Antistatic One-touch Fittings Series KA

M5, M6 Soft nylon Polyurethane KAH23-M5 17 8.5 14 13 2.1 M5 0.8 M6 1.0 7 17.5 12.5 8.5 3.4 2.9 4 3.2 1 8 KAH23-M6 KAH23-U01 8 10 KAH04-M5 M5 0.8 M6 1.0 17 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 KAH04-U01 18.5 13.5 5 14 10 16 10 5.6 5.6 1 4 KAH04-U02 16.5 10.5 10 Uni thread KAH06-M5 M5 0.8 M6 1.0 18.5 15 14 3 11.5 4 4 10 KAH06-M6 19 1 8 KAH06-U01 14.5 5 12 6 19.5 17 1 4 KAH06-U02 13 17 14 12

High Vacuum L Type Valve

Not adhering to these specifications, can result in damage to the product. 13 XL-OMV0019 7-2.

Vacuum Ejector Body Ported Type/Box Type (Built-in Silencer)

(Fig. 13, 14) Body ported type Box type Fig.13 Fig.14 12 - Doc. no. ZH-OM00401 Construction Specifications 13 - Doc. no. ZH-OM00401 14 - Doc. no. ZH-OM00401 15 - Doc. no. ZH-OM00401 Circuit Examples Caution Select the related air preparation equipment with appropriate size in reference to the circuit example below.

High-precision Digital Pressure Switch

No.PS-OMW0002-C PRODUCT NAME High-precision Digital Pressure Switch MODEL / Series / Product Number ISE70-#-AB ISE71-#-AB Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 10 Mounting and Installation 13 Installation 13 Piping 14 Wiring 16 Outline of Settings [Measurement mode] 18 Pressure Setting 19 3-Step Setting

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

. *7 With lock only *8 For an actuator with lock, add the power consumption for the lock. 13 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS25E (102) 64 3H9 (+0.025 0 ) depth 3 Body mounting reference plane (B dimension range)1 4 x M5 x 0.8 thread depth 8.5

LG1H

In order to prevent damage due to the breakdown and 13. Radiant heat from strong heat supplies such as a furthe malfunction of the driver and its peripheral devices, a backup system should be established previously by giving a multiple-layered structure or a fail-safe design to the equipment, etc. nace, direct sunlight, etc., should not be applied to the product.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

KN Series Nozzles for Blowing

13 13 13 0.75 x 4 1 x 4 0.9 x 8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 12 12 12 14 14 14 14 18 18 18 20 20 20 20 D 2 Connection thread H1 A L1 Reference dimensions after R thread installation. 862 Nozzles for Blowing KN Series Sensing Heads Standard sensing head/KNP (mm) Applicable tubing O.D.

33

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions. Operating Environment/Storage Environment Warning Warning 1. Do not use in the following environment as it will lead to a breakdown.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Note 13) Do not allow collisions at either end of the table traveling distance. Additionally, when running the positioning operation, do not set within 2 mm of both ends. Note 14) For the manufacture of intermediate strokes, please contact SMC.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Stations L1 L2 2 stations 33.5 27.5 11 128 122 12 138.5 132.5 13 149 143 14 159.5 153.5 15 170 164 16 180.5 174.5 17 191 185 18 201.5 195.5 19 212 206 20 stations 222.5 216.5 3 44 38 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 111.5 645 Series 10-V100 Specific Product Precautions 1 Be sure to read before handling.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct

Series 11-MXJ Air Slide Table

8 18 18 4.5 4.5 7 13 8 18 18 22 4.5 4.5 3.5 2.5 14 13 8 9 18 18 29 29 3.5 3.5 4.5 4.5 Auto Switch Mounting When using the solid state auto switch (D-M9), mount it in the illustrated direction.

Support Guide/11-LEFG Series

60 106 (170) 6H9 (+0.030 0 ) depth 7 58 74 6H9 (+0.030 0 ) depth 7 7 A (Table traveling distance) L (86) 13 61 90 13 85 68 53.8 (68) 33.5 31 Vacuum port Rc1/8 n x 6.6 76 B D x 150 (= E) 150 60 Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG40-S-150 354 157 328 4 150 11-LEFG40-S-200 404 207 378 6 2 300 11-LEFG40-S-250 454 257 428 11-LEFG40-S-300 504 307 478 11-LEFG40-S-350 554

Air Suction Filter With One-touch Fittings ZFB Series

ZFB100, ZFB101 ZFB200, ZFB201 ZFB300, ZFB301 ZFB401 16 x 14 x L60 rZFB200-08 tZFB300-08, -10 ZFB301-11, ZFB401-13 I-34S-A 10 x 6 x L33 12 x 8 x L42 14 x 10 x L45 I-35S-A I-36S-A I-39S-A 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. yZFB401-13 Note) Elements and O-rings for the cover are sold in sets of 10 pieces each. 10 pcs.

CLS

3.5 1.5 5.5 200 200 10 107.0 108.0 107.5 108.0 154 164 12.5 10.5 17.5 15.5 6 4 8 D-Y7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Operating Range Auto switch model Bore size (mm) 125 140 160 180 200 D-Z7/Z80 14.5 14 13 14 14.5 Hs D-A3/A44 D-A5/A6 A 10 10 10 10 10 D-A59W Ht 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 8 7.5 7 12 13 D-Y7BAL 7 7 7 6 6 B D-F5/J5/F59F D-F5W

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

13 Mechanically Jointed Rodless Cylinder Short Type/Basic Type Series MY3A/3B 16, 25, 40, 63 How to Order MY3 A 16 300 LS M9B Type Number of auto switches Nil S n Short type (Rubber bumper) Basic type (Air cushion) 2 pcs. 1 pc. n pcs.

MXH

Select a bore size in accordance with How to Select on page 8-2-12 to 8-2-13. 2. Displacement may increase after an impact load has been applied.

Digital Flow Switch (Remote type sensor unit)

No.PF-OMG0006-F PRODUCT NAME Digital Flow Switch (Remote type sensor unit) MODEL / Series / Product Number PF2D5## Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 13 Installation 13 Piping 14 Wiring 15 Troubleshooting 17 Cross-reference for troubleshooting 17 Specification 18 Specifications

FGD-C

FGDT,F(L250) (7)(9)(11)(12)(13) (14)(15)(16)(17) FGD-CA003 FGDT,F(L500) L500 (18) FGD-CA004 FGDC,E(L250) FGD-CA005 FGDC,E(L500) 7/11 FGX-OM-L007-C 2. 2.