30 Pressure Control Equipment Air Preparation Equipment One element included Pressure gauge FGF S A E B D 1 20 005 Symbol Pressure gauge Without pressure gauge (with plug) Nil Three, five elements included FGF S With pressure gauge (1 MPa: Brass for wetted parts) 3 005 A 40 E D G Bag filter Option Material Option Applicable model FGF3 FGF5 FGF1 None Vessel material Applicable model FGF3 FGF5
Solid state switch Model D-F8 Series Variations Bore size (mm) Rod end configuration Stroke (mm) Clean room series 4 6 8 10 15 20 Action Series Auto switch Double acting Male thread Without thread Nil 4 Single acting (spring return) Double acting 6 Single acting (spring return) CUJ Solid state switch D-F8 D-F9 Female thread Double acting 8 Male thread Single acting (spring return) Double
Pressure Control Equipment Air Preparation Equipment One element included Pressure gauge FGF S A E B D 1 20 005 Symbol Pressure gauge Without pressure gauge (with plug) Nil Three, five elements included FGF S With pressure gauge (1 MPa: Brass for wetted parts) 3 005 A 40 E D G Bag filter Option Material Option Applicable model FGF3 FGF5 FGF1 None Vessel material Applicable model FGF3 FGF5
SI (24V) (XD1) (24V) (XD2) M4 (SCRJ) 1 (XF1) (SCRJ) 2 (XF2) . 6-5 EX245-SPN1A 43 No.EX-OMW0014CN-A (24V) (XD1) (24V) (XD2) M4 (RJ45) 1 (XF1) (RJ45) 2 (XF2) . 6-6 EX245-SPN2A 44 No.EX-OMW0014CN-A 7/8 (5 ,) (XD1) 7/8 (5 ,) (XD2) M4 M12 (4 ,,D code) 1 (XF1) M12 (4 ,,D code) 2 (XF2) . 6-7 EX245-SPN3A 45 No.EX-OMW0014CN-A 7.
(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.
hole: G1/2 LQ LVN Manual override (Non-locking) TI/ TIL Pilot port PA PAX PB Main port Main port Rc Pilot port Rc A B C D E F H J K L Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 229.5 247 270 197 214.5 237.5 55 63 74 17-4-25 6 Series VNC Flange Type Port size: 32F, 40F, 50F Electrical entry hole
M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13
TSJ Tube Swage Joint Swagelok URJ Union Ring Joint VCR ONOFF () (35 ) ON OFF 35 76 76 ON OFF Hysteresis / () () 25[]ON-OFF () -12No.PS-OMU0008CN-D NPN () () ()()() () ON ON 0 (1k1MA/D 5 V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005 V ) 35 ON-OFF ON () (P1LP1H)ON (35 ) () digit () 0 -13No.PS-OMU0008CN-D () SI ONOFF ON-OFF / ON/OFF 90% () () () () ON -14No.PS-OMU0008CN-D
, D-F8P, D-F8B Auto Switch Specifications Grommet D-F8P D-F8N D-F8B Auto switch part no.
, D-F8P, D-F8B Auto Switch Specifications Grommet D-F8P D-F8N D-F8B Auto switch part no.
E s .9 6 5 o 25 50 75 Inpul siqnal (%F.s.) l 25 50 75 Inpul signal (%F.S.)
No. 9.5 9.5 1 3 5 ITV00 EXH SUP OUT PWR PWR PWR PWR ITV009 ERR ERR ERR ERR ATM VAC Note) Stations are counted starting from the D side. 50 56 D side U side 1 2 stations 50 9 3 (8) Dimensions in inch are noted in parentheses. 6.5 6.5 1 1 82 89.5 SUP, VACzport 3 3 (6, 1/4") 40 40 EXH, ATMcport 25 25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions
.() -0.100 1.000[MPa]F.S.=1.000(-0.100)=1.100[MPa] (1F.S.=1.1000.01=0.011[MPa]) R.D. 1.000[MPa]5R.D.1.000[MPa]50.05[MPa] 0.800[MPa]5R.D.0.800[MPa]50.04[MPa] ON/OFF () (34 ) ON OFF 34 75 75 ON OFF Hysteresis / () () 25[]ON-OFF () -11No.PS-OMU0005CN-C NPN () () ()()( ) () ON ON 0 (1k1MA/D 5V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005V ) 34 ON-OFF ON ( )(P1L~P1H) ON (34 ) () "digit
A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Cable type Nil Robotic cable (Flexible cable) S Standard cable Cable color Connector D terminal no.
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
Fittings & Tubing Air Cylinders Rotary Actuators How to Order Port thread type Bore size Symbol Type 6 to 16 M thread Nil Clean series 20, 25 Rc 13 Vacuum suction type (Special treatment on guide) TN 20, 25 NPT TF 20, 25 G MXS 12 13 50 M9N 12 22 50 M9N MXS Number of auto switches Copper, fluorine and silicone-free + Low particle generation Nil 2 pcs.
direction as solenoid Type S42 Manifold Grommet: G DIN terminal: D 49.5 11.5 8.5 L1 L2 5 P = 19 14 24.5 (mounting holes) 49.5 11.5 8.5 2 18.5 R P R P 11.5 18 37 11.5 18 37 67.5 59 Max .10 71.5 Pg.7 Manual override (non-locking) 4Rc(PT) 1/8 (ports P, R) 18 25 31 53.5 Approx. 300 (lead wire length) Light (DZ type only) 4Rc(PT) 1/8 (ports P, R) 75.5 83 Manual override (non-locking) nRc(PT)
min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_1] OUT1 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [ CoL] OUT1 [SoG] ONOFF [ oU2] OUT2 2 [ HYS] [ 2ot] OUT2 2 [ 2_P] [ 250] 250 L/min(PFMC7501) [ P_2] OUT2 2 [ 500] 500 L/min(PFMC7102) 37 [F 2] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_2] OUT2 2 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [F 3] [ rES] [ 1. 0] 1
34 62.5 18 13.6 2.7 10 19 6 PF3W540S 142 71 75.25(Max. 81) 94.5 44 79 28 16.8 2.7 10 28 7 S T PF3W504S 56.5 22 PF3W520S 60.5 22 PF3W540S 78 30 -44No.PF-OMN0009CN-F PF3W504/520/540(+) A AA D K S PF3W504S--T 115 50 81.2 69.5 67.5 PF3W520S--T 123 54 85.2 73.5 71.5 PF3W540S--T 153 71 105.5 90 89 -45No.PF-OMN0009CN-F PF3W511-U25/PF3W521-U30(PVC ) 2X A B D E F J K L N P Q 25 A 154 46 77