99

0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-10 {Rc1} FGH200-10 {Rc1} FGH300-10 {Rc1} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/

MX-OMP0051

6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5 5.5 MXQ20(A) 5.5 5 MXQ25(A) 10 8.5 ON 14 2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(

VDW30/40-XF

circuit 30 Nil E None With power-saving circuit 40 Electrical entry direction Orifice diameter Piping direction 45 left direction IN Symbol Series Orifice diameter (mm ) IN 1 3 4 6 1.0 3.0 4.5 6.0 30 L1 Nil 40 OUT OUT Quick Fastener Clip Part No. 90 left direction 45 right direction Series Size Quick fastener clip part no. (2 pcs.)

T

Do not repair or patch the replaced tubing or fittings for reuse. 15-6-30

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

AC Servo Motor Driver (CC-Link Type)

Refer to LECSC2-T Operation Manual,chapter 6 for details. Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8 9.6 9.6 10.7 10.7 ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically

PSxx-OMU0005CN

5[oPE] [LoC][UnL] () / -63No.PS-OMU0005CN-C < -> 5[oPE] [LoC][UnL] [LoC] 5[oPE] [LoC][UnL] [UnL] /(65) [UnL] [FAL]3[LoC] -64No.PS-OMU0005CN-C / ( ) 1 (/30 ) -65No.PS-OMU0005CN-C , (1015 ) <> 5[oPE] [LoC][UnL] 5 5 (30) 5 (30) /(65) 1 -66No.PS-OMU0005CN-C ZSE20B(F)/ISE20B ,, (), No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 No.6 No.7 -67No.PS-OMU0005CN-C

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

CU

38 48 5 6 7 5 6 8 M6 x 1.0 M8 x 1.25 M10 x 1.25 5.5 5.5 6.6 16 20 24 13 23.5 29 20, 30, 40, 50, 60, 70, 80, 90, 100 4 Series CU Auto Switch Proper Mounting Positions and Heights for Stroke End Detection D-A9 D-F9 D-F9W A 22 (24.5) 2.8 0.5 B W The dimension in ( ) is for D-A93 type.

Stainless Steel Heat

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/

RB/RBL/RBQ

10 12 16 18 D M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 H 3.5 4 4 5 5 F C 22 27 32 41 41 MM K 4 7 8 8.5 13 RBQC1604 RBQC2007 RBQC2508 RBQC3009 RBQC3213 RBQ1604 RBQ2007 RBQ2508 RBQ3009 RBQ3213 14.2 18.2 23.2 28.2 30.2 14 18 23 28 30 7 9 10 12 13 31 44.5 52 61.5 76 27 37.5 44 53 63 25.4 31.2 37 47.3 47.3 6 6 6 6 6 RS H A RZQ MI W S Replacement Parts Hexagon Nut Option CEP1 (2 pcs. standard

I/O Configurator (NFC version)

When they are not in pairing mode, refer to STEP 4 or STEP 6 of 6.4. (1) Input and output size of the wireless slave.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

6 #3 Magnet Return guide Resin Electroless nickel plated Rare earth !7 #4 Magnet holder End cap Resin Steel !8 #5 O-ring Stud Steel NBR Heat treatment !9 #6 Replacement Parts Contents Kit no. Bore size (mm) 6 MXY6-PS Set consists of 2 pieces of above 8 MXY8-PS !0, !

AC Servo Motor Driver (MECHATROLINK-III type)

Use Pn008.1 to activate or not the warning detection. 6.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

M 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 4 5 5 6 8 9 13 14 15 18 KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 4 18 20.7 3.5 10.4 3.5 10 D1 6 19.5 22.8 9 12.8 9 D2 L2 A 14 8 21.5 26.3 15 15.2 22 12 H Connection threads 10 24 29.4 25 18.5 35 17

IDX-OM-W011

. i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

30 37 47.3 d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 Part no.