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connector Example) 80 inch lead wire length NVJlr4-5LO-M3 vJlG2o-4A-20 ' Special Order Only. t Not voltage interchangeable Series : NVJ 7 00 Manifold Specifications P Common Common exhaust Stations 2 l o 2 0 a Please order the appropriate valves and/or blank plate ass'y with manifold base.

connector Example) 80 inch lead wire length NVJlr4-5LO-M3 vJlG2o-4A-20 ' Special Order Only. t Not voltage interchangeable Series : NVJ 7 00 Manifold Specifications P Common Common exhaust Stations 2 l o 2 0 a Please order the appropriate valves and/or blank plate ass'y with manifold base.

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

3.7 590 VP544-X538 6.5 0.08 1.3 6.7 0.10 1.3 930 VP744-X538 10.3 0.08 2.3 9.7 0.08 2.1 1510 VP544-X555 5.2 0.06 1.1 6.7 0.10 1.3 1105 VP744-X555 9.8 0.08 2.1 9.7 0.08 2.1 2000 Needle Valve/Flow Rate Characteristics (VP544/744-X555) 600 [ 21.2] Flow rate scfm [(L/min [ANR])] 2 1.5 1 500 [17.7] 102 psi [0.7 MPa] 400 [14.1] 73 psi [0.5 MPa] 300 [10.6] 36 psi [0.25 MPa] 200 [7.1] 100 [3.5] 00

Compact and lightweight design The square covers are made of an aluminum die-casting and provide a lower cost, lighterweight product. 6-15-2 6-15-3 3 NFPA Interchangeable Cylinder: Standard Type Double Acting, Single Rod (Medium Duty) Series NCA1 Inch size: 1.5", 2", 2.5", 3.25", 4" How to Order NC D A1 B 150 04 00 A54 XB5 Option Built-in magnet Oversized rod High temperature Low temperature

.: 4, 5/32" M5 x 0.8 (A, B port) 15.7 Station n L1 L2 Station 2 39.5 31.5 Station 20 228.5 220.5 3 50 42 4 60.5 52.5 5 71 63 6 81.5 73.5 7 92 84 8 102.5 94.5 9 113 105 10 123.5 115.5 11 134 126 12 144.5 136.5 13 155 147 14 165.5 157.5 15 176 168 16 186.5 178.5 17 197 189 18 207.5 199.5 19 218 210 1-5-23 Series SYJ3000 Flat Ribbon Cable Manifold [ ]: AC SS5YJ3-21PStations -00 L1 L2 4 Manual

SMC Corporation of America 10100 SMC Blvd., Noblesville, IN 46060 www.smcusa.com SMC Pneumatics (Canada) Ltd. www.smcpneumatics.ca (800) SMC.SMC1 (762-7621) e-mail: sales@smcusa.com For International inquiries: www.smcworld.com QV-00M-00 2012 SMC Corporation of America, All Rights Reserved.

.: 0.96 mm High visibility A large LED display for an easily visible switch Wetted parts material Standards Pressured sensor part: Silicon, Body part: PBT, O-ring: HNBR CE (Option), RoHS Note) For wiring, refer to the Operation Manual on our website, http://www.smcworld.com Series PS1000/1100/1200 CAT.NAS100-23B RoHS How to Order [Option] Q R06 L PS 00 10 Option (CE-compliant ) Output specifications

Description Model ALDU900 ALD900 ALDU600 ALD600 126044P 113449 Note 1) 113543 Note 2) Bracket 126130P 126044P 126130P Panel 12661P 12651-1P IS430-1 IS420-1 IS430-1 IS420-1 Float switch S1 ALD600 IS430-2 IS420-2 IS430-2 IS420-2 S2 1 4 1 2 Note 1) Bracket for filter mounting: For Rc 1 ,1 Note 2) Bracket for filter mounting: For Rc 2 Thread machining on filter body is needed. } How to Order ALD 20 9 00

Soft Start-up Valve AV2000/3000/4000/5000 How to Order AV 00 1 G 20 02 Flow direction Nil R Left to right Right to left Soft start-up valve Manual override Nil: Non-locking push type (Flush) B: Locking type (Tool required) C: Locking type (Lever) Body size 20 30 40 50 1/4 3/8 1/2 3/4,1 Thread type Rc G NPT Nil F N Light/Surge voltage suppressor None Nil S Z With surge voltage suppressor (

