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VZS G 1/2 VFS VS4 VQ7 EVS VFN 5-1 1/4, 1 1/2 Conduit terminal: VP4170T12 14 DIN terminal: VP4170D12 14 G 1/2 Applicable cable O.D. 6 to 12 G 1/2 3-6-7 8 Series VP450/470 Dimensions: VP4270 Bottom ported Grommet: VP4270G12 14 (Mounting hole) Manual override (5-1 1/4, 1 1/2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

(No condensation) Withstand voltage 7 1000 VAC, for 1 minute between the terminals and housing Insulation resistance 50 M min.

No.MRQB-OM02 / / / / / / / / MRQ MRQ MRQ MRQ 1 1. 1. 1. 1. 11 1-1. 11 1-2. 11 1-3. 11 2. 2. 2. 2. 12 3. 3. 3. 3. 14 3-1. 14 3-2. 14 4. 4. 4. 4. 15 4-1. 15 4-2. 16 4-3. 17 4-4. 17 4-5. 18 4-6. 18 5. 5. 5. 5. 19 5-1. 19 5-2. 21 5-3. 22 6. 6. 6. 6. 24 6-1. 24 6-2. 24 6-3. 25 7. 7. 7. 7. 26 8. 8. 8. 8. 27 9. 9. 9. 9. 28 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

Gasket NBR u Refer to How to Order Pilot Valve Assembly on page 3-7-24. BG-VZS3000 (Gasket 1 pc., Round head combination screw 3 pcs.) Note) BG-VZS3000-1 (Groove gasket 1 pc. Round head combination screw 2 pcs.) i Round head combination screw Carbon steel Pilot valve assembly Light cover assembly o !0 Refer to How to Order Light Cover Assembly on page 3-7-24.

ON/OFF 2 7 "8"7 "-"()7 digit() 1digit=1 kPa 1,2,3,,99,100 1 kPa 1 5[V]F.S.=514[V] 1F.S.40.010.04[V] F.S. () NPN()() NPN PNP()() PNP R.D. 1.000 5R.D.1.000 50.05 0.800 5R.D.0.800 50.04 ON OFF (29 ) ON OFF Hysteresis ON-OFF /, () () 25[]ON-OFF (copy function) () NPN () () ()()( ) () -11No.PS-OML0002CN-G ON ON 0 (1 k 1 M A/D 5 V A/D 5(V)1(M)/(1(K)+1(M)) 4.995(V)0.555 V ) 29 ON-OFF

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

Keep this operation manual available whenever necessary. 1 - INDEX 1. Safety Instructions 3 2. Specifications 5 3. How to Order 6 4. Mounting 4-1. Precautions for mounting 7 4-2. How to mount 9 4-3. Wiring table 15 4-4. Power supply cable wiring diagram 16 4-5. Timing chart 16 5. Functional Explanations 17 6. Outline Dimensions 18 7. Maintenance 7-1.

4 2 5 A 10 x 8 3/4" x 5/8" 5 1 5 B 19 x 16 1/2" x 3/8" 5 2 6 A 12 x 10 1" x 7/8" SMC 6 1 6 B 25 x 22 3/4" x 5/8" 6 2 19 x 16 : Basic size : With reducer Note) Please select an isometric fitting with the same size as the fitting at the flow sensor.

7 t Piston seal Piston B NBR Brass !8 y 20Rod seal Return spring NBR Piano wire !9 u Tube gasket Spring seat NBR Brass @0 i Data Piston gasket Bumper NBR Urethane @1 o Gasket Mounting nut Resin Nickel plated Brass @2 !0 Plate gasket Rod end nut NBR Nickel plated Brass @3 !1 How to Order solenoid valves SYJ319Voltage Electrical entry Steel ball Carbon steel !

AS568-025-XN1 7 XL-OMV0003 Nut assembly 16 25 40 50 Valve size Description Part indication No. Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

[F10 ] -45No.PS-OMU0008CN-D ( ) OUT1 OUT1 ( ) OUT1() ( ) OUT1() OUT1 ( ) OUT2 OUT2 ( ) OUT2() ( ) OUT2() OUT2 OUT1 OUT2 OFF -46No.PS-OMU0008CN-D RAnG -101.0 kPa 100 kPa 1 MPa 2 MPa Md1Md2 / 3 (3 ) [-] -47No.PS-OMU0008CN-D ON ON () ON () / (o ) P_1(n_1)P_2(n_2)1/10 P1HP1L(n1Hn1L)P2HP2L(n2Hn2L)1/4 -1/7 -1/4 -1/7 -1/4 -48No.PS-OMU0008CN-D () [F82] OFF -49No.PS-OMU0008CN-D [F11

Perform wiring referring to the wiring diagram below. 38 - NPN type PNP type Input power Input power supply supply IO connecter IO connecter 24VDC 24VDC IN0 1 IN0 1 IN1 2 IN1 2 RESET 3 RESET 3 (Unused) (Unused) Not connected. 4 Not connected. 4 Load Load OUT0 5 OUT0 5 Load Load OUT1 6 OUT1 6 Load Load OUT2 7 OUT2 7 Load Load ALARM 8 ALARM 8 Caution The parallel input/output of this electric

digit Hysteresis mode Hysteresis Adjustable (can be set from 0) Note 1) Window comparator mode Display type 3 1/2 digits, 7-segment LED 1-color display (red) Display accuracy +/-2%F.S., +/-1 digit (at ambient temperature 25+/-3 Celcius) Indication LED Lights up when ON OUT1: Green, OUT2: Red.

120 PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center SYJA7520-01 Base mounted 01 02 01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7) 190 (110) 2 position double SYJA72408.5 (0.47) 3 position closed cente SYJA7340(1) M5 X 0.8 200 (120) 1/8, 1/4 9 (0.5) [6.5 (0.36)] 3 position exhaust center SYJA7440PA, B: 13.5 (0.75) [7 (0.39)] A, BR1

) With unit conversion function 1 PNP open collector 1 output 65 PNP open collector 1 output 1: The new Measurement Law prohibits the unit conversion function in Japan.

4 x M4 x 0.7 depth 6 MHT For tool mounting 3 x 3.4 depth 10 For tool mounting 3 x 3.4 depth 12.5 MHY MHW Magnet for tool stand sensor -X Air pressure port 6 x M3 x 0.5 Applicable shaft diameter d Model D Mass (g) MRHQ 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 MA3 1-YNM5 MA3 1-YNM5-R1 MA3 1-YNM5-R2 MA3 1-YNM5-R3 MA3 1-YNM5-R4 MA3 1-YNM5-R5 MA3 1-YNM5-S6 MA3 1-YNM5-R6 MA3 0-AM3 MA3 0-AM5 500

Designation Description Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Bit No. 1 Unused 1 3 5 7 1 1 5 7 1 2 3 4 5 6 7 8 9 Valve manifold Threaded screw hole size: #4-40 2 Unused RXD/TXD-P Receive/transmit data, positive 3 Diagnostic information The EX260 SI unit can support total 8 bytes diagnostic information, six bytes standard diagnostic information and two bytes SI unit-related diagnostic

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 1000 psig (6.9 MPa) 8000 psig (55.2 MPa) 14 to 212F (10 to 100 -C) (No freezing) 0.27 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 1) 1 x 10-7 Pam3/sec 1) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 70 to 110 psig (0.48 to 0.76 MPa) NPT 1/8 inch Top Bottom mount

AR-OMY0028-A PRODUCT NAME Common Supply Regulator MODEL / Series / Product Number AR20M(K)-(F,N)(0101,0201,0202)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR30M(K)-(F,N)(0202,0302)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR40M(K)-(F,N)(0302,0303,0402,0403)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D Contents Page 1. Safety Instructions 26 2. Application 7 3. Standard Specifications 7 4.