Wireless System

Description 73.6 1 24 V (for output) 56.6 2 1 2 0 V (for output) 3 24 V (for control/input) 5 30.2 4 0 V (for control/input) 4 3 13.2 5 FE EX600-ED3 42.5 5.5 26 20.5 8 106 90 30.35 Power supply connector PWR: 7/8 inch 5-pin plug 56.6 Configuration Pin no.

Thermo-chiller

It generates particles internally. 26 HRLE Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

(Single) 113.1 (Double) 122 (3 position) (108.5) 10 74.5 35 5.5 28.1 12.7 34.3 2 x M4 DIN rail clamp screw Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 9 Release for switching connector direction Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D n 8 7 6 5 4 3 2 Stations 1 9 60 37 26

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS3002FS-11 3/8" 18.5 16 69.8 21 38.1 AS4002FS-11 3/8" 18.5 16 4.3 8 18.8 26 76.9 11.3 23.7 64.3 62.7 28 33 14 26.2 21 26 29 10 19 50.2 AS4002FS-13 1/2" 21.7 20 81.3 22 57.4 1 Reference dimensions 6 AS-FS Series Dimensions L-Bracket Bracket on a single side DIN Rail Mounting Bracket Bracket on a single side L17 L16 L15 AS1002FS AS2002FS L12 L13 L14 L24 2 x D6 L22 t2 L21 L20 L19 L23 L11

CL

S + Stroke ZZ + Stroke With rod boot l h + l ZZ + l + Stroke Bore size (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 26 31 38 47 4 7 7 8 4 7 7 8 5.5 9 9 11 3.5 4 4 4 54 62 62 67 19 20 21 23 12 12 11 12 85 95 95 103 12 14 18 25 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 24 29 36 44 18 22 22 30 M8 x 1.25 M10 x 1.25 M10 x

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

B port (mm) A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.5 11 14 13 12 13 15.5 14 0 0.043 0.004 0.012 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0 0.043 0.004 0.012 6 14 42 34.5 10 20 M5 x 0.8 1.5 17 7 10 0.5 36 M4 x 0.7 4.5 M4 x 0.7 26

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

Compact and Lightweight

V Port: Screw-in P/E Port: One-touch Fitting ZX Model H2 L4 Connection thread 2 ZM ZH05DA-06-01-06 12 26 Rc1/8 ZH07DA-06-01-06 ZH10DA-06-01-08 ZH13DA-08-02-10 17 36.3 Rc1/4 ZH15DA-08-03-10 19 37.1 Rc3/8 ZH18DA-10-03-12 39.1 ZH20DA-10-04-12 24 44.1 Rc1/2 ZL Metric ZH ZH ZH ZH05DA-07-N01-07 12.7 26 NPT1/8 ZH07DA-07-N01-07 ZH10DA-07-N01-09 ZH13DA-09-N02-11 17.46 36.3 NPT1/4 ZH15DA-09-N03-11

IDG

Description Note IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75/75L/75S IDG100/100H/100L/100S IDG-EL60 IDG-EL60L IDG-EL75 IDG-EL75L IDG-EL100 IDG-EL100L y Membrane module kit IDG-EL30 IDG-EL50 u i IDG-DP01 Dew point indicator kit Option: P IDG-DP01-X001 14-19-29 26 Series IDG Dimensions IDG1 (293) Purge air outlet for dehumidification (67) (46) (26) IN Port size: 1/4 OUT Port size

Table of Contents

(Example) CUJ-M3 x 27l A A C B B D Axial mounting style Lateral mounting style Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Without Auto Switch For Axial Mounting For Lateral Mounting B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 Model Mounting

MXF

26 14.5 26 4 MXF8-30 78 69.5 69 41 40 14.5 26 6 8-6-10 11 Low Profile Slide Table Series MXF Dimensions: MXF12 Stroke adjuster at extension end Stroke adjuster at retraction end Width across hexagon socket hole 2.5 MX Width across flats 7 N 2 ( 1) x 25 Blanking plug (M-5P 2 points) Possible to use as operating port 2-M5 x 0.8 MTS 20.5 25 4 3H9 +0.025 0 depth 3 N-M3 x 0.5 thread depth 5.5

Series CM3 double acting, single rod cylinders are a fully functional, compact cylinder used for space saving designs.  The CM3 series offers a variety of mounting options and is auto switch capable.  The CM3 is now RoHS compliant.Double acting, single rod , Bore sizes; 20mm, 25mm, 32mm, 40mm , Strokes from 25mm through 300mm , Mounting: basic, foot, flange, clevis, trunnion, RoHS compliant

Series CM3 double acting, single rod cylinders are a fully functional, compact cylinder used for space saving designs.  The CM3 series offers a variety of mounting options and is auto switch capable.  The CM3 is now RoHS compliant.Double acting, single rod , Bore sizes; 20mm, 25mm, 32mm, 40mm , Strokes from 25mm through 300mm , Mounting: basic, foot, flange, clevis, trunnion, RoHS compliant

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 26, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber bumper (standard), Operating Pressure(MPa): 0.05 to 1.0, Specification: Without magnet, Support bracket: None, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 26, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber bumper (standard), Operating Pressure(MPa): 0.05 to 1.0, Specification: Without magnet, Support bracket: None, Auto Switches: Without

PFxx-OMY0005

No.PF-OMY0005-A PRODUCT NAME Digital Flow Switch (Modular type) MODEL/ Series/ Product Number PF3A801H-L PF3A802H-L Table of Contents Safety Instructions 3 Model Indication and How to Order 11 Names and Functions of Individual Parts 12 Definition and terminology 15 Mounting and Installation 19 Piping 20 Wiring 22 Outline of Settings [Measurement mode] 25 Change of Set Value [3 step setting mode] 26

Digital Flow Switch (Integrated display type) ( compatible)

No.PF-OMW0010-D PRODUCT NAME Digital Flow Switch (Integrated display type) ( compatible) MODEL / Series / Product Number PF3W7## Table of Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product parts 14 Definition and terminology 16 Mounting and Installation 18 Installation 19 Piping 21 Wiring 24 Flow Setting 26 Simple Setting Mode 29 Function Setting 30 Default

LFE-OMZ0013

Note Panel mount adapter ZS-26-B Waterproof seal with screw Front protective cover Panel mount adapter ZS-26-C Waterproof seal with screw Protective cover only ZS-26-01 Please order panel mount adapters etc. separately Power supply/output lead wire ZS-40-W Lead wire length: 2 m Sensor connector (e-con) ZS-28-C-5 1 pcs Copy lead wire ZS-40-Y Connect up to 10 copy destination units -9No.LFE

CEx-OMQ0011

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Rotary Actuator

In this case, please provide a buffer angle to the stroke of the actuator Use 100 actuator in the case of 90 stroke and use 190 actuator in the case of 180 stroke. and touch it to an external stopper or the shock absorber surely. 26 Excessive kinetic energy was applied to the rotary actuator. The pinion gear is broken. 26 Replace with a new actuator.