Low torque Metal seal type Rotary joint

Temperature rise is reduced by supply of air. 2 Series MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR1-M5 Width across flats: 14 Width across flats: 7 (16.2) M5 x 0.8 14 5 21 34 (8) R1/8 M5 x 0.8 MQR2-M5 MQR4-M5 * 35 * 29 3 +0.1 0 M4 x 0.7 thread length 8 depth 10 5.5 2-M3 x 0.5 thread length 6 P.C.D.38 M5 x 0.8 thread length 10 0.03 * flange: MQR2-F (for

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

246 23 60 264 42 30 269 287 Z + Stroke CZ ZZ + Stroke Center trunnion(T)/Locking at head end (Hl) Hl Rl/ Wl (mm) Port Cushion valve Stroke range Bore size (mm) Z + 1/2 + Stroke Z Z TZ TY TX TDe8 TT 32 40 50 63 80 100 up to 500 97 89 74 49 50 12 17 up to 500 106 93 95 58 63 16 22 TDe8 TY up to 600 117 105 107 71 75 16 22 up to 600 117 105 130 87 90 20 28 up to 750 147 129 150 110 110 20 34

MHY2/MHW2

Depth 4 0 27 30 4-M6 X 1 Depth 7 (Thread for mounting attachment) Rc(PT)1/8 (Finger closing port) 45 MHR Auto switch mounting groove position MHK MHS 32.9 20 20 51 O S 11 11 Rc(PT)1/8 (Finger opening port) MHC2 25 13 MHT2 5 MHW2-32D1 MHY2 6.45 5.5 Right angle finger MHW2 MRHQ Auto switch 44 21 14 MHW2-32D.SMHW2, #3 MHW2-32D1.SMHW2, #6 20 18 7 27 4-M6 X 1 (Thread for mounting attachment) 34

ML1

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

CRB1/Size: 10, 15, 20, 30

R Q2 B P C F(h9) D G1 G2 J K L M N Q1 E(g6) Q3 Model A 90 180 270 M5 M3 CRB1BW10-lS CRB1BW10-lSE CRB1BW15-lS CRB1BW15-lSE CRB1BW20-lS CRB1BW20-lSE CRB1BW30-lS CRB1BW30-lSE 3.4 (5.5) 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 M3 (6) 0 0.036 15 24 8 0.004 0.012 9 14 3 1 5 9 0.5 29 4 M3 M3 (5) M5 M3 3.4 (6) M3 (10) 0.004 0.012 0 0.043 20 29 9 12 18 5 4 1.5 6 10 0.5 34 M3 M4 (7.5) 4.5

GA342

34 71 (P port) Rc 1/2, 3/4, 1 (R port) Rc 1/2, 3/4, 1 (A port) Rc 1/2, 3/4, 1 5-5-12

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

2.3 Pg.7 4-Rc 1/8 1(P), 3(R) port A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 300 (Lead wire length) n-Rc 1/8, M5 x 0.8 2(A) port 7 20 34 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M3 x 0.5 depth 6 (Bracket mounting screw) 7 8 47.5 2-4.5 (Bracket mounting hole

3 Port Solenoid Valve Series VQ100 1

Blanking plate with 2 screws and gasket L dimension 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. 40 510.5 L dimension 4-12-16

Table of Contents

for control VAC, 3 A. 4(A) 2(B) A B N.C. valve N.C. valve 3(EB) SOL.b SOL.a 1 2 SV A00 5(EA) B side passage symbol: Green B side manual override: Green Tie-rod base manifold (For SV1000/2000/3000/4000) 1(P) 4(A) 2(B) A side coil A side spool valve B side spool valve N.O. valve N.O. valve 1 2 SV B00 SOL.b SOL.a 3(EB) 5(EA) 1(P) Conventional tie-rod base type manifolds are also available. 34

VZS

size 2-4.5 mounting hole Manual override 2n-Rc 1/8, 1/4 Indicator light U side (n) (2) (1) Stations D side 2-C6, C8 A 2 B 10.7 31.5 (Port size: One-touch fitting type) (Electrical entry) n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 L1 L2 3-7-33 34

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base EX120 type manifold for SV2000 valve, Dedicated output serial wiring, Number of outputs: 16, Maximum 16 stations available as standard, DIN rail mount, 6 port sizes available, SS5V2 OTHER SIZE RATING, VALVE, SS5V2 MANIFOLD SV2000, 1S, SS5V2 OTHER SIZE RATING, 2.42508 lb, Model1, 5, 34, 2 (P

Modular F.R.L. Unit

AC20, AC20A AC25, AC25A AC30, AC30A AC40, AC40A Note) 40 40 28 11 11 1/8, 1/4 AKM2000 1/8, 1/4 53 48 34 14 13 AKM3000 AKM4000 70 54 42 18 15 1/4, 3/8 How to Order Note) Not applicable to AC40-06.

Modular Type Air Filter Series AF

Bracket 5 1/4, 3/8, 1/2 AF40 Float type auto drain 3/4 AF40-06 3/4, 1 AF50 1 AF60 Pages 23 through 27 Mist separator Series AFM AFM20 1/8, 1/4 Bracket AFM30 1/4, 3/8 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Pages 29 through 31 Micro-mist separator Series AFD AFD20 1/8, 1/4 Bracket AFD30 1/4, 3/8 0.01 Float type auto drain AFD40 1/4, 3/8, 1/2 3/4 AFD40-06 Pages 32 through 34

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

74.6 42.1 12.7 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 65.5 [67.7] 75.5 55.7 [57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8 9 8 9 14.5 3 14.5 3 14.5 3 14.5 3 20 20 20 20 23 23 23 23 27 Refer to the page 68 for dimensions with connector cable. 19 Series SYJ500 Base Mounted (With Sub-plate) [ ] for AC Grommet (G), (H): SYJ54G H -01 1/8 (A port) 18 8.5 2-4.5 (For mounting) 4 34

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

108 9 6 16 5.5 92 2.3 18 42 30 74 21 54 119 9 6 20 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 25 6.8 142.5 3.2 28 40 47 102.5 24.5 55 175 20 8 Front flange type: MQMLF 6 20 2.3 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke 10, 16, 20, 25 FY FT FX FZ H 2-FC S + Stroke ZZ + Stroke (mm) Bore size (mm) FC FT FX FY FZ H S ZZ 10 5.5 2.3 33 20 42 28 65 101 16 5.5 2.3 42 24 54 30 74 114 20 7 4 60 34

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

D-F9NW Auto Switch Weights DC (+) Brown [Red] Unit: g Main circuit of switch OUT Black [White] Model D-F9BW D-F9PW D-F9NW Lead wire length 0.5m 7 7 7 Lead wire length 3m 32 34 34 DC () Blue [Black] Auto Switch Dimensions D-F9PW D-F9NW, D-F9PW, D-F9BW DC (+) Brown [Red] Main circuit of switch OUT Black [White] DC () Blue [Black] D-F9BW OUT (+) Brown [Red] Main circuit of switch OUT () Blue

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Main switch circuit Main switch circuit Black lead wire + Resistor DC power supply Load Reed switch Reverse current prevention diode OUT Black [White] () OUT () Blue [Black] OUT () Blue [Black] DC () Blue [Black] Indicator light/Display method Proper Auto Switch Mounting Positions Solid state switches A 10.5 13.5 13.5 17.5 26 32 33 41 38 47.5 Reed switches A 6.5 9.5 9.5 13.5 22 28 29 37 34

Free-Mounting Cylinder with Air Cushion Series CU

Main circuit of switch OUT Black [White] 7 7 0.5 7 Lead wire length (m) 32 34 3 34 52 56 5 56 DC() Blue [Black] Dimensions D-F9PW(V) D-F9W M2.5 x 4 Slotted set screw DC(+) Brown [Red] Indicator light Main circuit of switch Main circuit of switch 2 2.7 OUT Black [White] DC() Blue [Black] 22 2.8 2.6 4 D-F9BW(V) Most sensitive position 6 DC(+) Brown [Red] D-F9WV M2.5 x 4 Slotted set screw Indicator

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

Rotary Table Series MSU

0.062 3H9 A +0.052 0 21H9 Long groove depth 5 (positioning pin hole) 22.5 29 2.5 3 +0.025 0 3-3H9 depth 3 ( A , B , C ) 2-4.5 through 3-R1.5 15.5 45 9 42h9 0 0.062 2 36 3 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2-4.5 through 3-R1.5 6 2-M5 x 0.8 Adjustment: Max. 8.2 6 B port A port 0.5 +0.025 0 3-3H9 long groove depth 2.5 ( A , B , C ) 5g6 0.004 0.012 12h9 0 0.043 4-M4 x 0.7 depth 8 34