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200 Series/Variation Rotary table Series MSU Standard MSU 1.7-1 SMSUl MDSU With auto switch Rotary table Series MSQ MSQ Standard 1.6-1 SMSQl MSQ With auto switch MSQR With shock absorber 5.5-6 World Wide QS\E Support...

To minimize the voltage drop, use 100/200 V AC and 24 V DC wires with the largest sectional areas possible and keep the wiring length as short as possible. 5. The 100/200 V AC wire must not be bundled with or arranged in close proximity with the input/output lines of control terminals or encoder signal lines. If possible, keep a 100 mm or larger distance from such lines. 6.

Closed center SQ1000 SQ1331 33 or less 0.16 0.26 0.58 0.15 0.20 0.64 25 or less Rubber seal 100 SQ1430 26 or less 0.14 0.14 0.60 0.14 0.12 0.58 20 or less Metal seal 100 Exhaust center SQ1431 33 or less 0.19 0.20 0.80 0.15 0.20 0.64 25 or less Rubber seal 100 SQ1530 26 or less 0.14 0.14 0.63 0.14 0.12 0.62 20 or less Metal seal 100 Pressure center Courtesy of Steven Engineering, Inc.-230

. -9No.EX-OMX1001 Definition and terminology Terms Meaning 100 100BASE-TX Standard of LAN transmission line with communication speed of 100 Mbps. A The signal from the analogue input device is converted to digital, and displayed in decimal and hexadecimal. These hexadecimal and decimal values are also outputted to the analogue output device.

46 - DC24VSVON a) b) c) d) e) 47 - D 100 154 1. 2. 3. 4. 5. 6. 7. 8. -10603585% 48 - 155 5 156 49 - 16/ 161 / UL1310Class2 162 ON 50 - 5 () 51 - 163 50mm 164 () 52 - 165 166 D 100 167 53 - Revision history No.JXC-OMT0030CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are

Ol5 (M5) o.z 0r5 -oz -Body ported {wjth bracket} NVKF332Y {Low watlaqe: 2WDC) NVKF332V {Vacuum) l Ton-100 PSI (-100 KPa-o.7 MPa) NVKF332W tLow wattaoe + Vacuuml 0.181 lbs (80 s0 NVKF333 0-100 PSI {0-0.7 MPa) NVKF333Y ilow waltaqe: 2WDC) NVKF333V (Vacuum) 1 Torr"100 PSI (-100 KPa-0.7 MPa) NVKF333W ilow wattaoe + Vacuuml 2 position srngre solenoid (for maniiold) 0r5 NVKF334 0 ' 1 0 0 P S I

Supply: PneuAlpha accepts 100-240 VAC or 24 VDC Power Supply for use anywhere in the World. High Current Relay Outputs: Switch currents up to 10 amps with PneuAlphas heavy duty relays. Transistor Outputs: Fast switching, long life Outputs. 100-Hr Capacitor Backup for memory and RTC: PneuAlpha can retain its memory for 100 hours after a power outage.

Possible to use in vacuum to 100 kPa Applicable Tubing Tubing material FEP, PFA, Nylon, Soft nylon, Polyurethane Tubing O.D. 4, 6, 8, 10, 12, 16 Specifications Fluid Air, Water 1 Operating pressure range 2 100 kPa to 1 MPa Proof pressure (at 23C) 3 MPa Ambient and fluid temperature 5 to 60C, Water: 0 to 40C (No freezing) Thread Mounting section JIS B 0203 (Taper thread for piping) JIS B 0205

Selects the time to hold the input signal. 15 ms 2: 100 ms 3: 200 ms 1: True (Auto) Error is automatically cleared when the short circuit is fixed.

CN1IF(CONT) 18 - (LEC)(LEC) 5.4 CN2PC/TB (LEC)(LEC-T1-3*G*)(LEC-W2) CN2SWOFF(LEC)(LEC) (LEC-T1-3*G*)(LEC-W2) (1) CN2 (3m) (2) (USB) 120.3 120.3 mm mm 200 200 mm/s mm/s USB (A-miniB type) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 () 9.

Internal pilot manifold L: Dimensions n: Stations External pilot manifold L: Dimensions n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123 112.5 91 16 4 135.5 125 101.5 17 5 135.5 125 112 12 6 148 137.5 122.5 13 7 160.5 150

When 1 digit = 1 kPa, the pressure is given with an increment of Digit (Min. setting unit) 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

Only air, N2, are applicable. [ 25] 25 L/min (PFMC7501) End stop position Set value [P_1] [ H_1] Hysteresis of OUT1 [ 50] 50 L/min (PFMC7102) Hysteresis [H_1] 225o [ 100] 100 L/min (PFMC7202) Flow [L/min] Do not use the product in a place where static electricity is a problem.

g 1 0.927= 20L/min 3 420 (1 atm)65R.H. 0 (1 atm) 4 mm PVC 1.14 mm AWG23 0.72 mm -36No.PF-OMO0007CN () a(L/min) b(L/min) PF2A710 A 1 10 PF2A750 B 5 50 PF2A711 C 10 100 PF2A721 D 20 200 PF2A751 E 50 500 -37No.PF-OMO0007CN PF2A710/750 PF2A711/721/751 -38No.PF-OMO0007CN ()ZS-37-A (L )ZS-37-B ZS-29-T -39No.PF-OMO0007CN NPN(1 ) + (15 V) NPN(1 ) + (420 mA) PNP(1 ) + (15 V) PNP(1 )

Metric sizes 6 8 10 12 ASS Flow rate l/min (ANR) Controlled 100 180 230 260 390 460 660 790 920 1580 1710 ASR (free) flow Effective area mm2 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are at a pressure of 0.5MPa, and temperature of 20C.

0.3MPa 8 SUP = 0.5MPa 0.2MPa 0.2 0.2MPa SUP = 0.5MPa 6 0.4MPa 50 4 0.1 0.3MPa 2 0.2MPa 00 5 10 00 5 10 00 50 100 Flow rate (l/min) Air consumption (l/min [ANR]) Operating cycle (Hz) PAP3313-T11: Flow rate characteristics (5Hz)* PAP3313-T11: Flow rate characteristics (2.5Hz)* PAP3310-T11: Flow rate characteristics 0.5 0.5 0.5 Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.5MPa

kPa200 kPa) (41 ) ON (41 ) ON(OFF) (34 ) ON (NPN/PNP) (100 kPa200 kPa) (27 ) ISA3 2 -61No.PS-OMR0001CN-J 5 (100 kPa 200 kPa) 80 kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, (14 kPa ) OFF 220 kPa () -20 kPa220 kPa (-20 kPa) [ON/OFF] [] [kPa] () -62No.PS-OMR0001CN-J Revision history A B C D E F [2018 3 ] G [2018 6 ] H [2019 9 ] I [2021 10 ] J [2022 6 ] 4-14-1, Sotokanda, Chiyoda-ku

400 200 300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure

Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.