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*-OMY0008 F F.S.( 15V F.S.=5[V]1[V]4[V](1F.S.4[V]10.04[V]) a 1-5V 1-5V 4-20mA (HYS) ON OFF 63% ka () sa 10 L/min 10 L ON OFF ON () OFF () 2 5 5 10 L/min 10550L 14 No.LFE*-OMY0008 sa ON-OFF () 1 L/min 10 11 12 1 L/min () 0 ta (SI )SI LFE ON-OFF () [S/cm](/ 100200S/cm na ON 0 ha 15 No.LFE*-OMY0008 2MPa(69 ) IN ()IN (68 ) DC(-)/ + 2 2 2 20mm 0mm 0mm 0mm 2 2 2 20mm

(Values at the initial period) Note 3) At rated voltage Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT317 VT317V (Vacuum spec. type) VT317E (Continuous duty type) 0.29 kg 2.4 0.26 0.62 2.6 0.34 0.67 2.8 0.25 0.67 2.5 0.37 0.66

Applicable bore Shock absorber model ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 Side Support Side support A 2 x G E E F 2 x H A B Side support B 2 x J A B (mm) A B C D E F G H J Part no.

When more than 3 types of nozzle are needed, A and B channels are available for selection; thus 2 outputs x 2 channels = 4 outputs are available. 50 ISA2 IS 0 0 Time AUTO-SHIFT terminal ZSM Set value of OUT2 (CH.B) Set value of OUT1 (CH.B) Set value of OUT2 (CH.A) Set value of OUT1 (CH.A) 10 [ms] Nozzle 1 Nozzle 2 Nozzle 3 Nozzle 4 50 GND PF2 P3 P4 P1 P3 P4 P1 After 10 [ms] is passed, display

stations 02 LQ 2 stations LVN Manifold base 10 10 stations Symbol VVXA31 VVXA32 VXA31 5-00 Applicable valve TI/ TIL Port size (Individual port) 1 2 Rc Rc VXA32 5-00 1 8 1 4 PA All common ports are Rc 1/4.

Orifice size Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 Electrical entry G Grommet C Conduit Refer to the below table for orifice and port size combinations.

How to Order Standard B 20 30 D C CQSY B 20 30 D C F9BW S CDQSY With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

/N.O. with same configuration/Double acting Compatible with 100C fluid temperature 1.12-4 Integral Fitting Type Series LVC Air Operated P.1 to P.6 LVC20/23 4 4, 6 1/8, 1/4, 3/16 LVC30 8 6, 8, 10 1/4, 3/8 LVC40 10 10, 12 3/8, 1/2 LVC50 16 12, 19 1/2, 3/4 Model Orifice diameter Millimeter Tube outside dia. Inch Symbol Type Basic type Valve type N.C. PB PA PA N.O. B A B A B A PB N.C.

4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

(RS2H50) -1-2.(RS2H63 -1-3.(RS2H80 2025 6 - -2-1. -2-2. 7 - 2-1 ,, 3. 3-1. AF ,AR , , , ,1 ISO VG32. 5 , 5 8 - 3-2. 1 B 1 3 3-3. 3-4. 9 - () 3-5. ,, (-)90 , 5.2 Nm A 10 - 3-6. ,,, RS2H5079Nm RS2H63801214Nm -5 3-7. M4 M41.5Nm -6 11 - 4. A GR-S-010(10g) -7 5. -8-9 -8 -9 12 - , 3 6. 6-1. 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13 - / 6-2.

Inlet pressure 0.3 MPa 6 4 6 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa 4 4 2 2 2 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 0 0 0 5 6 7 8 1 2 3 4 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13 15 16 2 1 3 4 5 6 7 8 9 10 11 12 0 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 7 Compressed Air Preparation Filter

Keep the certificate of Class 2 Pressure Vessel in a safe place. Products below are subject to Class 2 Pressure Vessel Act. Certificate will be sent 2 to 4 weeks after the shipment of the product.

(3) , (4) , (5) , (CEU5**-D),EMC 5 5-1 (), CEP1 ,, ,, ,, 145 CEP1 ,, 15000 18cm ,, 5-2 0.01mm (4 ) 0.00 0.08 0.04 A B (1) ,0.8mm (2) ,sin,cos 2 ()1 (0.8mm)1 (3) 1/200.04mm/90 () (4) 4 ,0.01mm 5-3 CEP1 A /B 90 11 12 11 10 10 ,A ,90,B ,B ,90,A , ,A B 6 6-1 ?

bracket) are included with the above parts. 3 Direct Operated 2 Port for Heated Water Series VCB Dimensions Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port

DOWN OUT1 U P SET Bracket B and the bracket assembly make up one set. Bracket B Bracket assembly 16-2-53 10 Series ISE70/75/75H Specific Product Precautions 2 Be sure to read before handling. Set pressure range and rated pressure range Caution 1. Set the pressure within the rated pressure range. The set pressure range is the range of pressure that is possible in setting.

A SMC LVN30 S 10 08 B Different dia. tubing size (B side) Applicable tubing size (A side) 17-5-132 2 Series LVN High Purity Fluoropolymer Needle Valve Standard Specifications Model LVN20 LVN30 LVN40 Tubing O.D.

Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 9 40 22 32 12 Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 6

hole 3-7 Mounting hole 5-3-32 3 4/5 Port Air Operated Valve Series VSA430 Model Valve model Body size Function Flow characteristics P A/B C[dm3/(sbar)] 6.4 8.7 9.2 6.4 8.7 9.2 6.2 8.1 10 6.6 8.9 11 Port size Rc 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 Note) Weight (kg) A/B EA/EB Pilot port size SA C[dm3/(sbar)] 6.3 8.2 9.6 6.3 8.2 9.6 5.8 7.5 9.5 5.5 6.7 9.4 b 0.16 0.28 0.14 0.16

VNB1 V 12 (P1) 10 (P2) VNB 1V (N.C.) 0 6 VN*-OMJ0001-B () P2 O O 7 VN*-OMJ0001-B No. 1 2 3 4 5 6 7 8 9 10 11 P2N.C.

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output