4, 1 3-6-5 6 Series VP450/470 Dimensions: VP4250/4350/4450 Grommet: VP4250-G-, VP4350-GVP4450-GBottom ported 5-3/8, 1/2 (3/4, 1) Manual override 4-9 mounting

AC Servo Motor Driver (CC-Link Type ）

LG NC 1 2 3 4 5 6 LG P5D RDP SDN SDP RDN LG NC 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

AC Servo Motor Driver (CC-Link Type ）

LG NC 1 2 3 4 5 6 LG P5D RDP SDN SDP RDN LG NC 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

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6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !