3

MM M 4.5 (2 locations) M4 x 0.7 (4 locations) (Special cap bolt) FX FZ Arm 5.5 FV (mm) Rod Flange M MM Model Rod state 10 mm Clamp stroke 20 mm 30 mm 10 mm Clamp stroke 20 mm 30 mm Head Flange DModel (mm) Retracted Extended Retracted Extended 23 40.5 26 43.5 33 60.5 36 63.5 17 34.5 17 34.5 43 80.5 46 83.5 27 54.5 27 54.5 37 74.5 37 74.5 MKF12-Z FV FX FZ 25 30 45 45 55 55 MKG12-Z MKG16-Z -

CG1

7 7 8 47 52 53 63.5 75.5 75.5 95 95 110 (118) 130 (138) +l 45 (53) 22 38.5 45 3.5 115.5 (123.5) 137.5 (145.5) +l 45 (53) 25 3.5 4 5 5 5 7 6.6 117.5 (125.5) 139.5 (147.5) +l 51 (60) 30 6.6 9 11 11 14 54.5 16.5 22 22 8.5 11 13 14 16 135 (144) 155 (164) +l 55 (67) 40 70.5 4.5 17.5 157.5 (169.5) 177.5 (189.5) +l CJ1 55 (67) 45 82.5 4.5 17.5 20 20 106 157.5 (169.5) 177.5 (189.5) +l 60 (74) 55

Table of Contents

Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 Valve 30093 NBR 30073 30053 30063 30083 r O-ring 9 x 7 x 1 JIS B 2401P-7 NBR CA40-1601 CA50-1602 30066 t Dimensions AQ1500/1510 AQ2000/3000/5000 3-port size (Mounting hole) 3-port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size AQ2000 Model Port size 1 8 1 4 M5 x 0.8 AQ1500 23 20 14 3 12.5 12 15 5.5 6.5 3.1 45 40 10 45 , 3 8 1 4

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

24 27 30 8 2 +0.2 +0.1 17 26H9 +0.052 depth 3 0 30 40 21 4-M5 x 0.8 thread depth 6 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 30.3 45 20 O S 16 4.5 4.5 23 10 M5 x 0.8 (Finger operating port) 5 MHW2-25D1 Right angle finger type 6.45 5.5 37 18 12 6 15 16 4-M5 x 0.8 (Thread for mounting attachment) 30 45 21 12-10-20 20 180 Angular

MHY2/MHW2

24 27 8 2 20 +0.2 +0.1 17 26H9 +0.052 Depth 3 0 30 21 40 4-M5 X 0.8 Depth 6 (Thread for mounting attachment) M5 X 0.8 (Finger closing port) Auto switch mounting groove position 30.3 45 16 O S 4.5 4.5 23 10 M5 X 0.8 (Finger opening port) 5 6.45 MHW2-25D1 5.5 Right angle finger 37 18 12 6 15 16 4-M5 X 0.8 (Thread for mounting attachment) 30 21 45 MHW2-25D.SMHW2, #2 MHW2-25D1.SMHW2, #6 2.8-

MK

Note 3) When the rod is extended, the clamp stroke and rotary stroke are added to the appropriate dimensions. 4.1-18 Rotary Clamp Cylinder/Heavy Duty Series MK2 32, 40, 50, 63 MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B Rear flange With arm Model E D C B G A C F A B F G D E Model ML1C 39 46 58 57.5 45 45 65 65 20 20 22 22 67 67 88 88 18 18 22 22 48 54 67 80 5.5 5.5 6.6 9 8 8 9 9 65 72 89 108 25 25 40

MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

VZ100/300/500

DXT201-19-1A Note With screw (For VZ52) Refer to pages 4-6-34 to 4-6-45 for manifold use.

Modular Type Filter Regulator Series AW

45 Symbol Polycarbonate Option Standard Relieving type 0.40 0.32 0.72 0.75 Note 1) Set the inlet pressure 0.05MPa or higher than the set pressure.

