Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: F (G), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 03 (3/8), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket

Pressure Switch/Reed Switch Type

(The SI unit type is provided for use in Japan.) + Voltage AC/DC 48 V 100 V Nil S None With seal w w Seal 50 mA 40 mA 20 mA Max. operating current and range Note 2) + Nil 6 Note1) Set pressure range 0.1 to 0.4 MPa 0.1 to 0.6 MPa a Semi-standard + Nil L Z 0.5 m 3 m 5 m Lead wire length q e b Series IS10 + Scale plate pressure unit MPa Both MPa and psi Nil P Note2) c CAT.ES60-19A

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

(Fixed SI unit [l/min or l] will be set for switch types without unit switching function.) Note 3) The system accuracy when combined with PF2D5.

EXxx-OMN0027CN

PCA-1558823 7/8 6 m PCA-1558836 7/8 2 m PCA-1558849 7/8 6 m PCA-1564927 M12 Bcode2 mSPEEDCON PCA-1564930 M12 Bcode6 mSPEEDCON PCA-1564943 M12 Bcode2 mSPEEDCON PCA-1564969 M12 Bcode6 mSPEEDCON PCA-1401804 M12 Acode1.5 mSPEEDCON PCA-1401805 M12 Acode3 mSPEEDCON PCA-1401806 M12 Acode5 mSPEEDCON EX500-AP010-S M12 Acode1 m EX500-AP050-S M12 Acode5 m EX500-AP010-A M12 Acode1m EX500-AP050-A M12

HEP500-04 Liquid Collector Ejector Type

2 n tube Operating flow rate L/min th Collected flow rate L/min Collected flow rate L/min Collected flow rate L/min eng be l 1.6 0.8 0.4 4 lectio on tu Collection tube length 2 m m 7 Col ollecti 1.2 0.6 0.3 3 C m 13 m 20 m 7 0.8 0.4 0.2 2 m 7 13 m m 13 0.4 0.2 0.1 1 0 m 2 20 m 0 0.02 0.04 0.06 0.08 0.1 0 0.02 0.04 0.06 0.08 0.1 0 0.02 0.04 0.06 0.08 0.1 0 0.02 0.04 0.06 0.08 0.1 Operating

5 Port Solenoid Valve, Series VQC

Example: OMRON Corporation XS2Z-12 4 1 Signal H CAN_H 4 Signal L CAN_L 5 Compatible with DeviceNet specification Micro Style connector.

NCX2 seies

I ffi f l * l l+l {_l l@tt L-I a Noler Thls diagfam is for D A7 or D,A8 type ( ) with D-F7 or D-J7lype.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

g n n k k ra oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole

AMH

/min (ANR)) Air flow rate (l /min (ANR)) AMH550 AMH250 B B 3 4 1 4 Inlet air pressure Air pressure Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) AMH650 AMH350 B 1B 3 8 Inlet air pressure Air pressure Pressure drop (MPa) Pressure drop (MPa) 0.5 Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

Air Cylinder/Low Friction Series MBlQ 32, 40, 50, 63, 80, 100 How to Order MB L Q F 32 50 Standard MDB L F 32 50 Q A53 With auto switch Built-in magnet Number of auto switches S 3 n 2 1 3 n Mounting Basic/Without bracket Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Bore size 32mm 40mm 50mm 63mm 80mm 100mm 32 40 50 63 80 100 Auto switch/Tie

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

bracket) are included with the above parts. 3 Series VCB Direct Operated 2 Port for Heated Water Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical

VQ4000

) 27 79 X PE 41.5 30.5 32 R1 R2 27 P 15.5 14.5 G1/2 Electrical entry Rc1/8 PE port 19.5 (21) 19.5 Rc1/8 External pilot port (21) 31 31 5-Rc1/4, 3/8 P, A, B, R1, R2 port ( ): Rc3/8 0 1 0 1 0 1 0 1 3 position double check: VQ460 l 0 1 2 position double: VQ420 l 3 position closed center: VQ430 l 3 position exhaust center: VQ440 l 3 position pressure center: VQ450 l 181 108 73 90 50 11(A port

ITV0000

Equivalent to IP65 Linearity within 1% (full span) Hysteresis 0.5% (full span) Repeatability 0.5% (full span) ITV (Electro-pneumatic regulator) Mist separator (0.01 m or less) (0.3 m or more) High-speed response time 0.1sec (without load) Air filter (5 m or less) IR (Precision regulator) W Features 1 Compact Electro-pneumatic Regulator Series ITV0 How to Order Single unit and single unit

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature