MXU

port (2 on both sides) M4 x 0.7 2.5 6 8-3-5 6 Series MXU Dimensions: MXU6 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 45.5 46 37.5 14 20 10 50.5 51 42.5 14 20 15 55.5 56 47.5 24 25 20 60.5 61 52.5 24 30 25 65.5 66 57.5 34 40 30 70.5 71 62.5 34 40 35 8-3-6 7 Compact Slide Series MXU Dimensions: MXU10 MX MTS MY CY MG CX D-X 20Data (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 52.5 53

Compact

Guide MXZ Series Compact Slide MXH Series (Linear guide) Height (Overall length) Compact Guide Cylinder MGPM Series (Slide bearing) MGPL Series (Ball bushing) Compact Cylinder with Linear Guide MXZ Series (Linear guide) Guide Rod Type Compact Cylinder CQM Series (Slide bearing) Deflection Compact and Space-saving Height/at 10 mm stroke [mm] Depth Width Bore size MXZ MXH MGP CQM 12 44 56.51 53

Table of Contents - Tubing

Min. bending radius mm Note 3) Length 20m 100m Specifications Operating fluid Max. operating pressure Burst pressure Operating temperature Material inner tube Material Hardness Air, Water Note 1) 145psi (1MPa) at 68F (20C) Note 2) Refer to burst pressure characteristics chart Air: 4 to 140F (20 to 60C), Water: 32 to 140F (0 to 60C) Nylon 11 PVC (Equivalent to UL94, standard VO) Shore D 53

Electro-Pneumatic Proportional Valve Series VEF/VEP

3 (R) Port 1 (P) ARM ARP G1/2 Applicable cable O.D. 6 to 12 IR IRV 112.2 99.7 VEX 21.5 SRH 28 SRP 25 13 50 SRF 122 3 x 1/4, 3/8 VCHR ITV Flow type: VEF2131 Flow type: VEF2141, VEF3141 Pressure type: VEP3141 IC 3 x 3/8, 1/2, 3/4 45 45 2 x 1/4, 3/8, 1/2 ITVX PVQ VEF VEP VEF VEP 129 Port 1 (P) VER 154.5 Port 1 (P) Port 2(A) Port 2 (A) Port 3 (R) P 95 120.5 Plug A VEA 65 P 36 35 51 35 VY1 9 53

Clean Exhaust Filter SFE Series

Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. ow capacity L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. ow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch tting type Symbol Applicable tubing O.D.

VX

G 53 55 56 (? ! C ) ! ! D !"# Coil insulation type # 9% ,* /) 3 ? $% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

Series ZCUK is available in 5 bore diameters., CYL, FREE MOUNT, W/VACCUM *LQA, ACTUATOR, ZCU COMPACT CYLINDER, EE, 10MM ZCU DBL-ACT AUTO-SW, .29394 lb, ModelBore size (mm)Cylinder stroke (mm) 510152025304050ZC(D)UKQ1049(54)53(63)57(67)61(71)65(75)69(79)??

Model: 30 (4000 L/min), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: Rc(PT), Port Size: 3 [3/8 (2000,3000)], Accessory: C (L Bracket), Cable Connector: L (Right Angle Style 3m), Pressure Display Unit: 4 (PSI)

Model: 10 (200 L/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: N (NPT), Port Size: 1 [1/8 (1000)], Accessory: None, Cable Connector: L (Right Angle Style 3m), Pressure Display Unit: 4 (PSI)

Model: 10 (200 L/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: T (NPTF), Port Size: 1 [1/8 (1000)], Accessory: C (L Bracket), Cable Connector: L (Right Angle Style 3m)

Model: 10 (200 L/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: T (NPTF), Port Size: 1 [1/8 (1000)], Accessory: None, Cable Connector: N (w/oCable Connector)

Model: 10 (200 L/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: F [G(PF)], Port Size: 1 [1/8 (1000)], Accessory: C (L Bracket), Cable Connector: L (Right Angle Style 3m)

Model: 10 (200 L/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: F [G(PF)], Port Size: 1 [1/8 (1000)], Accessory: None, Cable Connector: N (w/oCable Connector)

Model: 20 (1500 L/min), Pressure Range: 3 (0.005~0.5MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: N (NPT), Port Size: 2 [1/4 (1000,2000,3000)], Accessory: C (L Bracket), Cable Connector: L (Right Angle Style 3m), Pressure Display Unit: 4 (PSI)

Model: 20 (1500 L/min), Pressure Range: 1 (0.005~0.1MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: Rc(PT), Port Size: 3 [3/8 (2000,3000)], Accessory: None, Cable Connector: L (Right Angle Style 3m)

Model: 20 (1500 L/min), Pressure Range: 1 (0.005~0.1MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: Rc(PT), Port Size: 3 [3/8 (2000,3000)], Accessory: None, Cable Connector: N (w/oCable Connector)

Model: 30 (4000 L/min), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: N (NPT), Port Size: 4 [1/2 (3000)], Accessory: C (L Bracket), Cable Connector: L (Right Angle Style 3m)

Model: 20 (1500 L/min), Pressure Range: 1 (0.005~0.1MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: Rc(PT), Port Size: 2 [1/4 (1000,2000,3000)], Accessory: None, Cable Connector: N (w/oCable Connector)

Model: 20 (1500 L/min), Pressure Range: 1 (0.005~0.1MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: Rc(PT), Port Size: 2 [1/4 (1000,2000,3000)], Accessory: None, Cable Connector: S (Straight Style 3m)

Model: 10 (200 L/min [ANR]), Pressure Range: 1 (0.005~0.1MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: N (NPT), Port Size: 1 [1/8 (1000)], Accessory: None, Cable Connector: L (Right Angle Style 3m), Pressure Display Unit: 4 (PSI)