Tamper Proof and Flat Head Screw

Flow Rate and Effective Area Flow direction symbols on body Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Models Symbol JIS symbol Metric sizes 3.2, 4, 6 3.2, 4 6 6 8 10 12 6, 8, 10 8, 10 4 10, 12 Tubing O.D. 1/8 5/32 3/16, 1/4 5/16 1/4, 5/16 3/8 1/8, 5/32 3/16, 1/4 Inch sizes 5/32 3/16 5/16 3/8 1/2 3/8 1/4 Flow rate l/min (

CL

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.

Air Slide Table

I J 4.75 8 4.7 8.7 2 x M4 x 0.7 thread depth 6 4H9 depth 4 +0.030 0 4H9 depth 4 +0.030 0 N x M4 x 0.7 thread depth 5 8 4.7 5 19.5 1 1 22 20 46 29 20 39 14.5 2.5 F 5 -1 x F 2 N 4 x M4 x 0.7 thread depth 6 13 16 3 x M5 x 0.8 thread depth 8 M 8 KA 18.5 NA x M4 x 0.7 thread depth 4 8.5 5 K 18.5 Bottom view of MXQR12-40 8.5 5 0.3 27.2 39 29 9 4.8 30 Z ZZ G (NN-1) x H H 17.4 6.6 17.4 6.6 A B 4H9

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

type) Normally closed Normally open Port size Bracket Series M5 01 M5 x 0.8 1/8 (10-SYJ700 only) Nil Without bracket F With bracket 3 5 7 10-SYJ300 10-SYJ500 10-SYJ700 3 port (Type 20, 21 manifold) 1 5 10 M SYJ 2 5 WAO M5 Body ported 5 1 SYJ 4 5 WAO 01 10 M Base mounted CE-compliant 3 port Nil Q CE-compliant Sub-plate type, type 40, 41, S41, 42, S42 manifold Body option Electrical entry

HRX-OM-S010

Simple communication protocol function . 5-1 5.1 Precautions for communication . 5-1 5.1.1 Precautions after wiring and before communication . 5-1 5.1.2 Precautions for communicating . 5-2 5.1.3 Precautions after the completion of the communication . 5-2 5.2 Communication specification . 5-3 5.3 Setting and checking. 5-4 5.3.1 Setting and checking items . 5-4 5.3.2 Setting and checking. 5

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Vacuum (V) port (M5) Note 5) 21 10 111 Note 1) (3.7) Dimensions 1 2 3 4 5 6 7 8 (mm) K J 5 6 E F n L1 L2 Note 2) The above dimensions are for ZQ1 3M2 .

New

460 460 460 460 460 460 1/8 C6 13/64 VX210 1 5/64 1/8 C8 13/64 5/32 9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Valve output 14 RXn.F RYn.F Valve output 15 Unit No.0 Reserve RX(n+1).0 RY(n+1).0 Valve output 16 EX600-SCF1 RX(n+1).1 RY(n+1).1 Valve output 17 RX(n+1).2 RY(n+1).2 Valve output 18 RX(n+1).3 RY(n+1).3 Valve output 19 RX(n+1).4 RY(n+1).4 Valve output 20 RX(n+1).5 RY(n+1).5 Valve output 21 RX(n+1).6 RY(n+1).6 Valve output 22 RX(n+1).7 RY(n+1).7 Valve output 23 RX(n+1).8 RY(n+1).8 Valve output

Cylinder with Lock

1 !3 io@1!4w@2 !8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

MXS

1 !2 !3 !4 !5 !6 !7 !8 !

10

1 !4 !0 !3!8 !6 !5 12-2 12-1 7-2 7-1 1-2 1-1 1-1 Width across flats Rod view 32 (2:1) Component Parts No.

Vacuum System Peripherals:

Hysteresis 1 Output deviation (% F.S.) 0.5 Out Out How to Order 0 Return Return ITV 209 0 0 1 2 5 S 0.5 Pressure display unit Pressure range 5 kPa 9 1.3 to 80 kPa 1 0 25 50 75 100 Cable connector type Input signal (% F.S.)

HRX-OM-Q033

Simple communication protocol function . 5-1 5.1 Precautions for communication. 5-1 5.1.1 Precautions after wiring and before communication . 5-1 5.1.2 Precautions for communicating . 5-2 5.1.3 Precautions after the completion of the communication . 5-2 5.2 Communication specification . 5-3 5.3 Setting and checking . 5-4 5.3.1 Setting and checking items . 5-4 5.3.2 Setting and checking .

C95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

) of the DRIVE input signal. 35 - The following table shows the relation of the positon number and the combination of IN0-IN5 or OUT0-OUT5. 0OFF 1ON 0OFF 1ON Step No IN5 IN4 IN3 IN2 IN1 IN0 Step OUT OUT OUT OUT OUT OUT No 5 4 3 2 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 0 0 0 0 0 1 1 0 0 0 0 0 1 2 0 0 0 0 1 0 2 0 0 0 0 1 0 3 0 0 0 0 1 1 3 0 0 0 0 1 1 4 0 0 0 1 0 0 4 0 0 0 1 0 0 5 0 0 0 1 0 1 5 0

Refrigerated Air Dryers Series IDF/IDU

0.6 0.7 0.8 0.9 1 to 1.6 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 to 1.6 0.62 0.68 0.62 0.62 0.72 0.77 0.72 0.69 3 5 10 15 3 5 10 15 0.55 0.55 SF 0.81 0.84 0.81 0.77 0.7 0.7 0.88 0.90 0.88 0.85 1 1 SFD 0.95 0.95 0.95 0.93 1.3 1.3 1 1 1 1 IDU55E, 75E LLB 1.06 1.03 1.06 1.08 1.11 1.06 1.11 1.16 Correction factor Outlet air pressure dew point (C) AD 1.16 1.08 1.16 1.23 3 5 10 15 0.53 GD 0.67 1 1.30

HRX-OM-T004

Simple communication protocol function . 5-1 5.1 Precautions for communication. 5-1 5.1.1 Precautions after wiring and before communication . 5-1 5.1.2 Precautions for communicating . 5-2 5.1.3 Precautions after the completion of the communication . 5-2 5.2 Communication specification . 5-3 5.3 Setting and checking . 5-4 5.3.1 Setting and checking items . 5-4 5.3.2 Setting and checking .

2/3 Port Valve

Min. 40 1 60 5 40 5 40 40 5 (1) 5 (2) Normally open (N.O.) Note 1) Dew point: 5C or less Note 2) 500cSt or less Note 3) "V" and "M" in the parenthesis are option symbols. Tightness of Valve(Leakage) Fluid Seal Non-leak Vacuum V, M 105atm cc/sec (1) (2) Liquid Air 1cm3/min 0.1cm3/min NBR, FPM, EPR Note 1) Different from the operating condition of pressure.

SFOD-OMT0010

7 A B-5 Nil Robotic type cable Black 6 A A-5 Orange 9 S Standard cable B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) (14) B A1 (17.7) 6 5 1 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 10.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2