SMC Corporation of America
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Separate Controller Bar Type Ionizer IZT40/41/42 Series High-voltage power supply module High-voltage power supply module Controller How to Order Bar + High-voltage power supply module + Controller Dual AC type AC type Standard type q D 3 6H R F IZT 40 34 34 1 U IZT 42 D 1 6H R 3 F U w e r t y u i o !0 !1 !

lead wire LO L type connector w/o plug and lead wire LN L type connector with plug and pins M M type connector w/ plug and 300 mm lead wire MO M type connector w/o plug and lead wire MN M type connector w/ plug and pins Air Operated Valve DXT474-A Valve Manifold Assembly DXT475 A * * * * * * 02 * Valve Actuation Type Sup.

Description Note Material Description AS2000 AS3000 Aluminum alloy Body Chromated q Zinc alloy Aluminum alloy SPC Cap Nickel plated Body q w Brass Brass Zinc alloy Handle Chromated(Red painted) Needle w e Brass Brass Spring steel Ring Zinc chromated Lock nut e r Zinc alloy Lock nut Chromated Valve core r t Aluminum alloy Needle Chromated Aluminum alloy (Red painted) Aluminum alloy (Red

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Thereafter F1 = F2: See figure w. 4 (A) 1 (P) 2 (B) 3 (R2) Inw, port 3(R) is half open. 705 Series VER2000/V4000 How to Find the Flow Rate Air temperature of 20C CurrentPressure Characteristics Selecting Electro-pneumatic Proportional Valve The response behavior of an electro-pneumatic proportional valve is affected by the load capacity.

Differential pressure indication switch r O-ring Applicable Applicable q O-ring w O-ring e O-ring Port size order no. hydraulic hydraulic order no. order no. order no.

P Part in contact with fluid A part that comes into physical contact with the fluid. Pressure characteristics The amount of variation in the analogue output or display value when the supply pressure is changed. Proof pressure The pressure beyond which the product will be damaged. R Rated flow range The flow range within which the product will meet all published specifications.

I W h s i r l Black o-Y69A.Y6gB.O-Y7PV D-Y598.Y698/2 wire system l " ' . . r 6 7 7.5 I 8.5 1--&9p9!9q E!

6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

6 r t !3 w e q RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Description Material Surface treatment ZR t NBR, Silicone rubber, Urethane rubber, Fluoro rubber, EPR u o Pad q ZM r e w Adapter plate Aluminum w ZH w Hard chrome plated Piston rod Carbon steel e w Spring Stainless steel r ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

The used of turbine oil at temperatures lower than 0C leads to increased viscosity and may cause the valve to malfunction. d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases. 2 thread to be left exposed Clamping Torque Switching

For type W, only DC voltage is available. Note) AC-type models that are CE-compliant have DIN terminals only.

Construction Side ported Bottom ported t y w u q q w u y t 3(R) (3-port only) 3(R) (3-port only) Non-actuated Non-actuated !4 i !0 2(A) 1(P) r o e !3 !1 !2 !3 e o r !0 i !1 !2 2(A) 1(P) Actuated Actuated 2(A) 1(P) 2(A) 1(P) Component Parts No. Description Material Note 1 Valve PBT 2 Valve sheet A PBT 3 Valve sheet B PBT 4 Valve sheet C PBT No.

Base, Body Seal material Aluminum NBR, FKM, EPDM LQ Port A Port A LVN Port P TI/ TIL Port R Energized open Energized closed PA PAX PB Model Manifold base model Port A Rc Port P Rc Port R Rc VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations Manifold Manifold stations Manifold B mount 2 to 10 stations 1 8 1 4 1 8 1 4 1 4 1 4 17-3-105 The VX series will be revised shortly.

(SUP), R (EXH) 2 to 20 stations Stations Base Location Output port Porting specifications Side Direction M5 x 0.8 Port size 1, 2, 3 port Note 1) 10-V114(A) and 10-V124(A) cannot be mounted on the same manifold.

R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18