SMC Corporation of America
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MPa 0.1 MPa B IN 0.01 AM 0.7 MPa AMD A 0.001 AMH 0.5 MPa A B Model Connection SFA102-02 SFA202-02 SFA302-02 76 96 120 89 93 101 TSJ 1/4 Tube Swage Joint AME AMF 0.0001 1000 1 10 100 ZFC SFA103, SFA203, SFA303 Flow rate L/min (ANR) SF SF 2 x UOJ 1/4 SFA30 SFD 7 9.5 6.5 0.1 LLB B Inlet pressure IN 0.3 MPa AD Max. flow rate line Pressure drop MPa 0.1 MPa 0.01 GD A 0.7 MPa A B Model Connection

The set values of auto-preset mode are calculated as follows Auto-preset set value Hysteresis mode Window comparator mode P_1 = A (A B)/4 H_1 = (A B)/2 (n_1 = B + P1L = B P1H = A H_1 = 5 digit 1 digit means the minimum set unit (In reversed output, P1L, P1H becomes n1L, n1H respectively) Set A B value 4 in reversed output mode) Refer to the list of output operations (page 26) for the setting

For sonic range Where P1 = 0.10132 (P2 + 0.1013) Formula based on Cv factor Q = 98.9Cv (P1 + 0.1013) kg/h Formula based on effective area Q = 5.5S (P1 + 0.1013) kg/h 1 5 20 3 4 20 1 0 30 40 30 20 40 20 30 30 40 20 50 60 60 50 40 30 20 3 4 30 40 50 Figures inside [ ] indicate the saturated steam holding heat (kcal/kg). Figures inside ( ) indicate the saturation temperature (C).

Parts cannot be shipped separately. 1937 Series VHS20/30/40/50 Dimensions VHS20/30 VHS40/40-06/50 10 I EXH. 10 G F H I SUP. E X H . F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 LL LW LZ Model KC KA KB KH KW LA ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model

Material 1 2 3 4 5 6 7 8 9 10 NBR Body A U-seal PBT NBR Elbow body U-seal PBT Black POM, Stainless Note 3) Handle Cassette PBT Note 1) Electroless nickel plated NBR Body B Seal Brass Electroless nickel plated NBR Body B O-ring Brass Electroless nickel plated NBR Needle O-ring Brass Electroless nickel plated NBR Seat ring O-ring Brass Electroless nickel plated NBR Needle guide O-ring Brass

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135

Locking slotted type 3 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 4 7 1 5 6 24 VDC 12 VDC 7 240 VAC 50/60 Hz 15 (11) 2 Nil: Non-locking push type 9 Other 20 (14) 3 Option 25 (16) 4 Valve size 2 to 9 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F 40A 1 1 2 40 (28) 6 1 B 1 2 Flange 40F Electrical entry/With light/surge voltage suppressor 50A Nil Air operated 2 50 (33) 7 GS Grommet with surge

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 25 3 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 7 50 2 B Flange 17-4-38 3 Series VND Steam Valve: 2 Port Valve For Steam Model Port size Flow characteristics Weight (kg) Av x 10-5 Orifice size (mm) Model Rc Flange Note) VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D

seating surface) Grinding processing Ambient temperature Suction port Rc 10 to 40 1/8 Sintered metallic element Body Suction port Circuit example Vacuum ejector Switching valve Supply valve Air source Vacuum source 753 SP Series Rectangular/SP130 A D Rc 1/8 (Suction port) C B D F G E Element fixing nut N pcs. 4 x 5.5 drill 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no

14 - 4. 4.1GW (B RATE) G (B RATE)GW LEC GW LEC (B RATE) B RATE GW TB/PC (CN2) F 9 [] 8 230.4kbps (LEC-W2) 7 1 [] 0 115.2kbps (LEC-W2) (LEC-T1) *(B RATE)0 *(B RATE)0(115.2kbps) *(B RATE)GW 15 - 4.2 (CN2SW) (CN2SW)LEC (CN2SW) (CN2 SW) LEC LED CN2 SW CN2STAT BUS STAT CN3() ON EtherNet/IP CN2(TB/PC ) OFF *(CN2 SW)ON 4.3LEC LEC GW LEC LEC LEC GW GW LEC 1 112 ID [] 5 (

Note 5) Please contact SMC regarding the set nuts for AR50 and AR60. 15-7-9 03 BE 30 1N AW F Option specifications Filter regulator Applicable models AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 Symbol 1 2 6 8 J N R W Z Contents 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge Drain guide 1/4 Non-relieving Flow direction: Right Left Drain

Outside Inside the controller 10k (a) 1k (a) IN0 to SVON (b) (b) COM Caution Unused input terminals should not be in an unconnected (open) state.

Connector Grommel Solid slale Reed switch/Rail mount type 200vAc 5 1 0 Relay, Sequence controller 24VDC 5^40 '100vAc 5 -20 , r } , t r r r , 2+v B!

Connector Grommel Solid slale Reed switch/Rail mount type 200vAc 5 1 0 Relay, Sequence controller 24VDC 5^40 '100vAc 5 -20 , r } , t r r r , 2+v B!

b view 4 6 2 a 5 a 5 5 Component Parts No.

Part number Dimensions Filtration accuracy (m) Element symbol 5 10 20 40 74 105 EM500-005 EM500-010 EM500-020 EM500-040 EM500-074 EM500-105 L005 L010 L020 L040 L074 L105 L005 L010 L020 L040 L074 L105 FQ1 0 1 2 10 N B Q005 65 x 250mm Element type Select from tables on the right.

L Nil B LO Note) Only the "Nil" type is available with a latching type.

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6