Shock Absorbers and Rate Controls

90,000 t5,000 25 45 2,700 15.5 0Eill3.0tllx3.5I.50 3.5 12,170 35,000 5,7i0,000 t5,000 15 45 2,700 20.0 0tffl3.0lllx5 1.50 5.0 t2-170 50,000 8,260,000 15,000 t6 45 1,700 24.0 0ff{I3.011x5.51.50 6.5 l2.tI0 65,00{ 10,750,000i5,000 2,700 30.0 0tl{l4.0lllx2 2.00 2.0 r2.170 34,000 r3,300.00025,000 50 0 ) 4,800 33.0 0tl{14.0l|l4 2.00 4.0 l2-170 68,000 16,000.000 25,000 35 65 4,800 40.0 0fftt4.0itx5

LEC-OM02904

(1) (1) (1) 46 (1) (1) (1) 47 50 1 (1) (1) (1) 51 2 (1) (1) (1) 52 82 /1 (2) 8A USB 8E USB 888 1. 30 2. 8 2 8 8.2 (25) 30 (30) (45) (46) 1(50) 2(51) OFFONCPU 8.1 (ALM) No.

Vacuum

Selection Graph 5: Adsorolion resoonse time 90 63 45 *, 27 < E ' " E 9 9 . 0 E --i 6.3 I ;4.s x \ ! 1 2 7 Eiector size determination by calculation: '1 .

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LQ1L33-F LQ1L32-F LQ1L31-F LQ1L24-F LQ1L23-F LQ1L22-F LQ1L21-F VC 18.5 19.5 1/8" 16.5 14 15 27 VDW 21.5 22.5 1/4" L2 M 1/4 VQ 21.5 1/4" 23 23 VX2 17 20 35 (E) H 25 3/8" 25 L1 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Class 2 to 5 25 VX3 3/8" 29 28 21 24 45

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

wire length) 60<61> 49<52.5> R1 R2 R1 R2 P P Cover diameter 1.5 Cross section 0.23mm2 < >: AC < >: AC 1.12-39 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 2 position single 0 1 01 02 Grommet(G): VQZ215 (R)lGl 300 84.5 (Lead wire length) 2-4.5Mounting holes 54.5 24 9 9 R4 13 A 4 B 2 15 34 SMC Cover diameter 1.6 Cross section 0.34mm2 R2 R1 5 1 P 3 Manual override 56 48 4 (54.5) 51 45

ZX

Other caution Caution It might not be possible to successfully pick a workpiece if a picking nozzle or a picking pad that is out of the applicable range is used. 13-2-45 45 Vacuum pad connection V port Series ZX Valve Unit: Type K1 Pilot exhaust PE port Vacuum switch (ZSE2) Vacuum switch (ZSE3) Configuration and combination Valve unit (K1) + Vacuum switch valve air supply PS port Vacuum supply

Vacuum

Selection Graph 5: Adsorolion resoonse time 90 63 45 *, 27 < E ' " E 9 9 . 0 E --i 6.3 I ;4.s x \ ! 1 2 7 Eiector size determination by calculation: '1 .

Pin Clamp Cylinders

.: 9.5 or more) Mounting surface 770.1 D 300.05 20 15 15 Port side (183) Clamp arm position 30 7.5 10.5 A Same as the port side B 90 from the port side C 180 from the port side D 270 from the port side 2 x 6H7 Depth 10 4 x M8 x 1.25 Depth 12 2 x Rc1/8 D Clamp arm Port side C A 45 49.5 B Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number

Shot Pin Cylinder

F7 Coil scraper 60 0.05 45 10 15 78 67 48 11 152 + Stroke 115 A A 60 0.03 9 30 30 Protective plate M12 connector (4 pin) 2 x 10 F7 depth 20 60 108 4 x M10 depth 20 (Helisert) 90 0 45 G, NPT1/4 19 15 15 Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Max. 12 (Retraction end adjuster) 5H9 ( ) depth 5 +0.030 0 GA 6 HA 5H9 ( ) depth 5 +0.030 0 NN x M6 x 1 thread depth 12 A B 1 24 5.1 5.1 10.5 9.5 10.5 A B G (NN 1) x H H 21 9 21 9 A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18

3 Port Air Operated Valve

40 (45) 22.5 VZA (50) VTA 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port VGA (Distance between ports) VPA VPA 1P 3R 32 3 NO 7 VPA3 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 For vacuum/VPA542V-1(-F) 02 03 A B 1/4, 3/8 2(A) port 41.1 2 x 4.2 (For mounting) 26 NC 2A 3.5 (1.6) 31 25.6 91 (9) 2 x 4.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5