Process Valve Series VNA

20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 0.7 0.5 1 2 3 4 1.0 0.8 1.4 1.2 1 1 4 1 2.4 2.2 5.2 5.0 32 1 2 1 3.8 3.6 JIS Symbol 7.0 6.8 40 Valve type Operation N.C.

Electric Actuator

1 !2 !

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

One-touch Fittings

[mm] Connection thread Rc Model T (M) Weight [g] X (X) Y Nylon Urethane hole M 7 mm or less H1 H2 T Oval type Round type 4 1/8 KQ2E04-01G1 M12 x 1 14 14 24.4 10 7.7 10 13 13.3 5.6 4 3 21.2 1/4 KQ2E04-02G1 M12 x 1 17 14 29 14.6 7.7 10 13 13.3 5.6 4 3 30.9 4, 6 8 to 16 6 1/8 KQ2E06-01G1 M14 x 1 17 17 23.6 9.2 9.7 12 15 13.3 13.1 10.4 4.5 28.9 1/4 KQ2E06-02G1 M14 x 1 17 17 28.4 14 9.7 12 15

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 3 DI2 1 0 1 Program No. 6 DI-1 1 1 0 Program No. 7 1 1 1 Program No. 8 Note. 0: off 1: on Program input 1 PI1 Turn PI1 on to resume the step stopped by the SINK (1) command in the program.

HRX-OM-Y120

HRX-OM-Y120 Contents Contents Chapter 1 Read before using . 1-1 1.1 Operation mode and operation method . 1-2 1.2 Change of operation mode . 1-3 1.3 Communication port . 1-5 1.4 Touch panel flow . 1-6 Chapter 2 Contact input/output communication/Analog output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring

CQ2

1 !2 !3 !

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

HRX-OM-W004

HRX-OM-W004 Contents Contents Chapter 1 Read before using . 1-1 1.1 Communication mode and operation method . 1-1 1.2 Communication port . 1-3 1.3 Key operations . 1-4 1.4 Parameters . 1-8 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication . 2-1 2.2

SFOD-OMT0005CN

0 () 1 2 () 3 () 4 5 6 1 7 8 9 ON 10 11 12 13 1 14 2 15 Word2/ Word Bit 0 OFF ON*1 1-7 () 2 8-9 1:ABS() 2:INC() *2 10-15 () Word3 Word Bit 3 0-15 1 1 mm/s Word4,5 Word Bit 4 0-15 () (-)(+)*3 0.01 mm 5 0-15 () Word6 Word Bit 6 0-15 1 *1 1 mm/s 2 *1 ON ONOFF PLC *2 1(ABS)2(INC) *3 20(P.83) -39- Word7 Word Bit 7 0-15 1 *1 1 mm/s 2 Word8 Word Bit 8 0-15 *1 1% Word9

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

DOC1003626

DOC1003626 Contents Contents Read before using . 1-1 1.1 Operation mode and operation method . 1-2 1.2 Change of operation mode . 1-3 1.3 Communication port . 1-5 1.4 Touch panel flow . 1-6 Contact input/output communication / Analog output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication

HRX-OM-W069

HRX-OM-W069 Contents Contents Chapter 1 Read before using . 1-1 1.1 Operation mode and operation method . 1-1 1.2 Change of operation mode . 1-3 1.3 Communication port . 1-4 1.4 Touch panel flow . 1-5 Chapter 2 Contact input/output communication /Analog output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

1, !2, !3.

4-channel Flow Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0:

AC Servo Motor Driver (SSCNET Type)

1) (Note 1) 31 Overspeed 32 Overcurrent Alarms 33 Overvoltage 34 Receive error 1 (Note 2) 35 Command frequency error 36 Receive error 2 37 Parameter error 45 Main circuit device overheat (Note 1) (Note 1) (Note 1) 46 Servo motor overheat (Note 1) (Note 1) (Note 1) 47 Cooling fan error 50 Overload 1 (Note 1) (Note 1) (Note 1) 51 Overload 2 (Note 1) (Note 1) (Note 1) 52 Error excessive 8A USB

Table of Contents

8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

JXCx-OMT0028CN

(1) 250 bit1 Bit0 0 0 0 1 1 0 46 - (2)READY 1(ON) (3)ALARM 1 1(ON)0(OFF) (4) 0(OFF)1(ON) (5) 1 1(ON)0(OFF) (CN2SW)ON (GW [OUT Data]Address.250, bit7)ON (6)() ID ON(1)ID OFF(0) (GW [OUT Data] Address.251 Address.252) bit 7 6 5 4 3 2 1 0 Address 251 ID8 ID7 ID6 ID5 ID4 ID3 ID2 ID1 252 ID12 ID11 ID10 ID9 (7) (LEC)ID ID 2 bit 3 2 1 0 ID 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 11 1 0 1 1 12

Multi-channel Digital Sensor Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0: