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1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body : Aluminum alloy, critical part : SUS304, FKM (standard seal material) Note 2 Surface treatment for body Outside: hard anodized Inside

ft diagEm E : With indicator light and surco voltage suppssor i e l s I 3 14' 6 , ' , Lr 2.09 (s3) 2.72 (6e) 3.35 (85) 3.98 (101) 4.61 (117) 5.24 (i33) (i4e) 6.50 (165) (i&) (197) 8.39 (2|3) (?

6 TUZ0805 8 TUZ1065 10 TUZ1208 Tubing O.D.

The grease can be ordered tool can be ordered by part no. shown on Table 6. by the following part no. <6, 10> 1) Inner side of cylinder tube A 2) Outer side of cylinder tube and sliding side of switch rail Table 6 Part no. of specific tool Part on. Applicable cylinder tube I.D.

A5 A5 A6 A6 A7 A7 Internal Internal A8 A8 resistance resistance 10[k ] 10[k ] 24 VDC 24 VDC A9 A9 Main circuit Main circuit power supply power supply for the input for the input A10 A10 signals signals B1 B1 B2 B2 B3 B3 B4 B4 B5 B5 Maximum output Maximum output B6 B6 current: 10 mA current: 10 mA B7 B7 Pulse input internal circuit Note2) B8 Pulse input internal circuit Note2) B8 Pulse input

0.5 ON:SEC OFF:MIN 0.5 4-2-4 7 25 Y92S-36/CR2477/ 0 MEMO h (h) IDF100150F 4-2 4 4 IDX-OM-U021 4 , OFF [] IDF100150F 4-2 4 5 IDX-OM-U021 4 (+,-) 0 IDF100150F 4-2 4 6 IDX-OM-U021 5 5 5-1 3 ON OFF (R) OFFON 3 2 R T 5.2 60cm 1 5.2 5.2 10% 5.2 IDF100150F 5-1 5 1 IDX-OM-U021 5 ( ) ( ) 60cm 1 10% 3 ( ) 60cm 1 2 IN OUT INOUT () 424 IDF100150F 5-1 5 2 IDX-OM-U021

Description Material Note 1 Body A PBT 2 Body B PBT 3 Needle PBT 4 Indicator 5 Stopper Stainless-steel 6 Needle guide Brass Electroless nickel Plated 7 Disk seal HNBR 8 Stud Brass Electroless nickel Plated 9 O-ring NBR 10 O-ring NBR 11 O-ring NBR 12 O-ring 13 Seal NBR 14 Seal NBR 15 O-ring NBR Meter-in type only 13 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel

Connection thread size Maximum number of rotations of the indicator M5, 10-32UNF 8 rotations 1/8 10 rotations 1/4 9 rotations 3/8 8 rotations 1/2 10 rotations 6 - Caution (1)When performing the piping work, turn the tightening tool in the horizontal direction to the hexagon across flats of the body B so that any moment is not applied to the body.

ft diagEm E : With indicator light and surco voltage suppssor i e l s I 3 14' 6 , ' , Lr 2.09 (s3) 2.72 (6e) 3.35 (85) 3.98 (101) 4.61 (117) 5.24 (i33) (i4e) 6.50 (165) (i&) (197) 8.39 (2|3) (?

IP8000 IP8100 Type Item Lever type lever feedback Rotary type cam feedback Single action Double action Single action Double action Input current Input resistance Supply air pressure Standard stroke Sensitivity Linearity Hysteresis Repeatability Coefficient of temperature 4 to 20mADC Note 1) 23515 (4 to 20mADC) 0.14 to 0.7MPa 10 to 85mm (Deflection angle 10 to 30) 60 to 100 Note 2) Within

F_1 and F_2 have setting ranges of 0-90%F.S. and 10-120%F.S., respectively. However, the set pressure exceed rated output; 100F.S. is out of warranty. (refer to Fig.2,3) The values are necessary to satisfy F_1 + 10%F.S. < F2. If not, the previous values are reflected in this function.

If using the product to detect very small flow rates, warm up the product for 10 to 15 minutes first. There will be a drift on the analogue output of approximate 2 to 3% immediately after the power supply is turn on, within 10 minutes. Check regulators and flow adjustment valves before introducing the fluid.

If using the product to detect very small flow rates, warm up the product for 10 to 15 minutes first. There will be a drift on the analogue output of approximate 2 to 3% immediately after the power supply is turn on, within 10 minutes. Check regulators and flow adjustment valves before introducing the fluid.

-Supply air at appropriate pressure. 18 10. Outer dimensions PB1011A-01PB1013A-0119 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

Handling Precautions . 10 5. Names and functions of parts . 10 6. How to use . 11 7. Specification and how to order . 12 8. Discharge capability . 14 9. Troubleshooting . 16 10. Outer dimensions. 18 2 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) VND0D VND02D 12(P1) 10(P2) 1mm 12(P1) 10(P2) 2(B) 1(A) 6 VN-OMT0001 No. 7 VN-OMT0001 : TT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

XLH-16 XLH-25 XLH-40 XLH-50 16 25 40 50 5150 -6 Pa (abs) 110 l/s 1 5 14 45 80 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW SUS316L,FKM Nm 0.1 0.15 0.35 0.5 5 7 10 13 0.23 0.41 1.05 1.62 1) 3-2.

Symbol Differential pressure indication Symbol Nominal filtration 0 None 4 Differential pressure indicator standard 074 74m 5 Differential pressure indication switch 105 105m 003 3m Table1-1 Port size (Rc) 005 5m Non-standard 010 10m Port size Threaded connection 020 20m Symbol 040 40m 149 149m 06 3/4 270 270m 08 1 10 1 1/4 12 1 1/2 16 2 20 2 1/2 24 3 10 / 17 FGX-OM-F001-A 2.

Refer to page 8 to 10. Please note that the graph should only be used as a guide as there is a tolerance of about 10% in the clamp cylinder body.