Wireless System

Description 73.6 1 24 V (for output) 56.6 2 1 2 0 V (for output) 3 24 V (for control/input) 5 30.2 4 0 V (for control/input) 4 3 13.2 5 FE EX600-ED3 42.5 5.5 26 20.5 8 106 90 30.35 Power supply connector PWR: 7/8 inch 5-pin plug 56.6 Configuration Pin no.

Thermo-chiller

It generates particles internally. 26 HRLE Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

(Single) 113.1 (Double) 122 (3 position) (108.5) 10 74.5 35 5.5 28.1 12.7 34.3 2 x M4 DIN rail clamp screw Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 9 Release for switching connector direction Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D n 8 7 6 5 4 3 2 Stations 1 9 60 37 26

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS3002FS-11 3/8" 18.5 16 69.8 21 38.1 AS4002FS-11 3/8" 18.5 16 4.3 8 18.8 26 76.9 11.3 23.7 64.3 62.7 28 33 14 26.2 21 26 29 10 19 50.2 AS4002FS-13 1/2" 21.7 20 81.3 22 57.4 1 Reference dimensions 6 AS-FS Series Dimensions L-Bracket Bracket on a single side DIN Rail Mounting Bracket Bracket on a single side L17 L16 L15 AS1002FS AS2002FS L12 L13 L14 L24 2 x D6 L22 t2 L21 L20 L19 L23 L11

CL

S + Stroke ZZ + Stroke With rod boot l h + l ZZ + l + Stroke Bore size (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 26 31 38 47 4 7 7 8 4 7 7 8 5.5 9 9 11 3.5 4 4 4 54 62 62 67 19 20 21 23 12 12 11 12 85 95 95 103 12 14 18 25 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 24 29 36 44 18 22 22 30 M8 x 1.25 M10 x 1.25 M10 x

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

B port (mm) A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.5 11 14 13 12 13 15.5 14 0 0.043 0.004 0.012 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0 0.043 0.004 0.012 6 14 42 34.5 10 20 M5 x 0.8 1.5 17 7 10 0.5 36 M4 x 0.7 4.5 M4 x 0.7 26

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

Compact and Lightweight

V Port: Screw-in P/E Port: One-touch Fitting ZX Model H2 L4 Connection thread 2 ZM ZH05DA-06-01-06 12 26 Rc1/8 ZH07DA-06-01-06 ZH10DA-06-01-08 ZH13DA-08-02-10 17 36.3 Rc1/4 ZH15DA-08-03-10 19 37.1 Rc3/8 ZH18DA-10-03-12 39.1 ZH20DA-10-04-12 24 44.1 Rc1/2 ZL Metric ZH ZH ZH ZH05DA-07-N01-07 12.7 26 NPT1/8 ZH07DA-07-N01-07 ZH10DA-07-N01-09 ZH13DA-09-N02-11 17.46 36.3 NPT1/4 ZH15DA-09-N03-11

IDG

Description Note IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75/75L/75S IDG100/100H/100L/100S IDG-EL60 IDG-EL60L IDG-EL75 IDG-EL75L IDG-EL100 IDG-EL100L y Membrane module kit IDG-EL30 IDG-EL50 u i IDG-DP01 Dew point indicator kit Option: P IDG-DP01-X001 14-19-29 26 Series IDG Dimensions IDG1 (293) Purge air outlet for dehumidification (67) (46) (26) IN Port size: 1/4 OUT Port size

Table of Contents

(Example) CUJ-M3 x 27l A A C B B D Axial mounting style Lateral mounting style Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Without Auto Switch For Axial Mounting For Lateral Mounting B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 Model Mounting

MXF

26 14.5 26 4 MXF8-30 78 69.5 69 41 40 14.5 26 6 8-6-10 11 Low Profile Slide Table Series MXF Dimensions: MXF12 Stroke adjuster at extension end Stroke adjuster at retraction end Width across hexagon socket hole 2.5 MX Width across flats 7 N 2 ( 1) x 25 Blanking plug (M-5P 2 points) Possible to use as operating port 2-M5 x 0.8 MTS 20.5 25 4 3H9 +0.025 0 depth 3 N-M3 x 0.5 thread depth 5.5

SUP/EXH BLOCK ASSEMBLY, 4/5 PORT SOLENOID VALVE

SUP/EXH BLOCK ASSEMBLY, 4/5 PORT SOLENOID VALVE, 0.00000 lb

SUP/EXH BLOCK ASSEMBLY, 4/5 PORT SOLENOID VALVE, 158.9 lb

SUP/EXH BLOCK ASSEMBLY, 4/5 PORT SOLENOID VALVE, 94.2 lb

SUP/EXH BLOCK ASSEMBLY, 4/5 PORT SOLENOID VALVE, 124.2 lb

SUP/EXH BLOCK ASSEMBLY, 4/5 PORT SOLENOID VALVE, 120.9 lb

SUP/EXH BLOCK ASSEMBLY, 4/5 PORT SOLENOID VALVE, 133.2 lb

SUP/EXH BLOCK ASSEMBLY, 4/5 PORT SOLENOID VALVE

SUP/EXH BLOCK ASSEMBLY, 4/5 PORT SOLENOID VALVE, 0.00000 lb