ZQ-OM01401

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

IDX-OM-W032

V C11 PE P C11 FM PRS P TDR MC PE FOR OPTION V V IDFA Series 11-6 11 3 IDX-OM-W032 12 V 12 V V 12-2 12-1 1. 1 2 2. 3.

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

Guide Table Series MGF ø40, ø63, ø100 1

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire 3-wire (NPN) 3-wire (PNP) Relay, PLC IC circuit 24 V Grommet 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Water resistant (2-color indication) Y7BA Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Solid state switches marked with are produced upon

Multistage Ejector (N)ZL Series

54 125 Label 188 61 P Port exhaust (N)ZL212P V Vacuum pressure gauge Exhaust with silencer Exhaust port 1 25 With vacuum pressure gauge (N)ZL212-G P V Exhaust with silencer Vacuum adapter 1/8 7 With vacuum adapter (N)ZL212-GN P V Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch (N)ZL212-E P V RESETSET Approx. 500 Section A (L: approx. 2900) 2-4.4 Mounting hole

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

HEC_W-E

(Ex. : 25.0 C Function : Sets target temperature P V 2 3 . 0 C # 1 S V < 2 5 . 0 C M O D E 3. Control Operation Setting range : 0,1,2,3,4 Indicated content : Number and description of control operation mode.

Booster Regulator/Air Tank

V 10 T = t x = 89 x = 89 (s).

One-touch Fittings Series KQ2

M5 A D1 L1 D2 M L2 Part No.

ø32, ø40, ø50, ø63 Series CVQM Compact Cylinder with Solenoid Valve/ Guide Rod Type

Relay, PLC Yes Grommet 24 V 3-wire (NPN) Diagnostic indication 2-color indication 5 V, 12V IC circuit 3-wire (PNP) 12 V 2-wire A96 A93 A90 A96V A93V A90V 5 V IC circuit 3-wire (NPN equivalent) Yes 100 V 12 V Grommet Relay, PLC 24 V 2-wire 5 V, 12 V IC circuit 100 V or less Solid state auto switches marked with are produced upon receipt of order.

VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

XLAQ/XLDQ

I G L H A V V M A C U U Without indicator Flange side e Temperature specifications/Heater r Auto switch type Applicable flange size 25 40 50 Symbol Nil Auto switch part no.

HRX-OM-X037

Indication Item Output Setting, selection and display CH1 circulating fluid temperature 0C100C: 010 V 2 CH1 electric conductivity 0.150.0 S/cm: 0.0210.0 V (1) Analog Output 1 Analog output signal 1 1 CH2 circulating fluid temperature 0C100C: 010 V CH2 electric conductivity 0.150.0 S/cm: 0.0210.0 V CH1 circulating fluid temperature 0C100C: 010 V 2 CH1 electric conductivity 0.150.0 S/cm:

MGP

X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5 25 53.5 37.5 11.5 M6 X 1.0 M6

HRX-OM-W002

M V 1 1 [ ] 2 WH 18AWG BK 18AWG BK 9 9 2 V G 3 U U [ ] 1 RD 18AWG BK 5 5 1 U (CN3) PM PUMP 7 7 Option T1 6 6 4 4 3 3 2 2 1 1 PM PUMP 2/2 PM PUMP (CN1) 16AWG G/Y G4 [ ] V G PM 16AWG G/Y G4 [ ] G U DC Power Supply Standard BL DCPS [ ] 18AWG G/Y G2 5 5 Condenser 18AWG BK 1 1 3 3 3 3 18AWG BK 3 3 1 1 1 1 C3 (CN51) (CN1) (CN6) Compressor CM CM AC Power Board 3 1 PCB1 3 3 [ ] TH 14AWG BK 14AWG

IDX-OM-W023

-5 13 3 IDX-OM-W023 13 T IDU15E1-10-T IDU15E1-20/23-T PE 1 3 2 N L N L PE 1 2 3 TB TB MC TDR MC TDR ILS ILS MC TDR MC TDR PTC OLR MC PTC MC OLR CM CM MC C01 C02 MC CR C11 FM1 CR C11 PRS FM1 PRS P C12 FM2 P C12 TDR MC FM2 TDR MC IDU Series 13-5 13 4 IDX-OM-W023 14 V 14 V V IDU8E15E1-23 14-1 1. 1 2 2. 3.

KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16

HRX-OM-Y098

V (2) Analog Output 2 Analog output signal 2 CH2 circulating fluid temperature 0C100C: 010 V 1 CH2 electric conductivity 0.150.0 S/cm: 0.0210.0 V 2: In the case of option D1 "CH1 with electrical conductivity control".

IDX-OM-W014

14 V V IDU3E/4E/6E-23 14-1 1.1 2 2. 3.

IDX-OM-W053

GFCI EDV 14 3 15 V 15 V V 14-2 15-1 1. 1 2 2. 3.