Large effective area Low power consumption AVL2000-*02 1/4 67 111 31 55 40 64 (Max. 73) Manual/Manual solenoid lock out Modular design AVL2000-*02-*DZM 1/4 67 20.5 111 31 55 34 40 64 (Max. 73) AVL3000-*03 3/8 76 118 36 57 48 64 (Max. 73) How to Order AVL3000-*03-*DZM 3/8 76 12.5 118 36 57 34 48 64 (Max. 73) AVL4000-*04 1/2 98 133 47 61 52 64 (Max. 73) G 20 00 F DZM R 5 02 AVL AVL4000

-X 685 CE2 Series Cylinder Specifications Bore size (mm) 40 50 63 80 100 Fluid Air (Non-lube) Proof pressure Drive 1.5 MPa Brake 0.75 MPa Maximum operating pressure Drive 1 MPa Brake 0.5 MPa Minimum operating pressure Drive 0.1 MPa Brake 0.3 MPa Piston speed 50 to 500 mm/s* Ambient temperature 00 to 60C (No freezing) Brake system Spring and pneumatic lock type Sensor cord length 7-500 mm

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

mm2/s Total capacity: 3000 Effective capacity: 2500 5 to 50C 100 VAC 50/60Hz, 200 VAC 50/60Hz, 24 VDC ALD ALB Oil tank capacity (cm3) Ambient and fluid temperature Solenoid valve voltage LMU LMU SUP Rc 1/4 ALIP AIR : T0604 (6 tube) applicable OIL : T0425 (4 tube) applicable AIR BLOW : T0806 (8 tube) applicable Port size OUT 3 x Rc 1/4 AEP HEP Weight (kgf) 8.4 7.9 How to Order LMU100 LMU 00

How to Order KJ H M3 02 Model Male connector Straight union Different diameter straight Port size H M3 M5 00 23 04 M3 M5 Same diameter tubing 3.2 4 S L W Hexagon socket head male connector Male elbow Extended male elbow Male branch tee Union tee Male run tee Union "Y" Different diameter union "Y" Plug-in reducer Bulkhead union Note 1) Note 1) Note 1) Different diameter tubing O.D.

range Ambient and fluid temperature Contacts Error of scale Hysteresis Repeatability Enclosure Mass Air/Inert gas 1.0 MPa 0.8 MPa 0.1 to 0.7 MPa 5 to 60C (No freezing) 1ab 0.1 MPa 0.05 MPa or less 0.05 MPa Equivalent to IP40 0.15 kg Frequency: 1 cycle/sec Service life: 10 million cycles With indicator light Micro Switch Ratings 0 1 0 1 IS3100 (Gasket piping) IS3000-02 (Rc 1/4 thread) IS3 00

Series KV2 How to Order KV2 L 07 35 S Series Sealant Body Style With Sealant (as applicable) S Male Connector Straight Union Cartridge Straight H Thread Size 1/16 NPT 33 Male 45 Elbow Cartridge 45 Elbow K 1/8 NPT 34 Male 90 Elbow Plug-In 90 Elbow Union 90 Elbow Cartridge 90 Elbow 1/4 NPT 35 L 3/8 NPT 36 1/2 NPT 37 3/4 NPT 38 Male Branch Tee Union Tee T Union 00 Male Branch Y Union Y Plug-In

RoHS How to Order [Option] Q R06 L PS 00 10 Option (CE-compliant ) Nil Q None CE-compliant Output specifications 10 11 12 For positive pressure For vacuum and residual pressure For vacuum The PS1200 series is CEcompliant (with Q) only.

Single Valve/Sub-plate Type IP67 Compliant How to Order 90-SV Series 90 SV W1 00 1 2 5 U D Series compatible with secondary batteries Thread type Nil F N T Rc G NPT NPTF 90 Material restriction Series 2 4 90-SV2000 90-SV4000 Port size Type of actuation Port size Without sub-plate Symbol Nil 02 03 04 Applicable series 2 position single (A) 4 (B) 2 90-SV2000 90-SV4000 90-SV4000 1/4 3/8 1/2

ARB310-00-B 1 pc. G36-10-011 pc. ARX20 VCHR ITV Working Principle IC PVQ VEF VEP VER F1: The pulling force of the solenoid when a specified amperage is applied to the solenoid, or the force that is created by the pilot pressure. F2: The force that is ceated by the port 4 pressure (PA) that passes through the feedback passage and acts on the spool surface, and the spring force.