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See pages 31-39 for more information on SMC'S LC6 series drivers, Seiles uff EleGriGlcMflors 0inrmh$l$till$swm LXFH5B (30Omm) ft hlor-T;+ -r-I "kl T slot dimensions (21 ) J I shows the location ai which origjn poinl swirch opetales.

pressure: 600 psig (4.1 MPa) 1.5 (38.1) 80 0.55 0.48 70 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 0.41 60 0.34 50 0.27 40 0.69 (17.5) 0.21 30 0.14 20 2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21

2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58

O-ring NBR 17 O-ring NBR 18 O-ring NBR 19 O-ring NBR 20 O-ring NBR 21 O-ring NBR 22 O-ring NBR 172 Lock-Up Valve IL201/211/220 Series Dimensions IL201 14.5 Panel fitting dimension Panel 35 58 45 Max. 4 2 x 6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 Panel fitting dimension 14.5 IP 58 45 Panel 35 Max. 4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG

No.PF-OMO0007CN / / PF2A7## 2 10 12 13 15 15 16 17 19 20 21 22 25 F_1 26 F_2 () 27 F_3 28 30 31 32 32 34 35 35 37 38 40 -1No.PF-OMO0007CN (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (

20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch alarm

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

B Through screw clearance hole / NC(D)Q8WN (Inch) Symbol Bore 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") E 4-E 0.20 0.25 0.25 0.34 0.34 0.41 21 Compact Cylinder Single Acting, Single Rod Bore size: 056 (9/16), 075 (3/4), 106 (1-1/16), 150 (1-1/2), 200 (2), 250 (2-1/2) Series NCQ8 How to Order Without auto switch B 056 025 S NCQ8 B 056 025 S M9B S NCDQ8 With auto

Bit area Input (RX) Output (RY) RDX EXW1-RDX* (16 points) 16 0 RDY EXW1-RDY* (16 points) 0 16 Compact wireless Remote RDM EXW1-RDM* (8 points) 16*1 16*1 *1: The number of inputs/outputs is fixed at 16 (16 bits), and only the lower 8 bits are valid. -72No.EX-OMZ0016-C EX600-W Series Unit name Model Unit product no.

Input size* 16 points (16 bits) 16 points (16 bits) Fixed For the EXW1-RD#, the number is fixed at 16 (16 bits). * Although the number of occupied outputs of EXW1-RDM# is fixed at 16 (16 bits), only the lower 8 bits are available.

, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber bumper (basic cylinder section) Shock absorber

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 20.5 10 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 22.5 16 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 24.5 20 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 33.5 25 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 40.5 30, 40 22 Applicable bore size (mm) Part no.

Nil W High rigidity direct acting guide H Axial F Cable entry direction Series Cable length Without coupling With coupling 20 21 2m 3m 4m 5m 2 3 4 5 Stroke Lead screw lead Motor specification 10mm 20mm A C Standard motor Matsushita Electric Industrial Co., Ltd.

L2 = 21 x m + 89.8 L1 = 10.5 x n + 45 Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof. Default settings At the time of factory shipment, the product is in "Remote Control Mode" and set to "Enable DHCP".

ON 23 4. 10. 24 5. 1 CG5SR CG5SV 2 15 3 16 NBR FKM 4 17 5 18 6 19 7 20 PET 8 21 9 22 10 11 12 13 14 1CG1 2 11. 25 Revision history 1: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

Bore (mm) Description Mounting nut Rod end nut SNPS-006 NTP-006 SNPS-010 NTP-010 SNPS-015 NTP-015 6 10 15 1.2-9 Series CJP Recommended Mounting Hole Dimensions for Plug Mounting Style Machining dimensions for Mounting When plug mounted Bore (mm) Stroke A B G F C E D 5 16 12.5 10 6 10 23 3 19.5 8.5 M10 X 1.0 17 3.5 15 30 26.5 24 5 17 13.5 10.5 10 10 23.5 4 12 20 M15 X 1.5 3.5 17 15 30.5 27

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

AT MV MV /F % %, IDH Series 13 1.1 IDX-OM-W038 2. 2 2.1 IDH Series 21 2.1 IDX-OM-W038 2. 2.2 2.2.1 (1) 1. (85%) 2. 3. 4. 5. 1535050 6. 7. () 8. 9. 10. 11. 2000m 12. 13. 14. 15. 16.