IDX-OM-V020

Coefficient factors Inlet air temperature (oC) 5 to 25 30 35 40 45 50 55 60 65 1.42 1.15 1.00 0.71 0.62 0.50 0.40 0.33 0.21 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 to 1.6 0.71 0.75 0.82 0.89 1.00 Ambient temperature (oC) 2 to 25 30 35 40 45 1.0 0.85 0.80 0.73 0.62 Calculation example: The air flow capacity when the dew point of IDFA60 is set to 10 oC under the following conditions <

IDX-OM-U022

45 45 IDFA100F150F 2 1 2.1 IDX-OM-U022 2. 2.2 2.2.1 (1) (85%) () B C 245050 () 2000m ) (2) IDFA100F150F 2 2 2.2 IDX-OM-U022 2. 2.2.2 P.6-3 6.3 IDF-AB501 14 1 1 1 4 5 2 3 1 600mm 600mm 600mm 600mm 600mm 1 IDFA100F150F 2 3 2.2 IDX-OM-U022 2. 2.2.3 60 60 .

IDX-OM-W020

F (7.2C) (19 m 3/h) (27 m 3/h) (45 m 3/h) (74 m 3/h) (106 m 3/h) (136 m 3/h) 17 SCFM 28 SCFM 45 SCFM 65 SCFM 86 SCFM 12 SCFM 50 F (10C) (20 m 3/h) (28 m 3/h) (47 m 3/h) (77 m 3/h) (110 m 3/h) (147 m 3/h) 100psig (0.7MPa) 100 F (37.8C) 100 F (37.8C) 115V 60Hz 41-122 F (5-50C) 22psig (0.15MPa) 150psig (1.0MPa) () 36-104 F (2-40C) (85%) () 1 AC115V10% 60Hz (Note3) (2) 2.7A 3.0A

PSxx-OML0002CN

. <> [F 6] [FSC] 1 [F 6] -34No.PS-OML0002CN-G [F 7] 30 <> [F 7] [F 7] 30 () (ON) ON OFF ON -35No.PS-OML0002CN-G [F 8] <> [F 8] [F 8] 0 45 -36No.PS-OML0002CN-G [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 38 -37No.PS-OML0002CN-G 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 7 OUT2 8 OUT2 NPN2 PNP2 9 OUT2 10 OUT2 11 12 13 14 15 16 2 -38No.PS-OML0002CN-G [F97]

PSxx-OMM0006CN

(G )JIS B0202(ISO228-1) ISO1179-1(G ) () ISO1179-1 ISO1179-2 ISO1179-3 ISO1179-4 () ISO16030(G )()ISO16030 () [V] [mA] A B C 0.0-101.3 kPa 0 -101.3 kPa -100.0100.0 kPa -100 kPa 100 kPa -0.1001.000 MPa -0.1 MPa 0 1 MPa -61No.PS-OMM0006CN-E M8(3 ) ZSE40A() ISE40A() 0-101.3 kPa -0.1001.000 MPa 10.0-105.0 kPa -0.1051.050 MPa 500 kPa 1.5 Mpa 0.1 kPa 0.001 Mpa DC1224 V 10 (p-p)10() 45

VQC5000Series

Tightening torque (Nm) Wrench tightening angle after tightened by hand (deg) Warning Uni thread size 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection Female Thread : G Wrench tightening angle after tightened by hand (deg) Tightening torque (Nm) Uni thread size 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 2

VP3145-OMH0005

Connection Female Thread: Rc, NPT, NPTF Wrench tightening angle Tightening torque after tightened by hand Uni thread size (Nm) (deg) 1/8 30 to 60 3 to 5 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 5 VP3145-OMH0005-D VPA315 Series Precautions for 3 Port Air Operated Valve Be sure to read before handling.

Modular F.R.L. Pressure Control Equipment

ARG20P-270AS ARG20P-260AS ARG30P-270AS ARG30P-260AS ARG40P-270AS ARG40P-260AS ARG40P-270AS ARG40P-260S GB4-10AS GB4-3AS GB4-P10AS GB4-P3AS AD48 AD47 ARG30P-270AS ARG30P-260S GB3-10AS GB3-3AS GB3-P10AS GB3-P3AS AD38 AD37 ARG20P-270AS ARG20P-260S GB2-10AS GB2-3AS GB2-P10AS GB2-P3AS AD27 Set nut GB2-10AS GB3-10AS GB4-10AS Standard Pressure gauge 0 to 1.0 MPa 0 to 0.3 MPa 0 to 150 psi 0 to 45

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve and armature when pilot signal is ON and OFF.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve and armature when pilot signal is ON and OFF.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45

Compact Electric Actuator Series LG1

(They can also be validated by parameters.) 6) A sequence should be implemented to turn ON the RDY relay after confirming that there is no trouble with the servo (ALM signal is ON). 13 Series LG1H Nonstandard Motors / Yaskawa Electric Corporation Drivers Dimensions 45 2-6 149 160 6 50 55 130 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 6 7 8 10 13 Pin No. 14 15 16

One-touch Fittings Series KQ2

Universal male elbow allows thread connection by using a socket wrench for confined space. 45 male elbow Extended male elbow The most appropriate use is when the elbow extends over a standard elbow for ease of connection/ disconnection of tubing. P. 41 KQ2K used in applications where a 45 elbow or male connector stresses the tubing.

Electro-Pneumatic Valve NVEP/NVEF Series

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

Digital Flow Switches Series PF2A

l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Display units l, ft3 x 10-1 Accumulated flow Accumulated flow range Note 4) 0 to 9 l Linearity Note 5) 5% F.S. or less Repeatability Note 5) 1% F.S. or less 1% F.S. or less (15 to 35C, based on 25C) 2% F.S. or less (0 to 50C, based on 25C) Temperature characteristics Current consumption (No load) 50 mA or less 60 mA or less Weight 45

Heavy Duty Stopper Cylinder Series RSH/RS1H

45 D 32 40 50 E 64 77 98 FT 20 25 25 O A 221 243.5 299.5 B 93 99 128 CD 20 20 25 L 45 54 56 N 9 11 13 QA 10 12.5 12.5 QB 7 8.5 10 GB 16 24 35 Stroke 30 30 40 Bore size (mm) 50 63 80 14 depth 5 18 depth 6 20 depth 6 P (Piping port) TN NPT 1/8 NPT 1/4 NPT 1/4 R 40 47 54 S 21 24.5 31 T 2 3.5 3 U 5.5 6.4 6.7 V 15.5 16 19.4 W 72 87.5 109 WB 32 38.5 49 X 5 5 6 Y 10 10 12.5 Stroke 30 30 40 Bore

REFRIGERATION AIR DRYERS, AIR COOLING SYSTEM, Series PDE

[F/C] +100 (+115) / +37.8 (+45) Nominal inlet air pressure [psig / bar] 34 / 7 Max. inlet air pressure [psig / bar] 232 / 16 Exit pressure drop p [psig / bar] 2.9 / 0.2 Inlet outlet connections NPT-F 1/2 3/4 1 Type of refrigerant HFA 134.a Refrigerant loading [oz / gr] 7.1 / 200 9.7 / 7.1 / 11.5 / 325 275 200 Nominal electric absorption [A / W] 2.2 / 170 2.7 / 210 3.3 / 250 4.3 / 330 5.9

3 Position Cylinder Series RZQ

size) FA H effective thread depth C Q FB G I D M K E Z a a L B + Full stroke M K A + Full stroke J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45