Air Cylinder

35 37 34.5 36.5 31 33 35.5 37.5 29.5 31.5 32 34.5 Rod end 48 27 (36) 44 23 (32) 43.5 22.5 (31.5) 40 19 (28) 44.5 23.5 (32.5) 38.5 17.5 (26.5) 41 20.5 40 (29.5) Double end 48 41 44 37 43.5 36.5 40 33 44.5 37.5 38.5 31.5 41 34.5 Head end 46 49 42 45 41.5 44.5 38 41 42.5 45.5 36.5 39.5 39.5 42.5 Rod end 58 32 (44) 54 28 (40) 53.5 27.5 (39.5) 50 24 (36) 54.5 28.5 (40.5) 48.5 22.5 (34.5) 51.5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRBU2 T Single round shaft Double shaft (Long shaft without key and with our chamfers) J CRB1 K Double round shaft MSU CRJ CRA1 Dimensions (mm) J (Double shaft/Long shaft without key & with four chamfers) CRQ2 T (Single round shaft) K (Double round shaft) Shaft type MSQ MRQ DConfiguration 20M 20 22 25 30 UU 118 139 167 202 D (g6) 15 17 20 25 D (g6) 15 17 20 25 H 36 41 50 60 H 36 41 50 60

Rotary Actuator

Applicable shaft types: S, W CRB1 Y2 = X = X = Y = X = MSU CRJ CRA1 CRA1 CRQ2 Y = Y1 = Y1 = Y2 = [mm] [mm] MSQ [mm] Size Y1 Y2 W Y 30 3 to 8 15 to 25 50 1 to 20 18.5 to 36 63 1 to 22 21 to 41 80 1 to 25 25 to 50 100 1 to 30 32.5 to 60 Size X Y1 Y2 W Y W Y 30 15 to 25 3 to 8 15 to 25 50 18.5 to 36 1 to 20 18.5 to 36 63 21 to 41 1 to 22 21 to 41 80 25 to 50 1 to 25 25 to 50 100 32.5 to 60 1

ZP

63 103 154 3.5 Model ZPX63HJ25-B01-A18 ZPX63HJ50-B01-A18 ZPX63HJ75-B01-A18 ZPX80HJ25-B01-A18 ZPX80HJ50-B01-A18 ZPX80HJ75-B01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-B01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-B01-A18 52 100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-B01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50 ZPX50HJ75-B01-A18 52 171 222 80 82

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

60 H 36 41 50 60 H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

F

Applicable Thread Model H D1 D2 L1 L2 A M Minimum Weight Tube OD UNF (Hex) Hole (g) (Inch) NPT Diameter 1/8 1/8 KQW01-34S 11.11 9.6 10 17.5 37 38 15.5 2.5 19 1/8 1/4 KQW01-35S 14.29 9.6 10 17.5 43 42 15.5 2.5 41 5/32 1/8 KQW03-34S 11.11 10.4 10 18 37.5 38.5 16 3 19 5/32 1/4 KQW03-35S 14.29 10.4 10 18 48.5 42.5 16 3 41 3/16 1/8 KQW05-34S 11.11 11.4 10 19.5 38 40 16.5 3.5 41 3/16 1/4 KQW05-

Modular F.R.L. Units

57.2 35 7 14 4 41 AC30-B 1/4, 3/8 1/8 167.4 115.1 38.1 30 55.1 80 29.4 3.5 41 57.2 35 7 14 4 41 AC40-B 1/4, 3/8, 1/2 1/8 220.4 147.1 39.8 38.4 72.6 110 33.8 3.5 50 75.2 40 9 18 5 48 AC40-06-B 3/4 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 AC50-B 3/4, 1 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC55-B 1 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70

Modular Design with Uniform Body Style

Thread type/NPT: 3/8" One-touch fitting Barb fitting applicable tubing: T0604 1/4 1/4 1/4 Width across flats 17 Width across flats 17 Width across flats 17 Standard specifications Bracket mount P1 P2 P3 A B C E F G J K M N Q1 Q2 R S U V1 V2 AC20-V-D 1/8, 1/4 1/8 1/8 169.6 87.6 48.5 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 AC30-V-D 1/4, 3/8 1/8 1/4 224.6 115.4 55 30 55.1 80 26.5 3.5 41

Free Mount Cylinder

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

Table of Contents

1 15-9-41 3 Dimensions AS2000E/3000E 2-port size L7 Max. Min.

Cylinder with Lock

AB AH AO AT AU E R2 TG 0.2 TR Screw size R2 TG/2 32 L5032 7 32 10 4.5 24 48 15 32.5 32 M6 x 16L 40 L5040 10 36 11 4.5 28 55 17.5 38 36 M6 x 16L 50 L5050 10 45 12 5.5 32 68 20 46.5 45 M8 x 20L 63 L5063 10 50 12 5.5 32 80 22.5 56.5 50 M8 x 20L 80 L5080 12 63 14 6.5 41 100 22.5 72 63 M10 x 20L 100 L5100 14.5 71 16 6.5 41 120 27.5 89 75 M10 x 20L AH AT AB E TR AU AO * Supplied with 4 mounting

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

lateral load at rod end is exceeding the value in the graph, we recommend anti-lateral load type cylinder be used. 101 g 43 g 3 g 141 g W (Mounting orientation: Horizontal) 7-6-5 6 Series CQ2 (N) Theoretical Output (g) Weight Cylinder stroke (mm) Operating Operating pressure (MPa) Bore size (mm) 5 Bore size (mm) direction 0.3 75 50 45 40 0.7 35 30 0.5 25 20 15 10 100 12 59 60 42 54 47 25 41

A

Y54-04 1/2 72 62 40 62 Y52-03 3/8 14 24 41 Y61-03 3/8 15 30 50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

VHK

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 41 3.5 1 27 22 26 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

KJ

19 41 41 19 20 42 69 30 47 74 69 76 147 72 78 149 11.11 14.29 11.11 14.29 11.11 14.29 11.11 14.29 17.46 12.7 14.29 17.46 9.6 10 17.5 15.5 1 8 43 37.5 43.5 38 44 40.5 46.5 48.5 43.5 49.5 51.5 56 58 64.5 58 60 66.5 10.4 10 16 3 18 5 32 11.4 10 16.5 3.5 19.5 3 16 K 1 4 4.6 17 13.2 10 20.5 M H 5 16 6 18.5 15.2 12 23.5 D Connection thread (with seal) 17.46 3 8 7 21 17.9 17 25.5 MS 22.23 Courtesy

KR

17 12 57.4 22 45.4 17 28.5 20.9 1 2 KGY12-04 37 57.5 22 68 3 8 KGY16-03 26.5 38 20.9 34 25 81 (81) 113 (113) 65.5 112 16 22 1 2 KGY16-04 41 67 116 Reference dimensions after R thread installation.

LVQ

T) View Z (mm) Dimensions A B C D M N T U V Model LVQ20-S-2 LVQ30-S-2 LVQ40-S-2 LVQ50-S-2 LVQ60-S-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 35 70 41 82 7 20 64 25 17 35 70 41 82 7 20 66 32 17-5-69 8 Series LVQ Dimensions With flow rate adjustment & by-pass High back pressure spec. with flow rate adjustment & by-pass N.C. valve M N

VHK

H L1 L2 L3 L4 L5 L6 M1 M2 Q Model C D J E F G K 1(P)2(A) 2(A)3(R) 18 1(P) 2(A) 4 4 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2

o

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?