Digital Flow Switch for Deionized Water and Chemicals Series PF2D

v Deionized water v Sodium hydroxide Ultra deionized water v Toluene v Hydrofluoric acid Concentration 50% or less v Sulfuric acid (except fuming sulfuric acid) Concentration 20% or less v Phosphoric acid Concentration 30% or less v Note 1) The material and fluid compatibility check list provides reference values as a guide only.

With Factory Installed

B B B p AW3001 220.5 213.5 219.5 240.5 AW4001 272 265 271 292 IN-OUT reversal mounting "'" DimenSions except B are same as the standard type.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

NPN) C76 5 V IC Reed switch Solid state switch Grommet B54 C73 C73C B59W H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA H7NF 100 V, 200 V 100 V 12 V Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color) Grommet G59 G5P K59 G59W G5PW K59W G5BA G59F 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC Relay, PLC 5 V, 12 V Diagnostic

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

7. * The seal kit includes 2 cushion seals, 1 rod seal, 1 piston seal, and 2 tube gaskets. 1.7-27 Series MBlQ Basic/(B) G G Cushion valve W V Port 2-Rc(PT)P MM D E MB Effective thread 2 X 4-J lC lB MA A K F N N S + Stroke H ZZ + Stroke (mm) Stroke range Width across flats Bore (mm) Effective thread length A D Ee11 F N G P MA S MB V J W K H ZZ MM lC lB 32 40 50 63 80 100 22 30 35 35 40 40

ITVH

SRF ITV +24 V +24 V Output power Output power IC 0 V 0 V Control/Input power Control/Input power ITVH ITVH 24 V +24 V ITVX 4. Each product needs to be powered by one power supply unit.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

(Values at the initial period) VG JIS Symbol VP S070 VQ Model Valve model VKF VS3145 VS3135 P A C [dm3(sb Cv b Cv b Cv b Cv Flow characteristics 6.1 7.3 9.0 0.3 0.2 0.2 1.6 1.8 2.4 0.4 0.2 0.3 1.5 1.8 2.3 1/4 3/8 1/2 3/4 6.1 7.2 9.0 0.27 0.21 4.8 5.1 16 15 0.34 0.46 4.1 4.5 18 20 VZ VS AC DC 30 or less

Profile Design ISO/VDMA Air Cylinder Series CP95

e Order No. b d f l1 c a 32 M10x1.25 GKM10-20 10 40 10 52 20 20 40 M12x1.25 GKM12-24 12 48 12 62 24 24 50/63 M16x1.5 GKM16-32 16 64 16 83 32 32 80/100 M20x1.5 GKM20-40 20 80 20 105 40 40 Rod end nut (standard equipment) 30 d D C H B Bore size (mm) Order No.

ø32, ø40, ø50, ø63 Series CVQM Compact Cylinder with Solenoid Valve/ Guide Rod Type

Relay, PLC Yes Grommet 24 V 3-wire (NPN) Diagnostic indication 2-color indication 5 V, 12V IC circuit 3-wire (PNP) 12 V 2-wire A96 A93 A90 A96V A93V A90V 5 V IC circuit 3-wire (NPN equivalent) Yes 100 V 12 V Grommet Relay, PLC 24 V 2-wire 5 V, 12 V IC circuit 100 V or less Solid state auto switches marked with are produced upon receipt of order.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Nil M5 x 0.8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 TN NPT1/8 NPT1/8 NPT1/8 NPT1/4 TF G1/8 G1/8 G1/8 G1/4 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 d b C H B H 4 8 8 10 d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 B 14 26 32 41 C 16.2 30 37 47.3 Part number SNJ-016B SN-020B SN-032B SN-040B Applicable bore size (mm) 15 20 25, 32 40 161 Specific Product Precautions Be sure to read before handling.

AC

Unit Series AC 21 to 41 How To Order V D AC 31 B N 03 8 -X2217 Z Y Air Combination Unit With External Epoxy Coating, Stainless Fasteners Body Size Symbol 21 31 41 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Regulator Handle Orientation Symbol Nil Y Description Downward Handle Upward Handle Model Combination Symbol Nil A B Bowl Description Metal Bowl Metal Bowl with Sight

Series AC Epoxy Coated F.R.L.

Unit Series AC 21 to 41 How To Order V D AC 31 B N 03 8 -X2217 Z Y Air Combination Unit With External Epoxy Coating, Stainless Fasteners Body Size Symbol 21 31 41 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Regulator Handle Orientation Symbol Nil Y Description Downward Handle Upward Handle Model Combination Symbol Nil A B Bowl Description Metal Bowl Metal Bowl with Sight

CJP

CJP B 15 H4 10 Rod end thread Pin cylinder B With thread Without thread Mounting Panel mounting Plug mounting B S Hose nipple (Applicable to panel mounting style) Bore size H4 H6 Tube size 4/2.5 Tube size 6/4 6 10 15 6mm 10mm 15mm Stroke (mm) 6, 10, 15 5, 10, 5 Specifications Single acting spring return Action Plug Mounting Style Panel Mounting Style 0.7MPa Max. operating pressure 6 0.2MPa

Rotary Actuator NCRA1 Series Single Rack and Pinion

RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !

PFA/PFW

These vortexes are stable under certain conditions, and their frequency is proportional to the flow velocity, resulting in the following formula. f = k x v f: Frequency of vortexes, v: Flow velocity, k: Proportional constant (determined by the vortex generator's dimensions, shape, etc.) Therefore, the flow rate can be measured by detecting this frequency.

NCRAI seies

RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !

EX180-SDN3_4_5_6_eng

Dual power supplies B.

EX260-SEN_eng

Designation Description Fieldbus interface connector (BUS IN) EtherNet/IPTM connection PORT 1 (M12 4-pin socket, D-coded) 4 2 SI24 V +24 V for SI unit operation 2 1 SV24 V +24 V for solenoid valve 2 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 4-pin plug, A-coded) 3 1 3 SI0 V 0 V for SI unit operation MS NS L/A1 L/A2 PWR(V) 4 Ground

EX260-SEC-A_eng

Designation Description 2 Fieldbus interface connector (BUS IN) EtherCAT connection (M12 4-pole socket, D-coded) 4 5 2 *1: Blinking pattern SV24 V +24 V for solenoid valve 1 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 5-pole plug, A-coded) 3 2 SV0 V 0 V for solenoid valve 200 ms 200 ms 1 SI24 V +24 V for SI unit operation 3 4 Ground

EXxx-OMV0018_ENG

Mounting hole Mounting hole for connection to the valve manifold 7 4 5 2 SV0 V 0 V for solenoid valve 2 OFF SI unit operating voltage is not supplied. Accessories 3 SI24 V +24 V for SI unit operation Green ON Operating normally. ST Warning: WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

FT FD B Port 4-FD CS1 32 40 50 63 80 100 up to 500 157 149 79 32 64 10 7 50 up to 500 171 158 90 36 72 10 9 55 up to 600 188 176 110 45 90 12 9 70 FY B up to 600 188 176 120 50 100 12 9 80 up to 750 238 220 153 63 126 16 12 100 FT FX up to 750 238 220 178 75 150 16 14 120 ZZ + Stroke FZ Single clevis(C)/Locking at head end (Hl) Wl Hl/ Rl (mm) Port Cushion valve Stroke range Bore size (mm